Fabrication of the Plasma Focus Device for Advanced Lithography Light Source and Its Electro Optical Characteristics in Argon Arc Plasma
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Lee S.B.
(Department of Electrophysics, Kwangwoon University)
Moon M.W. (Department of Electrophysics, Kwangwoon University) Oh P.Y. (Department of Electrophysics, Kwangwoon University) Song K.B. (Department of Electrophysics, Kwangwoon University) Lim J.E. (Department of Electrophysics, Kwangwoon University) Hong Y.J. (Department of Electrophysics, Kwangwoon University) Yi W.J. (Samsung SDI Central Research) Choi E.H. (Department of Electrophysics, Kwangwoon University) |
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