• 한국정밀공학회지
• /
• 제22권8호
• /
• pp.151-158
• /
• 2005

In the semiconductor and the optical industry, a new transport system which can replace the conventional sliding systems is required. The sliding systems are driven by the magnetic field and conveyer belts. The magnetic field nay damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this paper, an object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal progressive frequency and the phase-differences between two ultrasonic wave generators are performed. The relationships between transportation speed and the excitation frequency, flexural beam shapes and amplification voltage are investigated.

• 한국정밀공학회지
• /
• 제21권10호
• /
• pp.170-179
• /
• 2004

A vibration model of powder transfer equipment is developed by the lumped parameter method. A Powder transfer equipment does surging motion, bouncing motion and pitching motion. Motion equation becomes decoupling and removed vibration exciting source about pitching motion, and therefore designers presented the optimum design plan to be able to do adjustment with motion trajectory of powder transfer equipment. That is, way for design to be able to do motion trajectory of powder transfer equipment through change of design element as installation position and direction of motor, driving speed, mass unbalance, stiffness coefficient and installation position of support coil spring is presented. The design results, powder transfer equipment were able to know that fatigue destruction does not occur, and the reason is because maximum stress working on a basket structure is more very than fatigue strength small.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2003년도 춘계학술대회 논문집
• /
• pp.371-375
• /
• 2003

In recent years, as the semiconductor and the optical industry grows, the necessity of the transporting system for semiconductor and precision optical lens without damage increases. The transport system using ultrasonic wave is very suitable for this area. In this paper the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The effect of transporting speed according to the change of weight and amplification voltage are verified. In addition, the system performance for actual use is evaluated.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1996년도 추계학술대회 논문집
• /
• pp.621-625
• /
• 1996

The feed system of the machine tools is limited by the mechanical transmission elements. However, thanks to the advanced modern technology, those machines are able to equip with linear motors. In this paper, the types and application aspects of linear motor are discussed and a synchronous type of the linear motors has been applied to X-Y table for machining center. The performance shows an outstanding result in terms of the accuracy, speed and stiffness. Machine tool system with linear motors is expected to be more productive machines using linear motor in the near next years.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2003년도 추계학술대회논문집
• /
• pp.696-699
• /
• 2003

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. There systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The relationship of transporting speed according to the change of flexural beam shape is verified and the system performance for practical use is evaluated.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2003년도 춘계학술대회논문집
• /
• pp.956-959
• /
• 2003

In the semiconductor and the optical industry a new transport system which can replace the common system is required. The common systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system solve these problem. In this paper the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave get orators are performed. The effect of transporting speed according to the change of weight and amplification voltage are verified. In addition, the system performance for actual use is evaluated.

• 한국농업기계학회:학술대회논문집
• /
• 한국농업기계학회 2002년도 동계 학술대회 논문집
• /
• pp.573-578
• /
• 2002

양파박피기 개발을 목적으로 수행된 본 연구에서는 공정상 필요한 뿌리절단장치에 관하여 시험 분석하였다. 뿌리를 절단, 제거하는 데 적합한 칼날의 종류, 회전속도와 이송속도, 및 소요동력 등 제 특성을 구명하여 적절한 회전칼날을 제작 사용함으로써 능률 높은 양파박피기를 개발하고자 수행한 결과를 요약하면 다음과 같다. 1. 양날형, 축날형, 원추형, 및 원통형 등 직경 30 mm의 칼날을 제작하여 실험하였던 바, 양파의 뿌리절단에는 구부린 칼날로 파내기를 하고 수직칼날로 금긋기를 동시에 할 수 있는 양날형이 가장 좋은 것으로 나타났다. 2. 양파의 뿌리부가 100% 절단이 되고 소요동력이 낮으면서 절단시간을 단축할 수 있는 최적의 작동조건은 칼날의 무부하 회전수 630 rpm, 이송속도 0.08 m/s인 것으로 나타났고, 그때의 최대토크는 5.25 kg·cm이었으며 최대소요동력은 33W로 나타났다.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2005년도 추계학술대회논문집
• /
• pp.559-563
• /
• 2005

The wafer positioning robot used in the semiconductor industry is required to operate at high speed for the improvement of productivity. However, the residual vibration produced by the high speed of the wafer positioning robot makes the life of the robot shorter and the cycle time longer. In this study, the input shaping and the path of the system are designed for the reduction of the residual vibration and the optimization of the cycle time. The followings are the process for the reduction and the optimization; 1)System modeling of wafer positioning robot, 2)Verification of dynamic characteristic of wafer positioning robot, 3)Input shaping plan using impulse response reiteration, 4)Simulation test using simulink, 6)Analysis of result.

• 한국가시화정보학회지
• /
• 제20권3호
• /
• pp.58-66
• /
• 2022

The high heat emitted from the process module and heat jacket may cause errors in semiconductor process equipment. Barriers were designed to reduce the temperature of surface on transfer module. A designed barrier was compared and analyzed by numerical analysis using ANSYS Fluent. The average temperature of barrier and effect of radiation heat transfer were also compared through absorbed radiative heat flux of the barrier. The adoption of the barrier had an effect on the radiative heat transfer reduction of the transfer module rod. The effect of the angles of barrier from 50° to 90° on the heat transfer was investigated using the absorbed radiative heat flux with the average temperature. The angle of barrier of 50° reduced the temperature up to 9.6 %.

• 한국지하수토양환경학회:학술대회논문집
• /
• 한국지하수토양환경학회 2003년도 총회 및 춘계학술발표회
• /
• pp.409-412
• /
• 2003

본 연구는 호소내 오염된 퇴적물 처리를 위한 전처리 장치로 Hydrocyclone의 이용가능 성을 평가하는 실험이다. 외국의 선행 연구자인 Rietema의 표준 규격을 참고하여 제작된 Hydrocyclone을 이용하여 기흥저수지 퇴적물로 실험을 실시하였다. 실험결과 입자에 따른 오염 도 평가에서는 입자가 작을수록 포함된 오염물의 농도가 높은 것으로 나타났다. 또한 퇴적물을 이용한 장치특성 및 운전조건 변화에 따른 실험에서 공급속도가 빠르고, 공급시료의 농도가 낮으며, 장치의 크기가 작을수록 입자별 분리효율이 높았다.