Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A Study on the Dynamic Characteristics of Object Transport System using Ultrasonic Wave

초음파를 이용한 물체 이송시스템의 동작특성 연구

  • 정상화 (조선대학교 기계공학과) ;
  • 김현욱 (조선대학교 대학원 기계공학과) ;
  • 차경래 (조선대학교 대학원 기계공학과) ;
  • 최석봉 (조선대학교 대학원 기계공학과) ;
  • 송석 (조선대학교 대학원 기계공학과)
  • Published : 2005.08.01
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Abstract

In the semiconductor and the optical industry, a new transport system which can replace the conventional sliding systems is required. The sliding systems are driven by the magnetic field and conveyer belts. The magnetic field nay damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this paper, an object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal progressive frequency and the phase-differences between two ultrasonic wave generators are performed. The relationships between transportation speed and the excitation frequency, flexural beam shapes and amplification voltage are investigated.

Keywords

References

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