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http://dx.doi.org/10.9766/KIMST.2011.14.6.1107

A Review of Ion Beam Technology  

Lee, Tae-Ho (KISTI)
Publication Information
Journal of the Korea Institute of Military Science and Technology / v.14, no.6, 2011 , pp. 1107-1113 More about this Journal
Abstract
In this paper, ion beam technology was investigated through the published papers. Ion beam technology is mainly used by the focused ion beams. There are two different types of application methods. One method is to remove the material from the substrate, the other one is to deposit the materials on the surface of the substrate or specimen. Based on the literature review there are 1.5 times more published research papers related to the deposition than those of the removal.
Keywords
Ion Beam Milling; Ion Beam Deposition; Ion Beam Implantation; Ion Coating; Focused Ion Beam;
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