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V. E. Krohn and G. R. Ringo, "Ion Source of High Brightness using Liquid Metal", Applied Physics Lett, 27. pp. 479-518, 1975.
DOI
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2 |
J. Melngaills, "Critical Review : Focused Ion Beam Technologies and Applications", J. Vac. Sci. Technol. B5, pp. 469-495, 1987.
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3 |
J. Fu, et al, "A Study of Angular Effects in Focused Ion Beam Milling of Water Ice", Journal Micromech., Microeng. 18, pp. 1-8, 2008.
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4 |
http://www.spirecorp.com/spire-biomedical/surfacemodification-technology/ion-beam-assisted-deposition.php.
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5 |
R. Anderson and S. J. Klepeis, "Combined Tripod Polishing and FIB Method for Preparing Semiconductor Plan View Specimen", Material Research Society Symposium Proceedings, 480 Pittsburgh PA, p. 187, 1997.
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6 |
A. Giannuzzi, F. A. Stevie., "A Review of Focused Ion Beam Milling Techniques for TEM Specimen Preparation", Micron, 30, pp. 197-204, 1999.
DOI
ScienceOn
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7 |
Vladimir Matias, et al, "Coated Conductors Textured by Ion Beam Assisted Deposition", Physica C 460-462, pp. 312-315, 2007.
DOI
ScienceOn
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8 |
E. C. G. Kirk et al, "Cross-sectional Transmission Electron Microscopy of Precisely Selected Regions from Semiconductor Devices, Inst Phycs Conf Ser, 100, pp. 501-506, 1989.
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9 |
R. L. Seliger and W. P. Fleming, "Focused Ion Beam in Micro-fabrication", Journal pf Physics, 45, pp. 1416-1422, 1974.
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10 |
http://ionbeammilling.com/(이온빔 밀링 회사).
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11 |
http://www.4waveinc.com/ibd.html(증착).
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12 |
http://www.rare-metal.com/en/bigclassmemo.aspx?id=40 (이온빔 코팅).
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13 |
http://en.wikipedia.org/wiki/Anti-reflective_coating#Index-matching(무반사 코팅).
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14 |
http://www.fabtech.org/images/uploads/Companies/Carl_Zeiss/zeiss_9_him_column_300.gif.
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15 |
http://www.laseroptik.de/index.php?Coating_Guide:Prod._Methods:Ion_Beam_Sputtering(이온빔 스퍼터링).
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16 |
Y. Iijima et al, Physica C 426, p. 899, 2005.
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17 |
http://www.vanderbilt.edu/exploration/print/pdfs/news/news_shutter2.pdf(이온빔 주입).
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18 |
M. Kitamura, E. Koike, N. Tkasu, T. Nishimura, "Focused Ion Beam Machining for Optical Microlens Fabrication", Japan Journal of Applied Physics, 41, pp. 4019-4021, 2002.
DOI
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19 |
T. Masuzawa, Y. Yishida, H. Ikeda, K. Oguchi, H Yamagishi and Y. Yakabayashi, "Development of a Local Vacuum System for Focused Ion Beam Machining", Review of Scientific Instrument, 80, pp. 0737081-5, 2009.
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