• Analytical Science and Technology
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• v.20 no.6
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• pp.516-523
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• 2007

Purification of silica mineral has been investigated by acid leaching of pulverized silica. A series of studies has been carried out on the effect of leaching silica powder as a function of the leaching time at the constant temperature of $80^{\circ}C$ in oxalic acid, aqua regia, and two mixed acids of HF/HCl, $HF/HNO_3$. The impurities of silica and leachantes were measured by neutron activation analysis (NAA), inductively coupled plasma atomic emission spectrometry (ICP-AES), atomic absorption spectrometry, x-ray fluorescence (XRF) method and wet analysis (WA). Certain metals, such as sodium, calcium, iron, aluminium and titanium, have been found in concentrations of hundreds or even thousands of mg/kg. Comparison of purification processes of silica and analytical methods of impurities in the silica was conducted in this study.

• Journal of the Korean Chemical Society
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• v.55 no.3
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• pp.472-477
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• 2011

The concentration of selenium in grain samples was determined using isotope dilution method in ORC-ICPMS. The experimental conditions were optimized to $H_2$ mode and the flow rate was $4.0\;mL\;min^{-1}$. ORC in $H_2$ mode proved to eliminate most of polyatomic interferences except $BrH^+$ when Br is present in sample matrix. Chemical removal of Br was very difficult and the mathematical correction was successfully employed. The fraction of $BrH^+$ generated from Br at the current experimental condition was 14.1%. The signal on m/z 82 was corrected and calculated for isotope dilution. The analytical reliability of the propose method was successfully evaluated by analyzing the certified standard reference material NIST SRM 1566 and 1567. The method was applied to real samples and the results are $0.034{\pm}0.001\;{\mu}g\;g^{-1}$ for white rice, $0.059{\pm}0.002_5\;{\mu}g\;g^{-1}$ for brown rice, $0.029{\pm}0.001_4\;{\mu}g\;g^{-1}$ for black rice, and $0.034{\pm}0.002\;{\mu}g \;g^{-1}$ for barley. The detection limits ($3\sigma$) for Se was $0.012\;ng\;g^{-1}$.

• Journal of Environmental Health Sciences
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• v.44 no.5
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• pp.491-501
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• 2018

Objectives: The aims of this study were to compare concentrations and the correspondence of human blood cadmium by using graphite furnace atomic absorption spectrometry (GF-AAS) and inductively coupled plasma-mass spectrometry (ICP-MS), which are representative methods of heavy metal analysis. Methods: We randomly selected 79 people who agreed to participate in the research project. After confirming the linearity of the calibration curves for GF-AAS and ICP-MS, the concentrations of cadmium in a quality control standard material and blood samples were measured, and the correlation and the degree of agreement were compared. Results: The detection limit of ICP-MS (IDL: $0.000{\mu}g/L$, MDL: $0.06{\mu}g/L$) was lower than that of GF-AAS (IDL: $0.085{\mu}g/L$, MDL: $0.327{\mu}g/L$). The coefficient of variation of the quality control standard material showed stable values for both ICP-MS (clinchek-1: 5.35%, clinchek-2: 6.22%) and GF-AAS (clinchek-1: 7.92%, clinchek-2: 5.22%). Recovery was relatively high for both ICP-MS (clinchek-1: 95.1%, clinchek-2: 92.8%) and GF-AAS (clinchek-1: 91.4%, clinchek-2: 98.8%), with more than 90%. The geometric mean, median, and percentile of blood samples were all similar. The agreement of the two instruments compared with the bias of the analytical values found that about 81% of the analytical values were within ${\pm}30%$ of the deviation from the ideal reference line (y=0). As a result of the agreement limit, the value included in the confidence interval was about 94%, which shows high agreement. Conclusion: In this study, we confirmed there was no significant difference in concentrations of a quality control standard material and blood samples. Since ICP-MS showed lower concentrations than GF-AAS at concentrations below the method detection limit of GF-AAS, it is expected that more precise results will be obtained by analyzing blood cadmium with ICP-MS.

• Journal of Conservation Science
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• v.19
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• pp.67-72
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• 2006

The chemical compositions and lead isotope ratio of Poong-Tag(wind bell) bell excavated from Wanggyeong site, Gyeongju have analyzed by ICP and TIMS. The analysis result of chemical composition of Poong-Tag shows that it consists of 92:4 ratio of Cu:Sn. Other 8 minor elements(Pb, Zn, Fe, Ag, Ni, As, Sb and Co) show the concentration of below 0.2% respectively. This result means that Poong-Tag have made using highly purified Cu and Sn ore. For the study of provenance of raw material with the lead isotope ratio, the origin of the raw material of Poong-Tag can not be presumed owing to beyond the scope. The observation result of microstructure of Poong-Tag show the dendrite structure made through casting process. The chemical composition, microstructure, and lead isotope ratio of Poong-Tag excavated from Wanggyeong site, Gyeongju can be used as fundamental data to compare with other Poong-Tag of different regions and periods.

• Journal of Environmental Impact Assessment
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• v.27 no.5
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• pp.405-416
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• 2018

In this research, the distribution of Platinum Group Elements (PGEs) at roadside dust in Daejeon, Korea was examined using an ICP-MS (Inductively Coupled Plasma-Mass Spectrometry) technique. For the quality assurance of the determination, method validation based on its accuracy and precision was conducted using SRM (Standard Reference Material). It was found that the relative errors of Pt, Pd, and Rh against each SRM value were -0.7%, -10.0%, and -20.4%, respectively, while relative standard deviations for three elements were less than 10%. The concentrations of Pt, Pd and Rh in roadside dust averaged as $17.4{\pm}9.2{\mu}g/kg$, $283.6{\pm}20.5{\mu}g/kg$, and $7.3{\pm}2.8{\mu}g/kg$, respectively. The concentrations of Pt and Rh have significantly higher distribution patterns in the dust at roadside and underground parking lot than those in soil of the background or other urban area. The correlation analysis between concentrations of PGEs in roadside dust indicates that the distribution of Pt and Rh concentration were strongly affected by automobile sources.

• Clinical and Experimental Pediatrics
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• v.49 no.1
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• pp.18-23
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• 2006

Purpose : The reliability of hair mineral analyses regarding nutritional status, environmental exposure or diseases is controversial. The aim of this study was to determine the normal reference range of hair mineral concentration of Korean children. Methods : We examined hair mineral concentrations of 223 children(3-12 yrs old, 110 boys, 113 girls, mean age $8.8{\pm}2.2$ yrs old) living in the northern area of Seoul. The trace elements including six toxic elements(Al, As, Cd, Ba, Hg, Pb) and 11 nutritional elements(Na, Mg, P, K, Ca, Cr, Mn, Fe, Cu, Zn, Se) were analyzed by inductive coupled plasma mass spectrometry(ICP-MS). Results : The mean concentrations of Ca and Mg were higher in girls than in boys. The mean concentrations of Cd, Pb and Cr were higher in boys than girls. The Zn, Ca, Mg, Cu and Hg levels in hair samples were positively correlated with increasing age. The Zn levels of the Korean children's hair samples appear to be lower than that of other countries' reference values. Conclusion : There are considerable differences in hair mineral concentrations by age, sex and race. Additional research is needed to establish Korean reference values, and to evaluate the usefulness of hair mineral analyses as a screening tool for nutrition- and environment-related childhood diseases.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.20 no.2
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• pp.93-100
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• 2010

The calcium to phosphate ratio (Ca/P) in biphasic calcium phosphates powders using X-ray diffraction analysis (XRD) was characterized. The BCP powders with various stoichiometric Ca/P molar ratio were synthesized with coprecipitation process and calcination. Compositions of the powders with Ca/P molar ratio between 1.5 and 1.67 were subjected to starting Ca/P molar ratio, pH = 10, and thermal treatment up to $900^{\circ}C$. The structural, morphological and chemical characterizations for BCP powders with stoichiometric Ca/P ratio were carried out with scanning electron microscope (SEM) and inductively coupled plasma atomic emission spectroscopy (ICP-AES) and a phase quantification was investigated by XRD. The solubility of HAp, $\beta$-TCP, and BCP powders was tested in the phosphate buffer solution (PBS) at $36.5^{\circ}C$ and pH = 7.4.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.145-145
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• 2008

High-k materials have been paid much more attention for their characteristics with high permittivity to reduce the leakage current through the scaled gate oxide. Among the high-k materials, $ZrO_2$ is one of the most attractive ones combing such favorable properties as a high dielectric constant (k= 20 ~ 25), wide band gap (5 ~ 7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2$/Si structure. During the etching process, plasma etching has been widely used to define fine-line patterns, selectively remove materials over topography, planarize surfaces, and trip photoresist. About the high-k materials etching, the relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Among several etching techniques, we chose the inductively coupled plasma (ICP) for high-density plasma, easy control of ion energy and flux, low ownership and simple structure. And the $BCl_3$ was included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compounds. During the etching process, the wafer surface temperature is an important parameter, until now, there is less study on temperature parameter. In this study, the etch mechanism of $ZrO_2$ thin film was investigated in function of $Cl_2$ addition to $BCl_3$/Ar gas mixture ratio, RF power and DC-bias power based on substrate temperature increased from $10^{\circ}C$ to $80^{\circ}C$. The variations of relative volume densities for the particles were measured with optical emission spectroscopy (OES). The surface imagination was measured by scanning emission spectroscope (SEM). The chemical state of film was investigated using energy dispersive X-ray (EDX).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.442-442
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• 2008

Hydrogen was produced by water plasma excited in very high frequency inductively coupled tube reactor. Mass spectrometry was used to monitor gas phase species at various process conditions. Water dissociation rate depend on the process parameters such as ICP power, flow-rate and pressure. Water dissociation percent in ICP reactor decrease with increase of chamber pressure and $H_2O$ flow rate, while increase with increase of ICP power. In our experimental range, maximum water dissociation rate was 65.5% at the process conditions of 265 mTorr, 68 sccm, and 400 Watt. The effect of $CH_4$ addition to a water plasma on the hydrogen production has been studied in a VHF ICP reactor. With the addition of $CH_4$ gas, $H_2$ production increases to 12% until the $CH_4$ flow rate increases up to 15 sccm. But, with the flow rate of $CH_4$ more than 20 sccm, chamber wall was deposited with carbon film because of deficiency of oxygen in gas phase, hydrogen production rate decreased. The main roles of $CH_4$ gas are to reacts with O forming CO, CHO and $CO_2$ and releasing additional $H_2$ and furthermore to prevent reverse reaction for forming $H_2O$ from $H_2$ and $O_2$. But, $CH_4$ addition has negative effects such as cost increase and $CO_x$ emission, therefore process optimization is required.

• Journal of the Microelectronics and Packaging Society
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• v.21 no.3
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• pp.67-71
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• 2014

An attempt to grow high quality GaN on silicon substrate using metal organic chemical vapor deposition (MOCVD), herein GaN epitaxial layers were grown on various Si(111) substrates. Thin Platinum layer was deposited on Si(111) substrate using sputtering, followed by thermal annealing to form Pt nano-clusters which act as masking layer during dry-etched with inductively coupled plasma-reactive ion etching to generate nano-patterned Si(111) substrate. In addition, micro-patterned Si(111) substrate with circle shape was also fabricated by using conventional photo-lithography technique. GaN epitaxial layers were subsequently grown on micro-, nano-patterned and conventional Si (111) substrate under identical growth conditions for comparison. The GaN layer grown on nano-patterned Si (111) substrate shows the lowest crack density with mirror-like surface morphology. The FWHM values of XRD rocking curve measured from symmetry (002) and asymmetry (102) planes are 576 arcsec and 828 arcsec, respectively. To corroborate an enhancement of the growth quality, the FWHM value achieved from the photoluminescence spectra also shows the lowest value (46.5 meV) as compare to other grown samples.