• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.1137-1139
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• 1999

저가의 우수한 성능을 갖는 적외선 영상표시 소자 구현에 적합한 마이크로 볼로미터를 MEMS 기술을 사용하여 제작하였다. 작은 열질량을 갖는 마이크로미터 단위의 열적고립 구조(thermal isolation structure) 제작은 폴리이미드(PI2611)를 희생층으로 사용하여 최종적으로 ashing공정 단계에서 폴리이미드를 제거하여 마이크로 볼로미터 구조를 완성하였다. 이 때의 구조층으로는 PECVD 질화실리콘($SiN_x$) 박막, 감지층으로 산화바나듐($VO_x$) 박막을 사용하였다. 본 연구에서는 폴리이미드 패턴 형성시 건식식각 공정조건 변수에 따라서 패턴의 기울기를 조절하여 폴리이미드 측면에서 발생되는 불 균일한 박막 증착과 패터닝 문제를 개선하였다. 또한 저응력의 질화실리콘 박막을 사용하여 잔류응력에 의한 열적고립 구조의 뒤틀림 현상을 완화하였다.

• Journal of the Korean Solar Energy Society
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• v.35 no.4
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• pp.9-15
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• 2015

Black cobalt solar selective coatings were prepared by using an electroplating method. The changes in the optical properties of the black cobalt selective coating due to thermal degradation were analyzed by using the Auger electron spectroscopy (AES) and spectrophotometer. The black cobalt selective coating was prepared on a copper substrate by using a synthesized electrolyte with $CoCl_2$ and KSCN at a current density of ${\sim}0.5A/dm^2$ for 45s ~ 60s. Its optical properties were a solar absorptance (${\alpha}$) of the order of 0.80 ~ 0.84 and a thermal emittance (${\epsilon}$) of 0.01. From the AES depth profile analysis of heated sample, thermal degradation of the black cobalt selective coating heated for 33 hours at temperature of $350^{\circ}C$ occurred primarily due to interdiffusion at interface of cobalt and copper substrate. This results were predictable that the ${\alpha}$ decreases due to the thermal oxidation and diffusion.

• Journal of Powder Materials
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• v.25 no.1
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• pp.48-53
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• 2018

One-dimensional rutile $TiO_2$ is an important inorganic compound with applicability in sensors, solar cells, and Li-based batteries. However, conventional synthesis methods for $TiO_2$ nanowires are complicated and entail risks of environmental contamination. In this work, we report the growth of $TiO_2$ nanowires on a Ti alloy powder (Ti-6wt%Al-4wt%V, Ti64) using simple thermal oxidation under a limited supply of $O_2$. The optimum condition for $TiO_2$ nanowire synthesis is studied for variables including temperature, time, and pressure. $TiO_2$ nanowires of ${\sim}5{\mu}m$ in length and 100 nm in thickness are richly synthesized under the optimum condition with single-crystalline rutile phases. The formation of $TiO_2$ nanowires is greatly influenced by synthesis temperature and pressure. The synthesized $TiO_2$ nanowires are characterized using field-emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), and high-resolution transmission electron microscopy (HR-TEM).

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.176.1-176.1
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• 2013

TCO (Transparent Conductive Oxide)는 투명 전도성 산화물 높은 투과율과 낮은 비저항 가지고 있어서 최근 사용된 평판디스플레이 LCD(liquid crystal display), PDP (Plasma Display Panel), OLED (Organic Light Emitting Display) 에 많이 사용되고 있다. 현재 양산화 되고 있는 ITO (Indium tin Oxide)는 좋은 전도율과 높은 투과율로서 가장 많이 쓰인다. 하지만 ITO중에 Indium Oxide는 치명적인 독성을 가지고 있으며 In의 저장량이 적어 시간이 갈수록 가격이 비싸지는 등 여러 가지 단점을 가지고 있다. 그것에 비해 AZO (aluminum-doped zinc oxide)는 독성이 없고 가격도 저렴하여 ITO의 단점을 보완 할 수 있는 물질이다. AZO 증착은 현재 sol-gel, CVD(chemical vapor deposition), Sputter, 등으로 사용되고 있으며 현재 많은 연구가 진행되고 있다. 본 실험에서는 PEN 기판을 사용하였으며, 플라즈마의 열적 데미지로 인한 기판의 변형 등 여러 가지 문제를 해결하기 위하여 박막의 열적 변형이 적고, 고밀도 플라즈마로 양질의 박막 증착이 가능한 FTS (Facing Target Sputtering)방법을 사용하여 AZO박막을 증착시키고 구조적, 전기적, 광학적인 특성을 평가 하였다. 측정 분석 결과 AZO는 가시광 영역에 높은 투과율이 요구되는 Flexible display 표시장치와 OLED, PDP, 유기태양전지 등 많은 영역에 사용이 가능 할 것이라 사료된다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.47 no.10
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• pp.720-727
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• 2019

Resonating thermal lags of solid fuel with heat transfer oscillations generated by boundary layer oscillation is the primary mechanism of the occurrence of the LFI (Low Frequency Combustion Instability) in hybrid rocket combustion. This study was experimentally attempted to confirm that how the boundary layer was perturbed and led to the LFI. Special attention was also made on oxidizer swirl injection to investigate the contribution to combustion stabilization. Also the overall behavior of fluctuating boundary layer flow and the occurrence of the LFI was monitored as swirl intensity increased. Fluctuating boundary layer was successfully monitored by the captured image and POD (Proper Orthogonal Decomposition) analysis. In the results, oscillating boundary layer became stabilized as the swirl intensity increases. And the coupling strength between high frequency p', q' diminished and periodical amplification of RI (Rayleigh Index) with similar frequency band of thermal lag was also decreased. Thus, results confirmed that oscillating axial boundary layer triggered by periodic coupling of high frequency p', q' is the primary mechanism to excite thermal resonance with thermal lag characteristics of solid fuel.

• Composites Research
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• v.31 no.5
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• pp.260-266
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• 2018

This study investigates thermal and mechanical characterization of Hafnium carbide coating on the $C_f-C$ composites. The hafnium carbide coatings by vacuum plasma spray on the C/C-SiC composites are prepared to evaluate oxidation and wear resistance. We perform the thermal durability tests by thermal cycling at $1200^{\circ}C$ for 10cycles in air and investigates the weight change of each cycle. We also evaluate the wear and indentation behavior using tungsten carbide ball indenter as a mechanical evaluation. As a result, the HfC coating is beneficial to reduce of weight loss during thermal cycling test and improve the elastic property of C/C-SiC composite. Especially, the HfC coating improves the wear resistance of C/C-SiC composite.

• Polymer(Korea)
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• v.30 no.6
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• pp.519-524
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• 2006

Poly(4-vinyl pyridine) (PVP) and its copolymers, poly(4-vinyl pvridine- co-acrylamide) and poly(4-vinyl pyridine-co-allylamine), were synthesized and evaluated for application to organic solder-ability preservatives (OSP). The copolymers were synthesized by radical polymerization of vinyl pyridine in the presence of acrylamide or allylamine as a comonomer. Various kinds of polymers with different chemical composition were synthesized by varying the feed ratio of monomers and their low $M_w$ polymers can be obtained by adding 2-mercaptoethanol as a chain transfer agent during poly-merization. All the polymers showed good adhesion properties on Cu pad when they were spin-coated. Especially, allylamine -containing copolymers showed both good adhesion and solubility properties. Also, they exhibited better thermal stability than PVP homopolymer and such thermal properties were changed depending on the chemical composition and their $M_w$, which were evidenced by the measurement of oxygen induced temperature (OIT). From the OIT measurement, poly(4-vinyl pyridine- co-allylamine) was thermally stable up to $230^{\circ}C$ for 70 min in the 100% oxygen environment. As a result, allylamine-containing copolymers can be considered as a promising OSP coating material that has excellent thermal and adhesive properties applicable to the present microelectronic package processes.

• Journal of the Korean Electrochemical Society
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• v.23 no.1
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• pp.1-10
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• 2020

DSA (Dimensionally Stable Anode) electrodes are physically, thermally and electrochemically stable and are mainly Ti electrodes coated by Ru, Ir and Ta. DSA electrodes have been used in many industrial fields such as chlor-alkali, electrochemical water treatment, water electrolysis, etc. This review paper summarizes the study on the applications using DSA electrodes published in the recent 5 years. It suggests that the researches are intensively required on effective screening of electrodes materials, optimal designing of electrode structures and economical manufacturing of large area electrodes. It is expected that these studies will contribute to the further research and development on advanced DSA electrodes. In addition, the enhancement of DSA electrodes significantly leads to expand the type of the application using electrochemical processes in industry.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.4 no.3
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• pp.705-711
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• 2000

A thin film oxide semiconductor micro gas sensor array which shows only 60 mW of power consumption at an operating temperature of $300^{\circ}C$ has been fabricated using microfabrication and micromachining techniques. Excellent thermal insulation of the membrane is achieved by the use of a double-layer structure of $0.1\mum\; thick\; Si_3N_4 \;and\; 1 \mum$ thick phosphosilicate glass (PSG) prepared by low-pressure chemical-vapor deposition (LPCVD) and atmospheric-pressure chemical-vapor deposition (APCVD), respectively. The sensor array consists of such thin film oxide semiconductor sensing materials as 1 wt.% Pd-doped $SnO_2,\; 6 wt.% A1_2O_3-doped\; ZnO,\; WO_3$/ and ZnO. Baseline resistances of the four sensing materials were found to be stable after the aging for three days at $300^{\circ}C$. The thin film oxide semiconductor micro gas sensor array exhibited resistance changes usable for subsequent data processing upon exposure to various gases and the sensitivity strongly depended on the sensing layer materials.

• Resources Recycling
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• v.12 no.5
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• pp.29-35
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• 2003

$\beta$-Sialon is synthesized by carbo-thermal reduction and nitriding (CTRN) method, using the Fly ash from power plant. $\beta$-Siaion is synthesized at $1,450^{\circ}C$ for 10 hours, and sintered at $1,550 ^{\circ}C$ for 3 hours in nitrogen atmosphere. The XRD analytical results show that the sintered $\beta$-Sialon contains $SiO_2$ and $FeSi_{x}$ of inter-metallic compound. The sintered $\beta$-Sialon is stable against the oxidation at the temperature of 1,31$0^{\circ}C$ for 20 hours. The weight of the sample increases rapidly by oxidation reaction at $1,360^{\circ}C$. The oxide scale is consisted with mullite phase when it is oxidized at the temperature of $1,360 ^{\circ}C$ for 10 hours.