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Side-Wall 공정을 이용한 WNx Self-Align Gate MESFET의 제작 및 특성

  • 문재경;김해천;곽명현;임종원;이재진
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.162-162
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    • 1999
  • 초고주파 집적회로의 핵심소자로 각광을 받고 있는 GaAs MESFET(MEtal-emiconductor)은 게이트 형성 공정이 가장 중요하며, WNx 내화금속을 이용한 planar 게이트 구조의 경우 임계전압(Vth:threshold voltage)의 균일도가 우수할 뿐만 아니라 특히 Side-wall을 이용한 self-align 게이트는 소오스 저항을 줄일 수 있어 고성능의 소자 제작을 가능하게 한다.(1) 본 연구의 핵심이 되는 Side-wall을 형성하기 위하여 PECVD법에 의한 SiOx 박막을 증착하고, 건식식각법을 이용하여 SiOx side-wall을 형성하였다. 이 공정을 이용하여 소오스 저항이 낮고 임계전압의 균일도가 우수한 고성능의 self-aligned gate MESFET을 제작하였다. 3inch GaAs 기판상에 이온주입법에 의한 채널 형성, d.c. 스퍼터링법에 의한 WNx 증착, PECVD법에 의한 SiOx 증착, MERIE(Magnetic Enhanced Reactive Ion Etcing)에 의한 Side-wall 형성, LDD(Lightly Doped Drain)와 N+ 이온주입, 그리고 RTA(Rapid Thermal Annealing)를 사용하여 활성화 공정을 수행하였다. 채널은 40keV, 4312/cm2로, LDD는 50keV, 8e12/cm2로 이온주입하였고, 4000A의 SiOx를 증착한 후 2500A의 Side-wall을 형성하였다. 옴익 접촉은 AuGe/Ni/Au 합금을 이용하였고, 소자의 최종 Passivation은 SiNx 박막을 이용하였다. 제작된 소자의 전기적 특성은 hp4145B parameter analyzer를 이용한 전압-전류 측정을 통하여 평가하였다. Side-wall 형성은 0.3$\mu\textrm{m}$ 이상의 패턴크기에서 수직으로 잘 형성되었고, 본 연궁에서는 게이트 길이가 0.5$\mu\textrm{m}$인 MESFET을 제작하였다. d.c. 특성 측정 결과 Vds=2.0V에서 임계전압은 -0.78V, 트랜스컨덕턴스는 354mS/mm, 그리고 포화전류는 171mA/mm로 평가되었다. 특히 본 연구에서 개발된 트랜지스터의 게이트 전압 변화에 따른 균일한 트랜스 컨덕턴스의 특성은 RF 소자로 사용할 때 마이크로 웨이브의 왜곡특성을 없애주기 때문에 균일한 신호의 전달을 가능하게 한다. 0.5$\mu\textrm{m}$$\times$100$\mu\textrm{m}$ 게이트 MESFET을 이용한 S-parameter 측정과 Curve fitting 으로부터 차단주파수 fT는 40GHz 이상으로 평가되었고, 특히 균일한 트랜스컨덕턴스의 경향과 함께 차단주파수 역시 게이트 바이어스, 즉 소오스-드레스인 전류의 변화에 따라 균일한 값을 보였다. 본 연구에서 개발된 Side-wall 공정은 게이트 길이가 0.3$\mu\textrm{m}$까지 작은 경우에도 사용가능하며, WNx self-align gate MEESFET은 낮은 소오스저항, 균일한 임계전압 특성, 그리고 높고 균일한 트랜스 컨덕턴스 특성으로 HHP(Hend-Held Phone) 및 PCS(Personal communication System)와 같은 이동 통신용 단말기의 MMICs(Monolithic Microwave Integrates Circuits)의 제작에 활용될 것으로 기대된다.

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Test-bed Operation for Nation-wide Interoperable Transportation Card (전국호환 교통카드를 위한 테스트베드 운영)

  • Han, Ho-Hyeorn;Jee, Dong-Mok;Park, Ha-Na;Kim, Hye-Hyeon;Kim, Tae-Hee;Maeng, Jae-Hwan;Lee, Ki-Han
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.9 no.5
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    • pp.1-13
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    • 2010
  • In this paper, we describe the result of the test-bed on Nation-wide Interoperable Transportation System connected with Interoperable Traffic Information Collection System, which was developed by Korea Financial Telecommunications & Clearings, KOREAIL NETWORKS, HiPlusCard and Samsung SDS. we constructed Nation-wide Interoperable Transportation System on 4 downtown bus routes, 20 stations on line 1 subway, 2 stations of a train and 2 sections of the Honam highway in Gwangju and Interoperable Traffic Information Collection System in Seoul University IC Card Center. So we operated that by 480 Several staff were given a test card and asked to try it for about 6 months. This test-bed is for demonstrates the accuracy, safety and credibility of the Nation-wide Interoperability standard technology and it can be applied to all of transportation practically. When the staffs contact the card to Purchase terminal, the card performs transaction with Purchase SAM in the terminal, then transactions ara used to calculate in Settlement system and Interoperable Traffic Information Collection System. Through the test-bed, we examined this process and found unexpected problems happening during the test operation and have successfully solved them. In addition, the results of the test-bed let us know what additional improvement might be required for System. The successful run of the test-bed was verified by an evaluation of the test-bed staff and a public survey.

A Design and Implementation of NFC Bridge Chip (NFC 브릿지 칩 설계 및 구현)

  • Lee, Pyeong-Han;Ryu, Chang-Ho;Chun, Sung-Hun;Kim, Sung-Wan
    • Journal of the Institute of Electronics and Information Engineers
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    • v.52 no.3
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    • pp.96-101
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    • 2015
  • This paper describes a design and implementation of the NFC bridge chip which performs interface between kinds of devices and mobile phones including NFC controller through NFC communication. The NFC bridge chip consists of the digital part and the analog part which are based on NFC Forum standard. Therefore the chip treats RF signals and then transforms the signal to digital data, so it can interface kinds of devices with the digital data. Especially the chip is able to detect RF signals and then wake up the host processor of a device. The wakeup function dramatically decreases the power consumption of the device. The carrier frequency is 13.56MHz, and the data rate is up to 424kbps. The chip has been fabricated with SMIC 180nm mixed-mode technology. Additionally an NFC bridge chip application to the blood glucose measurement system is described for an application example.

A Study on Adolescents' Ethical Consumption Education Experience and Ethical Consumption Behavior (청소년의 윤리적 소비 교육 경험과 윤리적 소비행동에 관한 연구)

  • Jung, Joo-Won
    • Journal of Korean Home Economics Education Association
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    • v.24 no.3
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    • pp.191-208
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    • 2012
  • The purpose of this study was to explore a plan for maximizing effectiveness of adolescents' ethical consumption education. The ethical consumption education experience and the ethical consumption behavior in home, school and society were examined targeting 587 middle and high school students. As a result of research, first, adolescents' ethical consumption education experiences were indicated not to be mostly high. In the sphere of ethical consumption behavior, the ethical consumption education for the future generation of centering on green consumption was being much performed. Second, the students are much facing ethical consumption through participating in event and voluntary-service activity as for school program and through participating in flea market as for social program. And the tendency was being shown that has high contact frequency in ethical consumption education through internet. Third, the adolescent consumers' ethical consumption behavior level was not high as a whole. Thus, it could be known that the ethical consumption education is needed continuously. Especially, the education of the ethical consumption for current generation is further demanded. Fourth, the factors of having influence upon adolescent consumers' ethical consumption behavior were indicated that the more ethical consumption behavior is shown in more taking home consumer education and school consumer education in case of women and in the lower school year as for school year. In this way, the importance of ethical consumption education in home, school and society is indicated. Thus, there will be a need of being developed the educational method and the educational contents that are connected with real life so that adolescents themselves can acquire through experience by being linked mutually.

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Geotechnical Characteristics of Fly Ash Containing High Content of Unburned Carbons Reinforced with Fibers and Sand (섬유/모래로 보강된 미연소탄소탄소 고함량 플라이애쉬의 지반공학적특성)

  • Yoon, Boyeong;Lee, Changho;Choo, Hyunwook;Lee, Woojin
    • Journal of the Korean Geotechnical Society
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    • v.33 no.4
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    • pp.35-46
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    • 2017
  • Most of high carbon fly ashes (HCFA) are discarded in landfills with high costs due to low recycling rate. This study aims to explore the geotechnical behaviors of HCFA mixtures reinforced with fiber and sand. A series of compaction test, unconfined compressive strength test and modified 1D consolidation test with bender element were performed. Specimens were prepared at their optimal moisture contents based on the results of compaction tests. The results of this study demonstrate that the inclusion of fibers to the matrix of HCFA increases unconfined compressive strength (UCS), strain at UCS, and maximum shear modulus ($G_{max}$) at a given void ratio. Reinforcement with sand increases UCS of HCFA; while the strain at UCS is irrelevant with sand fractions. Sand particles may disrupt the direct contacts between HCFA particles at low sand content, resulting in a decrease in $G_{max}$. However, it can be expected that the mixtures with sand content larger than 20% are in dense state; thus, $G_{max}$ of HCFA reinforced with sand shows greater value than that of unreinforced HCFA compacted with the same energy. Regardless of types of reinforcement, the compression index ($C_c$) of both fiber and sand reinforced HCFA is mainly determined by initial void ratio.

Production of Acetate from Waste Gas using Peptostreptococcus productus (Peptostreptococcus productus를 이용한 산업체 부생가스로부터 아세테이트 생산)

  • 강환구;전희진
    • KSBB Journal
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    • v.15 no.2
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    • pp.188-194
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    • 2000
  • The anaerobic bacterium P. productus was known to produce acetate from CO, C02 and H2. In this research the acetate f formation from waste gas was studied. For this research, kinetic parameter study on CO conversion were carried out. From t this study maximum CO conversion rate of 39.3 mmol/L . hr . 0.0 and Km of 0.578 atm were obtained. Also the effect of c CO refreshment, N source, initial pH and c비ture temperature on acetate formation were studied. Acetate formation in 5L lab s scale fermenter was tested and specific acetate production rate of 0.48 g/L-hr-O.O. was obtained and the acetate c concentration was 21 g/L.

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Magnetic Resonance Elastography (자기 공명 탄성법)

  • Kim, Dong-Hyun;Yang, Jae-Won;Kim, Myeong-Jin
    • Investigative Magnetic Resonance Imaging
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    • v.11 no.1
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    • pp.10-19
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    • 2007
  • Conventional MRI methods using T1-, T2-, diffusion-, perfusion-weighting, and functional imaging rely on characterizing the physical and functional properties of the tissue. In this review, we introduce an imaging modality based on measured the mechanical properties of soft tissue, namely magnetic resonance elastography (MRE). The use of palpation to identify the stiffness of tissue remains a fundamental diagnostic tool. MRE can quantify the stiffness of the tissue thereby providing a objective means to measure the mechanical properties. To accomplish a successful clinical setting using MRE, hardware and software techniques in the area of transducer, pulse sequence, and imaging processing algorithm need to be developed. Transducer, a mechanical vibrator, is the core of MRE application to make wave propagate invivo. For this reason, considerations of the frame of human body, pressure and friction of the interface, and high magnetic field of a MRI system needs to be taken into account when designing a transducer. Given that the wave propagates through human body effectively, developing an appropriate pulse sequence is another important issue in obtaining an optimal image. In this review paper, we introduce the technical aspects needed for MRE experiments and introduce several applications of this new field.

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Effects of Recombinant Baculovirus Infection Conditions on Production of Green Fluorescent Protein in Drosophila S2 Cells (초파리 S2 세포 시스템에서 녹색형광단백질 생산을 위한 재조합 배큘로바이러스의 감염조건들의 영향)

  • Cho, Hye Sook;Kim, Yeon Kyu;Kim, Kyoung Ro;Cha, Hyung Joon
    • Korean Chemical Engineering Research
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    • v.44 no.1
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    • pp.40-45
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    • 2006
  • The baculovirus-insect Drosophila melanogaster S2 cell system combines advantages of conventional baculovirus system and non-lytic S2 cell system because baculoviruses can infect non-permissive cells such as mammalian and Drosophila S2 cells but cannot replicate themselves inside the cells. In the present work, we investigated effects of infection conditions on production of green fluorescent protein (GFP) as a target protein using this baculovirus-S2 cell system. Even though higher MOI and longer baculovirus contact time showed better GFP expression yield during the shorter period, overall protein yield could be lower during the longer period due to the relatively higher cell detachment and lysis (lower cell viability). In addition, maintaining high MOI will be not practical for large-scale cell culture. Therefore, instead of maintaining high MOI, we found that high initial cell number and concentrated (10X) baculovirus volume can confer comparable protein expression even under the moderate MOI condition. Also, we found that the post-infection time that is connected to state of cells after infection was an important factor for production yield.

Study on Interaction of Planar Redundant Manipulator with Environment based on Intelligent Control (지능제어를 이용한 평면 여자유도 매니퓰레이터와 환경과의 상호작용에 관한 연구)

  • Yoo, Bong-Soo;Kim, Sin-Ho;Joh, Joong-Seon
    • Journal of the Korean Institute of Intelligent Systems
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    • v.19 no.3
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    • pp.388-397
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    • 2009
  • There are many tasks which require robotic manipulators interaction with environment. It consists of three control problems, i.e., position control, impact control and force control. The position control means the way of reaching to the environment. The moment of touching to the environment yields the impact control problem and the force control is to maintain the desired force trajectory after the impact with the environment. These three control problems occur in sequence, so each control algorithm can be developed independently. Especially for redundant manipulators, each of these three control problems has been important independent research topic. For example, joint torque minimization and impulse minimization are typical techniques for such control problems. The three control problems are considered as a single task in this paper. The position control strategy is developed to improve the performance of the task, i.e., minimization of the individual joint torques and impulse. Therefore, initial conditions of the impact control problem are optimized at the previous position control algorithm. Such a control strategy yields improved result of the impact control. Similarly, the initial conditions for the force control problem are indirectly optimized by the previous position control and impact control strategies. The force control algorithm uses the individual joint torque minimization concept. It also minimizes the force disturbances. The simulation results show the proposed control strategy works well.

Evaluation of Disease Resistance of a Leaffolder-resistant (Cry1Ac1) Rice Event and Gene Transfer to Plant Pathogens (혹명나방 저항성벼(Cry1Ac1)의 병해 저항성 및 병원균으로의 유전자 전이)

  • Nam, Hyo-Song;Shim, Hong-Sik;Yu, Sang-Mi;Lee, Se-Won;Kwon, Soon-Jong;Kim, Myung-Kon;Lee, Yong-Hoon
    • Research in Plant Disease
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    • v.15 no.3
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    • pp.202-208
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    • 2009
  • The genetically modified leaffolder-resistant (Cry1Ac1) rice plant was evaluated for the changes of resistance by comparing the occurrence of major diseases with a japonica type Korean rice variety, Nakdong which was the mother plant of the transgenic rice event, in greenhouse and field conditions. There was no difference in the occurrence of sheath blight and Helminthosporium blight between the two varieties in the fields. We couldn't find any difference of resistance for fungal blast and bacterial leaf blight by artificial inoculation in greenhouse. There was also no difference in the susceptibility to sheath blight in artificial inoculation tests confirming the results in the fields. The possibility of gene transfer of Bar and Cry1Ac1 from the genetically modified rice plant to naturally infected pathogens such as Fusarium moniliforme and Pyricularia oryzae in the field conditions was tested by PCR. And the possible transfer of those genes by continuous inoculation of Xanthomonas oryzae pv. oryzae and Rhizoctonia solani was also tested. However, we couldn't find any possibility of transfer of the genes in natural and artificial conditions.