• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2007.04a
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• pp.132-133
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• 2007

2개의 주파수가 인가된 유도결합 플라즈마(ICP)를 이용하여 주파수 조합(13.56 or 27.12/2MHz)과 안테나의 캐패시턴스 변화에 따른 $SiO_2$ 와 poly-Si 의 식각특성을 연구하였다. 본 실험의 결과로, 27.12 MHz에서 plasma density가 높다는 것과 13.56 MHz에서 center high profile이 쉽게 형성됨을 알 수 있었다. $SiO_2$ 식각에서는 non-uniformity와 etch rate모두 27.12 MHz가 13.56 MHz보다 높다는 것을 알 수 있었고, poly-Si 식각에서는 non-uniformity와 etch rate모두 비슷한 경향을 나타낸다는 것을 알 수 있었다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2005.05a
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• pp.73-73
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• 2005

• The Journal of the Petrological Society of Korea
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• v.23 no.3
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• pp.221-227
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• 2014

With the advent of multi collector-inductively coupled plasma mass spectrometry, stable isotopic variations of non-traditional metal elements have provided important constraints on the sources of geologic materials. This review introduces the principles of magnesium isotopic fractionation and analytical methods. Recent case studies are also reviewed for the use of magnesium isotope signatures to decipher the source materials of I-, S-, and A-type granitoids in western North America, Australia, and China.

• Journal of the Korean institute of surface engineering
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• v.55 no.2
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• pp.77-83
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• 2022

Nanocrystalline MoN coatings were prepared by inductively coupled plasma magnetron sputtering (ICPMS) changing the plasma power from 0 W to 200 W. The properties of the coatings were analyzed by x-ray diffraction, field emission scanning electron microscopy, atomic force microscopy, nanoindentation tester and semiconductor characterization system. As the ICP power increases, the crystal structure of the MoN coatings changed from a mixed phase of γ-Mo₂N and α-Mo to a single phase γ-Mo₂N. MoN coatings deposited by ICPMS at 200 W showed the most compact microstructure with the highest nanoindentation hardness of 27.1 GPa. The electrical resistivity of the coatings decreased from 691.6 μΩ cm to 325.9 μΩ cm as the ICP power increased.

• Analytical Science and Technology
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• v.6 no.1
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• pp.131-139
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• 1993

The separation of gallium and indium from the matrix elements such as zinc and other ions, especially form Fe(III) ion was studied for the determination of trace level of them in zinc ores and zinc blendes by inductively coupled plasma atomic emission spectrometry(ICP-AES). Gallium and indium were extracted from the sample solution with a solvent of tributyl phosphate(TBP). The type and concentration of acid, interferences of other ions, the ratio of aqueous phase to organic phase, TBP concentration, sripping efficiency were optimized for the effective extraction. Gallium and indium were separated from other ions in the 5N hydrochloric acid solution of the samples by the extraction with 100% TBP. In this time, Fe(III) was reduced to Fe(II) with hydroxylamine hydrochloride to prevent its coextraction prior to the main extraxtion. After stripped from organic phase by the back-extraction with 0.02N HCl, they were determined in the aqueous phase by ICP-AES. This method was known to be quantitative from the overall extraction of more than 95%.

• Analytical Science and Technology
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• v.16 no.2
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• pp.152-158
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• 2003

This study was conducted to evaluate two sample digestion procedures and instrumental determination parameters for analysis of lead in bone. Amputated human legs were treated by acid digestion or microwave dissolution prior to spectrometric analysis. Inductively coupled plasma mass spectrometry (ICP-MS) and graphite furnace atomic absorption spectrometry (GF-AAS) were used for determining bone lead levels. Recovery efficiencies using standard reference material from acid digestion measured by ICP-MS were in good agreement with those of the certified value, but in cases of acid digestion by GF-AAS and microwave digestion by both two methods, recovery underestimated and overestimated, respectively. For the bone samples, the lead concentrations obtained by ICP-MS after acid digestionwere in good agreement with those by GF-AAS (correlation coefficient = 0.983), but GF-AAS gave systematically higher values than ICP-MS. While a good agreement between two analytical methods after microwave digestion was also obtained (correlation coefficient = 0.950), bone lead concentrations from microwave were relatively higher than those from acid digestion. In conclusion, the use of the simple nitric acid digestion procedure at an ambient temperature coupled to ICP-MS seems to be efficient for the determination of lead in bone in consideration for both the convenience and validity.

• The Journal of the Petrological Society of Korea
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• v.10 no.3
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• pp.157-171
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• 2001

This study investigated the effects of Pb/Tl ratio, Pb concentration and concomitant matrix elements on the measurement of Pb isotope ratios using multi-collector ICP/MS (AXIOM MC model). Accuracy and reproducibility of Pb isotope ratios in NBS 981 solution were estimated for 42 data measured from March to August 2001. Pb isotopes measured in rocks, bronzes and sediments were compared to data measured by TIMS. Reproducibilities for $^{206}Pb/^{204}Pb,\; ^{207}Pb/^{204}Pb,\;and\;^{208}Pb/^{204}Pb$ ratio were about 500 ppm (2sd) and for $^{207}Pb/^{206}Pb$\;and\;^{208}Pb/^{206}Pb$ were 100~200 ppm for 200 ng of Pb in NBS 981 solution. The optimum conditions for the analysis of Pb isotope ratios with AXIOM MC for best accuracy and reproducibility were defined as follows; 1) Pb/Tl ratio is about 10 2) Pb concentration is about 100 ng/ml 3) correction for mass discrimination is performed by exponential law using 2.3887 of $^{205}Tl/^{203}Tl$ and Pb mass fractionation factor empirically obtained from $ln(^{208}Pb/^{206}Pb)-ln(^{205}Tl/^{203}Tl)$ relationship. The sample data measured with MC/ICP/MS for acid-digested and chemically separated rock samples, and acid-digested bronze samples and sediment samples coincide with those of TIMS within analytical errors. Therefore, MC/ICP/MS is a rapid analytical technique for Pb isotope ratios with the similar precision compared with TIMS.

• Economic and Environmental Geology
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• v.49 no.2
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• pp.89-95
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• 2016

Mo isotope, one of highly redox-sensitive isotopes, has been shown to be useful tracers of geochemical processes. Many studies for Mo isotope have documented with the help of recently developed analysis tools, but it has not yet been documented in the Korea. In this study, we introduce two-stage column separation method of Mo using column tube (BioRad PolyPrep(R) column, 10 ml) and anion exchange resin (BioRad Resin AG(R) 1-X8, 200-400 mesh). Mo isotope ratios in the solid SRMs (BHVO-2, SDO-1, PACS-2) and liquid SRM (IAPSO) were measured on MC-ICP-MS (Multi-collector Inductively Coupled Plasma Mass Spectrometer) and then compared with reference Mo isotope ratios. Mo isotope ratios in our study overlap with reference Mo isotope ratios within analytical error.

• The Journal of the Petrological Society of Korea
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• v.24 no.2
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• pp.141-147
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• 2015

Using laser-ablation inductively coupled plasma mass spectrometry (LA-ICP-MS), we evaluated the reliability of trace element abundance data measured from the silicate rock references of JR-3, JG-3, JGb-1 and JB-1b using glass discs made by alkali fusion. For 28 elements including rare earth elements, relative standard deviations (RSD) are better than 7% in case when the concentrations of the elements in the rock samples are greater than 10 ppm. However, RSD shows somewhat increased values for the concentrations less than 10 ppm, but never exceeds 25%. Compared with previously reported averages of the compiled abundance data, our data display satisfactory results for the most cases with differences less than 10%. We suggest that LA-ICP-MS analysis using fused glass beads is a reliable, precise and time-saving method of trace element analysis for the silicate rocks spanning from mafic to felsic compositions.

• Korean Journal of Mineralogy and Petrology
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• v.35 no.4
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• pp.507-520
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• 2022

The Sr isotope ratio, which is used as basic data for rock formation time, crustal and mantle evolution studies, is determined by mass spectrometer such as thermal ionization mass spectrometry (TIMS) or multi-detector inductively coupled plasma mass spectrometry (MC-ICP-MS). In this technical report, we compared how incomplete chemical separation of elements affects the determination of Sr isotope ratios. For the experiment, commercial resin, NBS987(NIST SRM987) Sr isotope standard, and rock standard samples from the Geological Survey of Japan (GSJ) such as JG1a, JB3 and JA1 were used. As a result of the comparative experiment, it was clearly observed that the measured values of ⁸⁷Sr/⁸⁶Sr change when Rb remains due to incomplete separation of the NBS987 Sr isotope standard sample as well as the rock standard samples of GSJ. This indicates that complete separation is an important factor since the calculated value deviates from the true value even though correction for isotope interference by isobar is performed when measuring the isotope ratio with MC-ICP-MS. This also suggests that, when reporting the measurement result of Sr isotope ratio using MC-ICP-MS, the measurement strength of ⁸⁵Rb should be reported together with the measurement strength of all isotopes of Sr so that isotope interference by isobar can be judged.