• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.493-496
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• 2011

In this paper, ion beam technology was investigated mainly through the published papers. There are two different types of method application. One method is to remove the material from the substrate, the other one is deposited to the surface of the substrate or specimen. Based on the literature review there are 3-4 times more published research papers related to the deposition than those of the removal.

• Journal of the Korea Institute of Military Science and Technology
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• v.14 no.6
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• pp.1107-1113
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• 2011

In this paper, ion beam technology was investigated through the published papers. Ion beam technology is mainly used by the focused ion beams. There are two different types of application methods. One method is to remove the material from the substrate, the other one is to deposit the materials on the surface of the substrate or specimen. Based on the literature review there are 1.5 times more published research papers related to the deposition than those of the removal.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.159-160
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.111-112
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.785-786
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• 2011

• 전자공학회논문지 IE
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• v.47 no.2
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• pp.8-12
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• 2010

TEM is a powerful tool for semiconductor material analyses in structure or biological sample in micro structure. TEM observation need to make to coincide specimens for special purpose. in this paper, we have experimented for minimum surface damage on bulk wafer and patterned specimen by various conditions such as accelerating energy, depth of ion beam, ion milling types, and etc. in various specimen preparation methods by FIB (Focus Ion Beam). The optimal qualified specimens are contain low mounts of surface damage(about 5 nm) on patterned specimen.

• Prospectives of Industrial Chemistry
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• v.23 no.5
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• pp.12-20
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• 2020

최근 층상구조를 가진 전이금속 칼코겐 화합물이 새로운 고성능 리튬이온전지 음극소재로서 주목받고 있다. 층상구조 물질들의 고성능 전극 소재 활용에 있어 박리를 이용한 정확한 층의 개수 조절은 전기화학 반응성을 증가시키고, 전극 필름 내에서의 균일한 거동을 위해서 매우 중요하다. 볼 밀링 공정은 이차전지 전극 소재 제조에 있어서 주로 물질의 분쇄나 고상 화학반응을 유도하여 합금 형태의 전극 소재 개발에 보편적으로 사용되는 공정이나, 층상구조를 가진 전이금속 칼코겐 화합물에 적용하면 층상구조 물질에 고체윤활작용을 일으켜 박리가 촉진된다. 이러한 성질을 이용하여 다양한 종류의 전이금속 칼코겐 화합물(예: MoS₂, MoSe₂, NbSe₂)에 적절한 카본 매트릭스 물질과 복합화를 통해 새로운 전극 소재를 합성하고, 이를 통해 고성능 리튬이온전지 음극 소재를 제조하는 연구 동향에 대해 보고하고자 한다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.322-325
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• 2005

The shrinking critical dimensions of modern technology place a heavy requirement on optimizing feature shapes at the micro- and nano scale. In addition, the use of ion beams in the nano-scale world is greatly increased by technology development. Especially, Focused ion Beam (FIB) has a great potential to fabricate the device in nano-scale. Nevertheless, FIB has several limitations, surface swelling in low ion dose regime, precipitation of incident ions, and the re-deposition effect due to the sputtered atoms. In recent years, many approaches and research results show that the re-deposition effect is the most outstanding effect to overcome or reduce in fabrication of micro and nano devices. A 2D string based simulation software AMADEUS-2D $(\underline{A}dvanced\;\underline{M}odeling\;and\;\underline{D}esign\;\underline{E}nvironment\;for\;\underline{S}putter\;Processes)$ for ion milling and FIB direct fabrication has been developed. It is capable of simulating ion beam sputtering and re-deposition. In this paper, the 2D FIB simulation is demonstrated and the characteristics of ion beam induced direct fabrication is analyzed according to various parameters. Several examples, single pixel, multi scan box region, and re-deposited sidewall formation, are given.

• 한국신재생에너지학회:학술대회논문집
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• 2005.06a
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• pp.546-549
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• 2005

Micro EDM milling using deionized water as dielectric fluid was investigated. After machining micro grooves using deionized water with different voltage. capacitance. and resistivity of deionized water, machining characteristics were investigated. The wear of a tool electrode and the machining time can be reduced by using deionized water instead of kerosene. Micro hemispheres were machined in deionized water and kerosene and their machining characteristics were compared.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.109-110
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• 2008