• Title/Summary/Keyword: 유도결합 플라즈마

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High Density Inductively Coupled Plasma Etching of InP in BCl3-Based Chemistries (BCl3 기반의 혼합가스들을 이용한 InP 고밀도 유도결합 플라즈마 식각)

  • Cho, Guan-Sik;Lim, Wan-tae;Baek, In-Kyoo;Lee, Je-won;Jeon, Min-hyun
    • Korean Journal of Materials Research
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    • v.13 no.12
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    • pp.775-778
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    • 2003
  • We studied InP etching in high density planar inductively coupled $BCl_3$and $BCl_3$/Ar plasmas(PICP). The investigated process parameters were PICP source power, RIE chuck power, chamber pressure and $BCl_3$/Ar gas composition. It was found that increase of PICP source power and RIE chuck power increased etch rate of InP, while that of chamber pressure decreased etch rate. Etched InP surface was clean and smooth (RMS roughness <2 nm) with a moderate etch rate (300-500 $\AA$/min) after the planar $BCl_3$/Ar ICP etching. It may make it possible to open a new regime of InP etching with $CH_4$$H_2$-free plasma chemistry. Some amount of Ar addition (<50%) also improved etch rates of InP, while too much Ar addition reduced etch rates of InP.

암석 용해방법에 따른 미량원소 분석결과 비교

  • 최만식;정창식;박계헌
    • The Journal of the Petrological Society of Korea
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    • v.3 no.1
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    • pp.41-48
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    • 1994
  • Three USGS rock standards (G-2, W-2, and BHVO-1) are decomposed by three different methods, such as open beaker, microwave oven, and alkali fusion method, to compare the effect of decomposition methods for trace elememt analysis in the rock samples. Solubilized trace elements are measured with inductively coupled plasma mass spectrometer (ICP-MS). Generally the analytical results of trace elements between open beaker and microwave digestion method are not different. In case of alkali fusion method, some volatile elements such as Pb, Cu, and Rb are considerably lost. Using acid digestion method, Zr and Hf concentrations are lowered in case that these elements are concentrated in refractory minerals. The concentrations of rare earth elements are generally consistent with the recommended values, but due to large dilution factor, there are some analytical problems in alkali fusion method.

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Improving Strontium Isotope Ratio Analysis Using MC-ICP-MS (다검출기 유도결합 플라즈마 질량분석기를 이용한 스트론튬 동위원소비 분석법 개선)

  • Lee, Sin-Woo;Park, Jaeseon;Park, Hyun-Woo;Hwang, Jong Yeon;Kim, Kumhee;Chung, Hyun-Mi;Choi, Jong-Woo
    • Journal of Environmental Analysis, Health and Toxicology
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    • v.21 no.4
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    • pp.237-242
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    • 2018
  • Strontium (Sr) commonly exists in rock, groundwater, soil, plants, and animals. The Sr isotope ratio offers important information as a tracer on nature because the Sr isotopic composition is not fractionated by any biological process in these ecosystems. Hence, Sr isotope ratio has been used in several studies on tracing the Sr source for contaminated sites and human migration. In this study, we developed a separation method for Sr content, and then improved Sr isotope analysis using multi-collector inductively coupled plasma mass spectrometry (MC-ICP-MS). A powdered rock standard (NIST 2710a) was used to determine the removal of interference elements (Rb and Ca) and the recovery rate of Sr content. The results ranged from 98% to 106%. Additionally, three standard samples (NBS 987, IAPSO and NIST 1486) were analyzed to evaluate the precision and accuracy of the results. The measured $^{87}Sr/^{86}Sr$ ratio for all the samples were consistent with the reported values, within an error. These results indicate that our established Sr separation and Sr isotope measurement methods are reliable and can hence be useful in the fields of environmental and forensic sciences.

A Review on Analysis of Natural Uranium Isotopes and Their Application (우라늄 동위원소의 분석과 활용에 대한 고찰)

  • Yeongmin Kim
    • Economic and Environmental Geology
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    • v.56 no.5
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    • pp.547-555
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    • 2023
  • Due to enhanced precision in uranium isotope measurements with MC-ICP-MS, there has been a surge in studies concerning the naturally occurring uranium isotope ratio (238U/235U) and its associated fractionation processes. Several researchers have highlighted that the 238U/235U ratio, previously assumed to be constant, can vary by several per mil depending on different natural fractionation processes. This review paper outlines the uranium isotope values (δ238U) for major terrestrial reservoirs and their variations. It discusses the range of δ238U values and uranium isotope fractionation seen in uranium ore deposits, based on deposit type and ore-forming conditions. In conclusion, this paper emphasizes the importance of studies on uranium ore deposits. Such deposits serve as natural simulation models vital for designing high-level radioactive waste repository sites.

Nanostructure Control of PtNiN/C Catalysts for Oxygen Reduction Reaction by Regulating Displacement Rate of Precursor (전구체 치환 속도 조절을 통한 산소환원반응용 PtNiN/C 촉매의 나노구조 제어)

  • Dong-gun Kim;Seongseop Kim;Sung Jong Yoo;Pil Kim
    • Clean Technology
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    • v.30 no.1
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    • pp.55-61
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    • 2024
  • Efforts are actively underway to address the issues related to the high cost of Pt-based catalysts for oxygen reduction reactions by designing high-performance Pt-based alloys through the control of their nanostructures. In this study, a method was proposed to control the nanostructure of Pt-based alloys, either hollow or core-shell, by adjusting the pH of the solution during the galvanic replacement reaction between the carbon-supported nickel-nickel nitride composite and the Pt ions. The physical characteristics, including the state, quantity, and morphology of the metal particles under different preparation conditions, were evaluated through X-ray diffraction, transmission electron microscopy, and inductively coupled plasma. When the prepared catalysts were employed for the oxygen reduction reaction, they exhibited an improvement in area specific-activity compared to a commercial Pt/C, with a 1.7 and 1.9-fold enhancement for the hollow and core-shell structured catalysts, respectively.

Morphological Evolution of GaAs(100) Surfaces during Inductively Coupled Plasma Etching at Floating Potential (Floating potential에서 유도결합 플라즈마 식각에 의한 GaAs(100) 표면의 형태 변화)

  • Lee, Sang-Ho
    • Journal of the Korean Vacuum Society
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    • v.16 no.1
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    • pp.15-22
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    • 2007
  • We present the morphological evolution at different source powers in the ion-enhanced etching of GaAs(100) in $BCl_3-Cl_2$ plasma. With little ion bombardment at floating potential, the surface develops <110< ridges and {111} facets, as it does in purely chemical etching. The morphology develops in less than 1 minute and grows bigger over time. The etched surfaces show different morphologies at different source powers with constant pressures of gases. Lowe. source power (100 W) produces poorly developed crystallographic surfaces while higher source power (900 W) produces well developed crystallographic surfaces. This is attributed to the availability of excited reactive species(chlorine atoms) depending on source powers. With more concentration of the reactive species at higher source powers, the surface of GaAs(100) would be a surface that is expected from thermodynamics while the surface morphology would be determined by sputtering in the lack of reactive species. Statistical analysis of the surfaces, based on scaling theory, revealed two spatial exponents: one(smaller than one) is formed by atomic scale mechanisms, the other(larger than one) is formed by larger scale mechanisms which is believed to develop facets.

Morphology Evolution of GaAs(100) Surfaces during Inductively Coupled Plasma Etching at Biased Potential (유도결합 플라즈마 식각시 bias에 의한 GaAs(100) 표면의 형태 변화)

  • Lee, Sang-Ho
    • Journal of the Korean Vacuum Society
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    • v.16 no.4
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    • pp.250-261
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    • 2007
  • We present the morphological evolution at different source powers in the ion-enhanced etching of GaAs(100) in $BCl_3-Cl_2$ plasma. With little ion bombardment at floating potential, the surface develops <110> ridges and {111} facets, as it does in purely chemical etching. Higher source power (900 W) produces well developed crystallographic surfaces while lower source power (100 W) produces poorly developed crystallographic surfaces. This is attributed to the availability of excited reactive species (chlorine atoms) depending on source powers. With more concentration of the reactive species at higher source powers, the surface of GaAs(100) would be a surface that is expected from thermodynamics while the surface morphology would be determined by sputtering in the lack of reactive species. Statistical analysis of the surfaces, based on scaling theory, revealed two spatial exponents: one (smaller than one) is formed by atomic scale mechanisms, the other (larger than one) is formed by larger scale mechanisms which is believed to develop facets. When samples are biased, the surfaces experienced bombardment resulting in suppression of ridge formation at high source power and islands formation at low source power.

Bioanalytical method validation for determination of arsenic speciation in dog plasma using HPLC-ICP/MS (Dog 혈장 중 HPLC-ICP/MS를 이용한 비소 화학종 분석법 검증)

  • Kim, Jong-Hwan;Kwon, Young Sang;Shin, Min-Chul;Kim, Su Jong;Seo, Jong-Su
    • Analytical Science and Technology
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    • v.29 no.5
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    • pp.234-241
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    • 2016
  • The approach presented in this article refers to the bioanalytical method validation for the detection and quantitative determination of arsenic species including arsenite (As(III)), arsenate (As(V)), dimethylarsinic acid (DMA) and monomethylarsonic acid (MMA) in dog plasma by high-performance liquid chromatography inductively coupled plasma mass spectrometry (HPLC-ICP/MS). The arsenic species were separated using an agilent As speciation column by a mobile phase of 2 mM sodium phosphate monobasic, 0.2 mM ethylenediaminetetraacetic acid disodium salt dehydrate, 10 mM sodium acetate, 3 mM sodium nitrate and 1 % ethyl alcohol at pH 11 (adjusted with 1M NaOH). The method validation experiment was obtained selectivity, linearity, accuracy, precision, matrix effect, recovery, system suitability, dilution integrity and various stabilities. All calibration curves showed good linearity (R2>0.999) within test ranges. The lower limit of quantitation (LLOQ) was 5 ng/mL for As(III), As(V) and DMA, and 20 ng/mL for MMA. The system suitability and dilution values were within 6.5 % and 7.7 %. Subsequently, the developed and validated HPLC-ICP/MS method was also successfully applied to determine the arsenic speciation in dog plasma samples, and the recoveries for the spiked samples were in the range of 91.5–102.2 %. Therefore, this method could be applied to the evaluation of arsenic exposure, health effect assessment and other bio-monitoring studies in biological samples.

A Study for Mechanism and Oxidation Reaction of Substituted Benzyl Alcohols by 2,2'-Bipyridinium Chlorochromate (2,2'-Bipyridinium Chlorochromate에 의한 치환 벤질 알코올류의 산화반응과 메카니즘에 관한 연구)

  • Kim, Young-Sik;Park, Young-Cho
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.13 no.7
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    • pp.3252-3260
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    • 2012
  • 2,2'-Bipyridinium chlorochromate[$C_{10}H_8N_2HCrO_3Cl$] was synthesized by the reaction of 2,2'- bipyridine with chromium(VI) trioxide in 6M HCl. The structure was characterized by IR and ICP analysis. The oxidation of benzyl alcohol using 2,2'-bipyridinium chlorochromate in various solvents showed that the reactivity increased with the increase in the order of the dielectric constant(${\varepsilon}$), in the order: cyclohexene< chloroform$p-CH_3$, H, m-Br, $m-NO_2$) in N,N'-dimethylformamide. Electron-donating substituents accelerated the reaction, whereas electron acceptor groups retarded the reaction. The Hammett reaction constant(${\rho}$) was -0.64(303K). The oxidation reactivity of alcohols can be a useful factor to study about physical properties such as thermal stability, when the polysilsesquioxane solution is ready for an applying coating agent. The observed experimental data was used to rationalized the hydride ion transfer in the rate-determining step.

A Study for Kinetics and Oxidation Reaction of Substituted Benzyl Alcohols using Cr(VI)-Heterocyclic Complex(Cr(VI)-Isoquinoline) (Cr(VI)-헤테로고리 착물(Cr(VI)-Isoquinoline)를 이용한 치환 벤질 알코올류의 산화반응과 속도론에 관한 연구)

  • Park, Young-Cho;Kim, Young-Sik
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.11
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    • pp.6000-6007
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    • 2013
  • Cr(VI)-heterocyclic complex[Cr(VI)-isoquinoline] was synthesized by the reaction between of heterocyclic compound(isoquinoline) and chromium trioxide, and characterized by IR and ICP analysis. The oxidation of benzyl alcohol using Cr(VI)-isoquinoline in various solvents showed that the reactivity increased with the increase of the dielectric constant(${\varepsilon}$), in the order : cyclohexene$CH_3$, m-Br, m-$NO_2$). Electron- donating substituents accelerated the reaction, whereas electron acceptor groups retarded the reaction. The Hammett reaction constant(${\rho}$) was -0.69(308K). The observed experimental data have been ratiolized. The hydride ion transfer causes the prior formation of a chromate ester in the rate-determining step.