• Title/Summary/Keyword: 이극자

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Fabrication of the Plasma Focus Device for Advanced Lithography Light Source and Its Electro Optical Characteristics in Argon Arc Plasma (차세대 리소그래피 빛샘 발생을 위한 플라스마 집속 장치의 제작과 아르곤 아크 플라스마의 발생에 따른 회로 분석 및 전기 광학적 특성 연구)

  • Lee S.B.;Moon M.W.;Oh P.Y.;Song K.B.;Lim J.E.;Hong Y.J.;Yi W.J.;Choi E.H.
    • Journal of the Korean Vacuum Society
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    • v.15 no.4
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    • pp.380-386
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    • 2006
  • In this study, we had designed and fabricated the plasma focus device which can generate the light source for EUV(Extreme Ultra Violet) lithography. And we also have investigated the basic electrical characteristics of currents, voltages, resistance and inductance of this system. Voltage and current signals were measured by C-dot and B-dot probe, respectively. We applied various voltages of 1.5, 2, 2.5 and 3 kV to the anode electrode and observed voltages and current signals in accordance with various Ar pressures of 1 mTorr to 100 Torr in diode chamber. It is observed that the peak values of voltage and current signals were measured at 300 mTorr, where the inductance and impedance were also estimated to be 73 nH and $35 m{\Omega}$ respectively. The electron temperature has been shown to be 13000 K at the diode voltage of 2.5 kV and this gas pressure of 300 mTorr. It is also found that the ion density Ni and ionization rate 0 have been shown to be $N_i = 8.25{\times}10^{15}/cc$ and ${\delta}$= 77.8%, respectively by optical emission spectroscopy from assumption of local thermodynamic equilibrium(LTE) plasma.

Time-Domain Electromagnetic Coupling in Induced Polarization Surveys on a Uniform Earth (균질대지에 대한 시간영역 유도분극법에 전자기결합)

  • Kim, Hee Joon
    • Economic and Environmental Geology
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    • v.19 no.3
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    • pp.193-197
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    • 1986
  • A simple and fast solution is derived to evaluate the effects of time-domain electromagnetic coupling in induced polarization surveys on a uniform earth. The simplified solution gives an explicit statement of the dependence of time-domain electromagnetic coupling on the model parameters, and yields sufficiently accurate results for most situations encountered in practice. The co-linear dipole-dipole and Wenner arrays are used as examples in this paper, but th numerical solution can be applied to any electrode configuration.

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Development of A New Fourier Transform Lithography Method in Nano Meter Scale (새로운 나노미터급 프리어 변환 리소그래피법 개발)

  • Kim Chang Kyo;Hong Chinsoo;Lee Eui Sik;Park Sung Hoon
    • Proceedings of the KAIS Fall Conference
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    • 2005.05a
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    • pp.125-127
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    • 2005
  • 나노미터 크기의 임의형상 패턴을 형성하기 위해서 새로운 프리어 변환 리소그래피법을 개발하였다. 나노미터급 리소그래피에서 자외선과 엑스레이 같은 전자기파가 나노미터 크기로 형상을 새긴 마스크 위에 조사되면 회절현상이 발생하여 불명확한 패턴을 얻게 된다. 극자외선을 사용하지 않고도 상대적으로 긴 파장의 레이저빔을 특수하게 제작된 마스크를 통해 볼록렌즈에 조사할 경우에 프리어 평면이라 알려진 평면위에 나노미터 크기의 패턴을 형성할 수 있다는 것을 증명하였다. 이 방법은 매우 단순한 장치로 구성할 수 있다는 장점을 가질 수 있다.

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Analysis of Selenium in Grain with ORC Collision-Removal of Br Interference using Mathematical Calibration (ORC ICPMS에서의 곡류중의 셀레늄 분석-수학적 보정을 이용한 Br의 간섭제거)

  • Cho, Heon-Hong;Pak, Yong-Nam
    • Journal of the Korean Chemical Society
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    • v.55 no.3
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    • pp.472-477
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    • 2011
  • The concentration of selenium in grain samples was determined using isotope dilution method in ORC-ICPMS. The experimental conditions were optimized to $H_2$ mode and the flow rate was $4.0\;mL\;min^{-1}$. ORC in $H_2$ mode proved to eliminate most of polyatomic interferences except $BrH^+$ when Br is present in sample matrix. Chemical removal of Br was very difficult and the mathematical correction was successfully employed. The fraction of $BrH^+$ generated from Br at the current experimental condition was 14.1%. The signal on m/z 82 was corrected and calculated for isotope dilution. The analytical reliability of the propose method was successfully evaluated by analyzing the certified standard reference material NIST SRM 1566 and 1567. The method was applied to real samples and the results are $0.034{\pm}0.001\;{\mu}g\;g^{-1}$ for white rice, $0.059{\pm}0.002_5\;{\mu}g\;g^{-1}$ for brown rice, $0.029{\pm}0.001_4\;{\mu}g\;g^{-1}$ for black rice, and $0.034{\pm}0.002\;{\mu}g \;g^{-1}$ for barley. The detection limits ($3\sigma$) for Se was $0.012\;ng\;g^{-1}$.

GPS TEC 관측자료로 살펴본 우리나라 전리층 특성에 관한 보고

  • Jeong, Jong-Gyun;Lee, Ji-Na
    • The Bulletin of The Korean Astronomical Society
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    • v.37 no.2
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    • pp.125.2-125.2
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    • 2012
  • 최근 아태지역 국제민간항공기구는 GPS의 항공이행을 위한 전리층 연구 태스크포스(Ionospheric Study Task Force, ISTF)를 결성하였다. 안전한 GPS 항공이행을 위해서는 지역적 그리고 전지구적 전리층 특성을 파악한 후 이를 기반으로 실시간 전리층 모델이 필요하다. 한국천문연구원은 ISTF의 전리층 변화 특성 분석에 관한 기술분과를 담당하고 있으며 GPS 항공이행 실시간 전리층 모델개발을 위한 아태지역 전리층 분석방법 및 표준규범을 수립하고 있다. 아태지역 전리층 연구에 앞서 우리나라 전리층 특성을 파악하고자 한국천문연구원이 1998년부터 운영 중에 있는 대전 국제 GPS 기준점으로부터 관측된 자료를 이용하여 태양 11년 주기에 해당하는 GPS TEC를 분석하였다. 또한, 해당 기간 동안 우리나라 양/음 전리층 폭풍 발생 빈도에 관한 통계분석을 실시하였다. 본 발표에서는 GPS TEC의 태양 극자외선 플럭스와 10.7 cm 태양전파와의 상관관계 차이점, 연변화 및 계절적 변화 그리고 이에 대한 시간 변화에 대해 보고한다. 또한 GPS TEC의 27일 주기 변화에 특성에 대해 토의하며, 우리나라 상공 전리층 폭풍의 계절적 분포에 대해 논의할 것이다. 끝으로 최근 한국천문연구원 GPS TEC 상시 관측자료에 나타난 태양 및 지자기 폭풍에 따른 전리층 폭풍 사례에 대해 고찰하고 이를 바탕으로 고층대기 연구가 GPS로 대표되는 현업에 적용되는 최근 현황을 소개할 것이다.

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A Study on Magnetic Properties of $Ni_{1-x}Zn_{x}Fe_{2}O_{4}(0{\leq}x{\leq}1)$ Ferrrite ($Ni_{1-x}Zn_{x}Fe_{2}O_{4}(0{\leq}x{\leq}1)$ Ferrrite의 자기적 성질 연구)

  • 조익한;양재석;김응찬;강신규
    • Journal of the Korean Magnetics Society
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    • v.6 no.6
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    • pp.397-404
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    • 1996
  • The magnetic properties of $Ni_{1-x}Zn_{x}Fe_{2}O_{4}$ have been studied by X-ray diffractometry and $M\"{o}ssbauer$ Spectroscopy at room temperature. The X-ray diffraction study show that spinel structure is formed in all x, lattice constants linearly increased from $8.3111{$\AA$}~8.4184{$\AA$}({\pm}0.0003)$ with increasing x from 0 to 1, and oxygen parameter increase with increasing x. $M\"{o}ssbauer$ spectrum shows that $Ni_{1-x}Zn_{x}Fe_{2}O_{4}(x=0)$ has two antiparallel magnetic structure due to $Fe^{3+}$ octahedral site and $Fe^{3+}$ tetrahedral site. $Ni_{1-x}Zn_{x}Fe_{2}O_{4}$ with $0.2{\leq}x{\leq}0.6$ has magnetic structure of Yafet and Kittel, in particularly, specimen with x=0.6 shows relaxation effect. Specimen with $x{\geq}0.8$ show paramagnetic quadrupole splitting. The isomer shift is independent of x, but quadrupole splittings decrease with increasing x in the range of $0.8{\leq}x{\leq}1$, and nuclear magnetic fields decrease with in¬creasing x in the range of $0{\leq}x{\leq}0.6$. The magnetic properties of $Ni_{1-x}Zn_{x}Fe_{2}O_{4}$ change from ferrimagnetics to pararnagnetics with increasing x.

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Analysis of multi-layered Surface with Glow Discharge-Mass Spectrometry (글로우방전 질량분석법을 이용한 다층박막의 표면 분석)

  • Pak, Yong-Nam;Lee, Gae-Ho;Kim, Hyo Jin
    • Analytical Science and Technology
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    • v.10 no.5
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    • pp.357-361
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    • 1997
  • A Griemm type Glow Discharge cell is attached to a commercial quadrapole based ICP-MS and used for the analysis of surface analysis. By employing 2.0mm diameter, mode and proper experimental conditions, several layers of few ${\mu}m$ thickness are analysed within 30 minutes. Multi-layers of Cu-Ni, Fe-Ni are analyzed with the resolution of 10nm by GDMS. Proper experimental conditions make a flat bottom crater shape and good resolution for multi-layer depth profile study.

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Acoustic Analysis of Axial Fan using Kirchhoff Surface (Kirchhoff 면을 이용한 홴소음 해석)

  • Park, Yong-Min;Song, Woo-Seog;Lee, Seung-Bae
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.27 no.6
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    • pp.701-713
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    • 2003
  • The BEM is a highly efficient method in the sense of economical computation. However, boundary integration is not easy for the complex geometry and moving surface, e.g. a rotating blade. Thus, Kirchhoff surface is designed in an effort to overcome the difficulty resulting from complex boundary conditions. A Kirchhoff surface is a fictitious surface which envelopes acoustic sources of main concern. Acoustic sources may be distributed on each Kirchhoff surface element according to their acoustic characteristics. In this study, an axial fan is assumed to have unsteady loading noise as a dominant source. Dipole sources can be modeled to solve the FW-H equation. Acoustic field is then computed by determining Kirchhoff surface on which near-field is implemented, to analyze the effect of Kirchhoff surface on it. The optimal shape and the location of Kirchhoff surface are discussed by comparing with experimental data acquired in an anechoic chamber.

Three-Dimensional Noise Analysis of an Axial-Flow Fan using Computational Aero-Acoustics (공력음향학을 이용한 축류홴의 삼차원 소음 해석)

  • Kim, Joo-Hyung;Kim, Jin-Hyuk;Shin, Seungyeol;Kim, Kwang-Yong;Lee, Seungbae
    • The KSFM Journal of Fluid Machinery
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    • v.15 no.5
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    • pp.48-53
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    • 2012
  • This paper presents a systematic procedure for three-dimensional noise analysis of an axial-flow fan by using computational aero-acoustics based on Ffowcs Williams-Hawkings equation. Flow-fields of a basic fan model are simulated by solving three-dimensional, unsteady, Reynolds-averaged Navier-Stokes equations using the commercial code ANSYS CFX 11.0. Starting with steady flow results, unsteady flow analysis is performed to extract the fluctuating pressures in the time domain at specified local points on the blade surface of the axial flow fan. The perturbed density wave by rotating blades reaches at the observer position, which is simulated by an in-house noise prediction software based on Ffowcs Williams-Hawkings equation. The detailed far-field noise signatures from the axial-flow fan are analyzed in terms of source types, field characteristics, and interpolation schemes.

Physical Mechanism of Light emission from Discharge Cells in the Plasma Display Panel (PDP 방전 셀에서 빛이 방출되는 물리적 메커니즘)

  • Uhm, Han-S.;Choi, Eun-H.
    • Journal of the Korean Vacuum Society
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    • v.15 no.6
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    • pp.556-562
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    • 2006
  • The plasma display panel is made of many small discharge cells, which consist of a discharge space between the cathode and anode. An electrical discharge occurs in the discharge space filled by neon and xenon gases. The electron temperature is determined from the sparking criterion, which theoretically estimates the electrical breakdown voltage in terms of the xenon mole fraction. The plasma in the cell emits vacuum ultraviolet lights of 147 nm and 173 nm, exciting fluorescent material and converting VUV lights to visible lights. The physical mechanisms of all these processes have been theoretically modeled and experimentally measured. The theory and experimental data agree reasonably well. However, new materials and better configuration of cells are needed to enhance discharge and light emission efficiency and to improve the PDP performance.