• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.456-456
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• 2010

CMOS 소자가 서브마이크론($0.1\;{\mu}m$) 이하로 스케일다운 되면서 단채널 효과(short channel effect), 게이트 산화막(gate oxide)의 누설전류(leakage current)의 증가와 높은 직렬저항(series resistance) 등의 문제가 발생한다. CMOS 소자의 구동전류(drive current)를 높이고, 단채널 효과를 줄이기 위한 가장 효율적인 방법은 소스 및 드레인의 얕은 접합(shallow junction) 형성과 직렬 저항을 줄이는 것이다. 플라즈마 도핑 방법은 플라즈마 밀도 컨트롤, 주입 바이어스 전압 조절 등을 통해 저 에너지 이온주입법보다 기판 손상 및 표면 결함의 생성을 억제하면서 고농도로 얕은 접합을 형성할 수 있다. 그리고 얕은 접합을 형성하기 위해 주입된 불순물의 활성화와 확산을 위해 후속 열처리 공정은 높은 온도에서 짧은 시간 열처리하여 불순물 물질의 활성화를 높여주면서 열처리로 인한 접합 깊이를 얕게 해야 한다. 그러나 접합의 깊이가 줄어듦에 따라서 소스 및 드레인의 표면 저항(sheet resistance)과 접촉저항(contact resistance)이 급격하게 증가하는 문제점이 있다. 이러한 표면저항과 접촉저항을 줄이기 위한 방안으로 실리사이드 박막(silicide thin film)을 형성하는 방법이 사용되고 있다. 본 논문에서는 (100) p-type 웨이퍼 He(90 %) 가스로 희석된 $PH_3$(10 %) 가스를 사용하여 플라즈마 도핑을 실시하였다. 10 mTorr의 압력에서 200 W RF 파워를 인가하여 플라즈마를 생성하였고 도핑은 바이어스 전압 -1 kV에서 60 초 동안 실시하였다. 얕은 접합을 형성하기 위한 불순물의 활성화는 ArF(193 nm) excimer laser를 통해 $460\;mJ/cm^2$의 에니지로 열처리를 실시하였다. 그리고 낮은 접촉비저항과 표면저항을 얻기 위해 metal sputter를 통해 TiN/Ti를 $800/400\;{\AA}$ 증착하고 metal RTP를 사용하여 실리사이드 형성 온도를 $650{\sim}800^{\circ}C$까지 60 초 동안 열처리를 실시하여 $TiSi_2$ 박막을 형성하였다. 그리고 $TiSi_2$의 두께를 측정하기 위해 TEM(Transmission Electron Microscopy)을 측정하였다. 화학적 결합상태를 분석하기 위해 XPS(X-ray photoelectronic)와 XRD(X-ray diffraction)를 측정하였다. 접촉비저항, 접촉저항과 표면저항을 분석하기 위해 TLM(Transfer Length Method) 패턴을 제작하여 I-V 특성을 측정하였다. TEM 측정결과 $TiSi_2$의 두께는 약 $580{\AA}$ 정도이고 morphology는 안정적이고 실리사이드 집괴 현상은 발견되지 않았다. XPS와 XRD 분석결과 실리사이드 형성 온도가 $700^{\circ}C$에서 C54 형태의 $TiSi_2$ 박막이 형성되었고 가장 낮은 접촉비저항과 접촉저항 값을 가진다.

• Proceedings of the KWS Conference
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• 2009.11a
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• pp.121-121
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• 2009

자동차는 코너 주행 시 In-corner와 Out-corner 의 바퀴 궤적이 달라지므로, 특별한 장치가 없이 좌우 구동 측의 바퀴가 같은 속도로 회전을 하게 되면 정상적인 주행이 불가능하다. 따라서 정상적인 코너 주행이 가능 하려면, 코너 안쪽 바퀴보다 바깥쪽 바퀴가 더 빨리 회전해야 하며 이러한 회전 차를 보상받지 못할 경우 바깥쪽 바퀴가 끌리는 현상이 발생하는데 이를 방지하기 위해 디퍼렌셜 기어가 필요하다. 현재 디퍼렌셜 기어는 디퍼렌셜 케이스와 링기어를 볼트로 체결하는 조립 공법을 통해 생산되고 있다. 하지만 볼트 체결 공법은 조립을 위한 볼트와 볼트 체결을 위한 플랜지와 볼팅을 위한 홀을 가공하는 공정이 필요하기 때문에 재료비 절감 및 생산 효율 향상에 매우 불리하고 볼트체결을 위한 부분 때문에 불필요한 무게가 증가하게 된다. 따라서 본 연구에서는 이러한 기계적 체결 방식을 레이저 용접 방식으로 대체하여 재료비를 절감하고 무게 저감을 통해 주행성능을 향상시키고자 하였다. 링기어의 소재는 침탄처리강(SCM420H)이며 디퍼렌셜 케이스의 소재는 주철(GCD500)을 사용하고 있다. 주철은 용접시 용접부와 열영향부에서 마르텐사이트 조직과 레데브라이트, 시멘타이트 조직이 생성되며 고탄소 모재의 탄소 확산으로 인한 부분 혼합영역에서 탄소 합금이 생성되어 균열이 발생하는 등 용접성이 매우 좋지 않은 것으로 알려져 있다. 이러한 주철의 난용접성을 해결하는 방법으로는 고탄소 모재 용접시 발생하는 탄소의 확산을 억제하거나 예열이나 후열 처리를 통한 냉각 속도의 제어하는 방법과 오스테나이트 안정화 원소를 첨가한 필러와이어를 사용하여 용접시 마르텐사이트와 시멘타이트의 성장을 방해하는 방법 등이 이용되고 있다. 본 연구에서는 예열처리나 후열처리를 통한 주철의 용접법은 대량 생산을 통한 원가절감을 노리는 자동차 업계의 특성에 비추어 볼 때 비용이나 프로세스 구성 면에서 적용하는 것이 어려울 것이라 판단하여 Ni-base filler metal을 통한 주철의 용접법을 선택하였고 그 결과 실차에 적용하기 위한 비틀림 강성 테스트나 내구 테스트는 통과하였으나 NVH 테스트 결과 볼팅 체결 방식에 비하여 소음이 커지는 문제가 발생하고 링기어의 HAZ부가 고경화 되는 문제가 발생하였다. 때문에 용입깊이를 초기 시제품인 5mm에서 4mm로 변경시켜 입열량 감소 및 용접변형을 줄여 소음 문제를 해결하고자 하였으며 링기어의 침탄층을 1mm 절삭하여 링기어 HAZ부의 고경화 문제를 해결하고자 하였다. 이러한 용접 구조 변경이 용접변형 및 강성과 피로에 미치는 영향력을 알아보고자 용접 및 열처리 상용 소프트웨어인 SYSWELD, 구조해석 상용소프트웨어인 NX_NASTRAN, 피로 해석 상용 소프트웨어인 FEMFAT을 이용하여 시뮬레이션 하였고 실제 구조 변경한 용접 시제품과 비교, 분석하였다.

• Applied Chemistry for Engineering
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• v.33 no.1
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• pp.58-63
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• 2022

Graphite has been used as an anode material for lithium-ion batteries for the past 30 years due to its low de-/lithiation voltage, high theoretical capacity of 372 mAh/g, low price, and long life properties. Recently, all-solid-state lithium-ion batteries (ASSLB), which are composed of inorganic solid materials with high stability, have received great attention as electric vehicles and next-generation energy storage devices, but research works on graphite that works well for ASSLB systems are insufficient. Therefore, we induced the performance improvement of ASSLB anode electrode graphite material by removing the amorphous carbon present in the carbon material surface, acting as a resistive layer from the graphite. As a result of X-ray diffraction (XRD) analysis using heat treated graphite in air at 400, 500, and 600 ℃, the full width at half maximum (FWHM) at (002) peak was reduced compared to that of bare graphite, indicating that the crystallinity of graphite was improved after heat treatment. In addition, the discharge capacity, initial coulombic efficiency (ICE) and cycle stability increased as the crystallinity of graphite increased after heat treatment. In the case of graphite annealed in air at 500 ℃, the high capacity retention rate of 331.1 mAh/g and ICE of 86.2% and capacity retention of 92.7% after 10-cycle measurement were shown.

• Science of Emotion and Sensibility
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• v.24 no.2
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• pp.25-38
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• 2021

The aim of this study is to protect workers and pedestrians from accidents at night or bad weather by attaching optical fiber to existing safety clothing that is made only with fluorescent fabrics and retroreflective materials. A safety vest was designed and manufactured by applying optical fiber, and energy-harvesting technology was developed. The safety vest was designed to emit light using the automatic flashing of optical fibers attached to the film, and an energy harvester was manufactured and attached to drive the light emission of the optical fiber more continuously. As a result, first, the vest wearer' body was recognized from a distance through the optical fiber and retroreflection, which helped prevent accidents. Thus, this concept helps in saving lives by preventing accidents during night-time work on the roadside or activities of rescue crew and sports activities, or by quickly finding the point of an accident with a signal that changes the optical fiber light emission. Second, to use the wasted energy, a piezoelectric-element power generation system was developed and the piezoelectric-harvesting device was mounted. Potentially, energy was efficiently produced by activating the effective charging amount of the battery part and charging it auxiliary. In the existing safety vest, detecting the person wearing the vest is almost impossible in the absence of ambient light. However, in this study, the wearer could be found within 100 m by the light emission from the safety vest even with no ambient light. Therefore, in this study, we will help in preventing and reducing accidents by developing smart safety clothing using optical fiber and energy harvester attached to save lives.

• Journal of Life Science
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• v.32 no.11
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• pp.908-917
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• 2022

Systemic acquired resistance (SAR) is a form of systemic immunity that prevents secondary infections of distal uninfected parts of plants by related or unrelated pathogens. SAR is mediated by several SAR-inducing chemicals or mobile signals that accumulate after pathogen infection. Several chemicals that move systemically have already been identified as SAR-inducing factors, despite the fact that the early mobile signal remains unclear. These chemicals can be transported into either the apoplastic or symplastic compartments. Many of the chemicals associated with SAR remain unknown in terms of their transport routes. There is recent evidence that azelaic acid (AzA) and glycerol-3-phosphate (G3P) are transported via plasmodesmata (PD) channels, which regulate the symplastic route. In contrast, salicylic acid (SA) is preferentially transported from pathogen-infected to uninfected parts via the apoplast. The pH gradient and SA deprotonation lead to apoplastic accumulation of SA before it accumulates in the cytosol. Moreover, there is evidence that the mobility of SA over a long distance is crucial for SAR and that the partitioning of SA into the symplast and cuticles is controlled by transpiration. Further research has shown that a portion of the total SA in leaves is partitioned into cuticular waxes. The purpose of this review is to discuss the role of SAR-inducing chemicals and the regulation of transport in SAR.

• KIPS Transactions on Software and Data Engineering
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• v.12 no.4
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• pp.189-198
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• 2023

As crimes frequently occur on the street, the spread of CCTV is increasing. However, due to the shortcomings of passively operated CCTV, the need for intelligent CCTV is attracting attention. Due to the heavy system of such intelligent CCTV, high-performance devices are required, which has a problem in that it is expensive to replace the general CCTV. To solve this problem, an intelligent CCTV system that recognizes low-quality images and operates even on devices with low performance is required. Therefore, this paper proposes a Saying CCTV system that can detect threats in real time by using the AWS cloud platform to lighten the system and convert images into text. Based on the data extracted using YOLO v4 and OpenPose, it is implemented to determine the risk object, threat behavior, and threat situation, and calculate the risk using machine learning. Through this, the system can be operated anytime and anywhere as long as the network is connected, and the system can be used even with devices with minimal performance for video shooting and image upload. Furthermore, it is possible to quickly prevent crime by automating meaningful statistics on crime by analyzing the video and using the data stored as text.

• Composites Research
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• v.19 no.5
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• pp.7-11
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• 2006

The improved SWNTs/PANi composite actuator films applicable to an artificial muscle were fabricated successfully using a new process of manufacture that consists of 90% pure single-walled carbon nanotubes (SWNT) and chemical polymerization. PANi is electrically conducting polyaniline polymer. The conductivities of the composite SWNTs/PANi film-type actuators and the pure PANi films fabricated were measured as 56.15 S/cm and 17.38 S/cm, respectively, by the 4-prove method. The conductivity of the composite actuator is 3.2 times higher than the pure PANi film. The fabricated composite actuator showed higher conductivity than any other similar ones. The quality of samples was investigated by an electron scanning microscope (SEM). To measure the actuating strains, a specially designed beam balance apparatus was developed and strains of the composite actuators was measured by a laser displacement sensor subjected to electric currents. During the operation, the sample was soaked in the $NaNO_3$ solution and the sine-wave voltage in the range of $+1V{\sim}-1V$ was applied. The length of the composite actuator changed from $l_0=12.690$ mm to $l_1=12.733$ so that the change of length was l=0.043 mm and the strain was 0.34 %. This is a very high strain for this kind of a composite actuator. Other result reported by Tahhan showed 0.23 % strain, so that the present result is improved by 48%.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.16 no.6
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• pp.509-518
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• 2023

In this paper, we designed a 4Kb poly-fuse OTP IP (Intellectual Property) required for analog circuit trimming and calibration. In order to reduce the BL resistance of the poly-fuse OTP cell, which consists of an NMOS select transistor and a poly-fuse link, the BL stacked metal 2 and metal 3. In order to reduce BL routing resistance, the 4Kb cells are divided into two sub-block cell arrays of 64 rows × 32 rows, with the BL drive circuit located between the two 2Kb sub-block cell arrays, which are split into top and bottom. On the other hand, in this paper, we propose a core circuit for an OTP cell that uses one poly-fuse link to one select transistor. In addition, in the early stages of OTP IP development, we proposed a data sensing circuit that considers the case where the resistance of the unprogrammed poly-fuse can be up to 5kΩ. It also reduces the current flowing through an unprogrammed poly-fuse link in read mode to 138㎂ or less. The poly-fuse OTP cell size designed with DB HiTek 90nm CMOS process is 11.43㎛ × 2.88㎛ (=32.9184㎛2), and the 4Kb poly-fuse OTP IP size is 432.442㎛ × 524.6㎛ (=0.227mm²).

• Progress in Medical Physics
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• v.25 no.2
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• pp.100-109
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• 2014

In stereotactic body radiotherapy (SBRT), the accurate location of treatment sites should be guaranteed from the respiratory motions of patients. Lots of studies on this topic have been conducted. In this letter, a new verification method simulating the real respiratory motion of heterogenous treatment regions was proposed to investigate the accuracy of lung SBRT for Volumetric Modulated Arc Therapy. Based on the CT images of lung cancer patients, lung phantoms were fabricated to equip in $QUASAR^{TM}$ respiratory moving phantom using 3D printer. The phantom was bisected in order to measure 2D dose distributions by the insertion of EBT3 film. To ensure the dose calculation accuracy in heterogeneous condition, The homogeneous plastic phantom were also utilized. Two dose algorithms; Analytical Anisotropic Algorithm (AAA) and AcurosXB (AXB) were applied in plan dose calculation processes. In order to evaluate the accuracy of treatments under respiratory motion, we analyzed the gamma index between the plan dose and film dose measured under various moving conditions; static and moving target with or without gating. The CT number of GTV region was 78 HU for real patient and 92 HU for the homemade lung phantom. The gamma pass rates with 3%/3 mm criteria between the plan dose calculated by AAA algorithm and the film doses measured in heterogeneous lung phantom under gated and no gated beam delivery with respiratory motion were 88% and 78%. In static case, 95% of gamma pass rate was presented. In the all cases of homogeneous phantom, the gamma pass rates were more than 99%. Applied AcurosXB algorithm, for heterogeneous phantom, more than 98% and for homogeneous phantom, more than 99% of gamma pass rates were achieved. Since the respiratory amplitude was relatively small and the breath pattern had the longer exhale phase than inhale, the gamma pass rates in 3%/3 mm criteria didn't make any significant difference for various motion conditions. In this study, the new phantom model of 4D dose distribution verification using patient-specific lung phantoms moving in real breathing patterns was successfully implemented. It was also evaluated that the model provides the capability to verify dose distributions delivered in the more realistic condition and also the accuracy of dose calculation.

• Journal of Bio-Environment Control
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• v.22 no.3
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• pp.284-290
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• 2013

This study analyzed the geometric, compressive, cutting and friction properties of oriental melons in order to design a gripper capable of soft handling and a cutter for cutting oriental melon vine among the end effector of oriental melon as a preliminary step for developing the end effector of the robot capable of harvesting oriental melons in protected cultivation. As a result, the average length, diameter at the midpoint, weight, volume and roundness of the oriental melons were 108 mm, 70 mm, 188 g, 333 mL and 3.8 mm. Nonlinear regression analysis was performed on the equation $W=L^a{\times}D_2^b$ with variation of the length (L) and diameter (D2) of the weight (W) of the oriental melons. As a result, it was shown that there was a correlation between a of 2.0279 and b of -0.9998 as a constant value. The average diameter of the oriental melon vine was 3.8 mm, and most vines were distributed within a radius of 5 mm from the center. The average yield value, compressive strength and hardness of the oriental melons were $36.5N/cm^2$, $185.7N/cm^2$ and $636.7N/cm^2$, respectively. The average cutting force and shear strength of the oriental melon vines were $2.87{\times}10^{-2}\;N$ and $5.60N/cm^2$, respectively. The maximum friction coefficient of the oriental melons was rubber of 0.609, followed by aluminium of 0.393, stainless steel of 0.177 and teflon of 0.079. It was considered possible to apply it to the size of the gripper and cutter, turning radius, dynamics of drive motor and selection of materials and their quality in light of the position error and safety factor according to the movement when designing end effector based on the analyzed data.