High Density Inductively Coupled Plasma Etching of InP in BCl3-Based Chemistries
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Cho, Guan-Sik
(School of Nano Engineering, Inge University/ Institute of Nano-Technology Applications)
Lim, Wan-tae (School of Nano Engineering, Inge University/ Institute of Nano-Technology Applications) Baek, In-Kyoo (School of Nano Engineering, Inge University/ Institute of Nano-Technology Applications) Lee, Je-won (School of Nano Engineering, Inge University/ Institute of Nano-Technology Applications) Jeon, Min-hyun (School of Nano Engineering, Inge University/ Institute of Nano-Technology Applications) |
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