• Title/Summary/Keyword: 연마 방법

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Effect of Ta/Cu Film Stack Structures on the Interfacial Adhesion Energy for Advanced Interconnects (미세 배선 적용을 위한 Ta/Cu 적층 구조에 따른 계면접착에너지 평가 및 분석)

  • Son, Kirak;Kim, Sungtae;Kim, Cheol;Kim, Gahui;Joo, Young-Chang;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.1
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    • pp.39-46
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    • 2021
  • The quantitative measurement of interfacial adhesion energy (Gc) of multilayer thin films for Cu interconnects was investigated using a double cantilever beam (DCB) and 4-point bending (4-PB) test. In the case of a sample with Ta diffusion barrier applied, all Gc values measured by the DCB and 4-PB tests were higher than 5 J/㎡, which is the minimum criterion for Cu/low-k integration without delamination. However, in the case of the Ta/Cu sample, measured Gc value of the DCB test was lower than 5 J/㎡. All Gc values measured by the 4-PB test were higher than those of the DCB test. Measured Gc values increase with increasing phase angle, that is, 4-PB test higher than DCB test due to increasing plastic energy dissipation and roughness-related shielding effects, which matches well interfacial fracture mechanics theory. As a result of the 4-PB test, Ta/Cu and Cu/Ta interfaces measured Gc values were higher than 5 J/㎡, suggesting that Ta is considered to be applicable as a diffusion barrier and a capping layer for Cu interconnects. The 4-PB test method is recommended for quantitative adhesion energy measurement of the Cu interconnect interface because the thermal stress due to the difference in coefficient of thermal expansion and the delamination due to chemical mechanical polishing have a large effect of the mixing mode including shear stress.

A comparative study on the fit and screw joint stability of ready-made abutment and CAD-CAM custom-made abutment (기성 지대주와 맞춤형 CAD-CAM 지대주의 적합 및 나사 안정성 비교)

  • Kim, Jong-Wook;Heo, Yu-Ri;Kim, Hee-Jung;Chung, Chae-Heon
    • The Journal of Korean Academy of Prosthodontics
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    • v.51 no.4
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    • pp.276-283
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    • 2013
  • Purpose: The purpose of this study was to investigate the fit and screw joint stability between Ready-made abutment and CAD-CAM custom-made abutment. Materials and methods: Osstem implant system was used. Ready-made abutment (Transfer abutment, Osstem Implant Co. Ltd, Busan, Korea), CAD-CAM custom-made abutment (CustomFit abutment, Osstem Implant Co. Ltd, Busan, Korea) and domestically manufactured CAD-CAM custom-made abutment (Myplant, Raphabio Co., Seoul, Korea) were fabricated five each and screws were provided by each company. Fixture and abutments were tightening with 30Ncm according to the manufacturer's instruction and then preloding reverse torque values were measured 3 times repeatedly. Kruskal-Wallis test was used for statistical analysis of the preloading reverse torque values (${\alpha}=.05$). After specimens were embedded into epoxy resin, wet cutting and polishing was performed and FE-SEM imaging was performed, on the contact interface. Results: The pre-loading reverse torque values were $26.0{\pm}0.30Ncm$ (ready-made abutment; Transfer abutment) and $26.3{\pm}0.32Ncm$ (CAD-CAM custom-made abutment; CustomFit abutment) and $24.7{\pm}0.67Ncm$ (CAD-CAM custom-made abutment; Myplant). The domestically manufactured CAD-CAM custom-made abutment (Myplant abutment) presented lower pre-loading reverse torque value with statistically significant difference than that of the ready-made abutment (Transfer abutment) and CAD-CAM custom-made abutment (CustomFit abutment) manufactured from the same company (P=.027) and showed marginal gap in the fixture-abutment interface. Conclusion: Within the limitation of the present in-vitro study, in domestically manufactured CAD-CAM custom-made abutment (Myplant abutment) showed lower screw joint stability and fitness between fixture and abutment.

Effects of various CLEAN-UP techniques on enamel surface roughness (수종의 CLEAN-UP technique이 법랑질 표면거칠기에 미치는 영향)

  • CHO, Sang-Wan;KWON, Oh-Won
    • The korean journal of orthodontics
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    • v.27 no.5 s.64
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    • pp.791-800
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    • 1997
  • Sixty premolars extracted for orthodontic treatment were divided into four groups, and the residual resin was removed with four different rotary finishing instruments at a fixed speed of $18,500{\pm}300 rpm$ on the low speed handpiece. The instruments were G1; No.169L carbide fissure bur, G2: No.2 round bur, G3; No.4 round bur, G4: No.8 round bur. Then, the enamel received a S-second polishing with a rubber cup and a pumice. To find the extent of loss on the enamel at this point, prophylaxis was done with the rubber cup and pumice prior to bonding of the bracket(P1) and removal of residual resin by means of appropriate procedure applicable to each respective group(P2) followed. The final polishing was done with the rubber cup and pumice(P3), and the enamel surface roughness was measured each by the surface measuring instrument. The whole process was observed under a scanning electron microscope to gain the following results: At P2, the enamel surface roughness in G1 showed most smoothly with $2.60{\pm}0.55{\mu}m;\;in\;G2,\;3.24{\pm}0.80{\mu}m;\;in\;G3,\;3.44{\pm}0.94{\mu}m;\;in\;G4,\;3.89{\pm}0.54{\mu}m$, the roughest. G2 and G3 showed no statistical significance(P>0.05). At P3, the enamel surface roughness in G1 showed most smoothly with $2.29{\pm}0.47{\mu}m;\;in\;G2,\;2.44{\pm}0.56{\mu}m;\;in\;G3,\;2.44{\pm}0.56{\mu}m;\;in\;G4,\;2.92{\pm}0.43{\mu}m$, the roughest. G1 vs G2, G3, and G2 vs G3 had no statistical significances(p>0.05). In all groups, P2 and P3 showed rougher in surface roughness than P1, and P2 rougher than P3(p<0.01). In a case of 5-second prophylaxis with the rubber cup and the pumice on a virgin, normal enamel, fine scratches were found under the scanning electron microscope. In all four groups, unremovable gouges remained even after polishing with the ubber and pumice; residual resin was not observed with naked eye when finished with the rubber and pumice, but the resin debris was observed under the scanning electron microscope.

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A STUDY ON THE SHEAR BOND STRENGTH AND THE ANTICARIOGENICITY OF GLASS IONOMER CEMENT FOR BRACKET BONDING (브라켓 접착용 글라스 아이어노머 시멘트의 접착강도 및 항우식 효과에 관한 연구)

  • Kang, Yong-Joo;Kim, Yong-Kee
    • Journal of the korean academy of Pediatric Dentistry
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    • v.26 no.3
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    • pp.538-553
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    • 1999
  • The purpose of this study was to compare the shear bond strength and the anticariogenicity of glass ionomer cement with conventional bonding resin and fluoride releasing resin. After the shear bond strength test, scanning electron microscopic observation was performed for the evaluation of the fracture patterns in each group. Under the polarizing light microscope, artificially induced carious lesions were evaluated and the lesion depths of the samples were measured using image analyzing program(Image-Pro $PLUS^{TM}$, USA). 50 sound maxillary premolars were used for the bond strength test and another 30 for the anticariogenic test. Data collected were analyzed statistically using Oneway-ANOVA and Scheffe test. The results were as follows: 1. Glass ionomer groups(G-III, IV, V) generally showed the lower bond strength values than resin groups(G-I, II). 2. Among the two resin groups, G-I showed the higher bond strength than G-II without statistically significant difference between them(p>.05). 3. Within glass ionomer groups, statistical significance was found between G-III and G-V with the superior bond strength in G-V (p<.05). 4. Under the SEM, adhesive failure was the predominant fracture pattern in G-I and II, whereas cohesive failures were mainly observed in G-III. In G-IV and V, mixed type of pattern where the both fracture patterns coexisted within samples could be seen. 5. In evaluation of the depth of artificially developed carious lesion, glass ionomer group showed shallower depth than resin groups with statistical significance between G-III and G-I, II(p<.05). Among resin groups, fluoride releasing resin(G-II) showed the shallower depth than conventional resin(G-I)(p<.05).

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Brazing characteristics of $ZrO_2$ and Ti-6Al-4V brazed joints with increasing temperature (브레이징 온도 변화에 따른 $ZrO_2$와 Ti-6Al-4V의 접합 특성)

  • Kee, Se-Ho;Park, Sang-Yoon;Heo, Young-Ku;Jung, Jae-Pil;Kim, Won-Joong
    • The Journal of Korean Academy of Prosthodontics
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    • v.50 no.3
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    • pp.169-175
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    • 2012
  • Purpose: In this study, brazing characteristics of $ZrO_2$ and Ti-6Al-4V brazed joints with increasing temperature were investigated. Materials and methods: The sample size of the $ZrO_2$ was $3mm{\times}3mm{\times}3mm$ (thickness), and Ti-6Al-4V was $10mm(diameter){\times}5mm(thickness)$. The filler metal consisted of Ag-Cu-Sn-Ti was prepared in powder form. The brazing sample was heated in a vacuum furnace under $5{\times}10^{-6}$ torr atmosphere, while the brazing temperature was changed from 700 to $800^{\circ}C$ for 30 min. Results: The experimental results shows that brazed joint of $ZrO_2$ and Ti-6Al-4V occurred at $700-800^{\circ}C$. Brazed joint consisted of Ag-rich matrix and Cu-rich phase. A Cu-Ti intermetallic compounds and a Ti-Sn-Cu-Ag alloy were produced along the Ti-6Al-4V bonded interface. Thickness of the reacted layer along the Ti-6Al-4V bonded interface was increased with brazing temperature. Defect ratios of $ZrO_2$ and Ti-6Al-4V bonded interfaces decreased with brazing temperature. Conclusion: Thickness and defect ratio of brazed joints were decreased with increasing temperature. Zirconia was not wetting with filler metal, because the reaction between $ZrO_2$ and Ti did not occur enough.

Effects of laser-irradiated dentin on shear bond strength of composite resin (레이저 처리가 상아질과 복합 레진의 결합에 미치는 영향)

  • Kim, Sung-Sook;Park, Jong-Il;Lee, Jae-In;Kim, Gye-Sun;Cho, Hye-Won
    • The Journal of Korean Academy of Prosthodontics
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    • v.46 no.5
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    • pp.520-527
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    • 2008
  • Purpose: This study was conducted to evaluate the shear bond strength of composite resin to dentin when etched with laser instead of phosphoric acid. Material and methods: Recently extracted forty molars, completely free of dental caries, were embedded into acrylic resin. After exposing dentin with diamond saw, teeth surface were polished with a series of SiC paper. The teeth were divided into four groups composed of 10 specimens each; 1) no surface treated group as a control 2) acid-etched with 35%-phosphoric acid 3) Er:YAG laser treated 4) Er,Cr:YSGG laser treated. A dentin bonding agent (Adapter Single Bond2, 3M/ESPE) was applied to the specimens and then transparent plastic tubes (3 mm of height and diameter) were placed on each dentin. The composite resin was inserted into the tubes and cured. All the specimens were stored in distilled water at $37^{\circ}C$ for 24 hours and the shear bond strength was measured using a universal testing machine (Z020, Zwick, Germany). The data of tensile bond strength were statistically analyzed by one-way ANOVA and Duncan's test at ${\alpha}$= 0.05. Results: The bond strengths of Er:YAG laser-treated group was $3.98{\pm}0.88$ MPa and Er,Cr:YSGG laser-treated group showed $3.70{\pm}1.55$ MPa. There were no significant differences between two laser groups. The control group showed the lowest bond strength, $1.52{\pm}0.42$ MPa and the highest shear bond strength was presented in acid-etched group, $7.10{\pm}1.86$ MPa (P < .05). Conclusion: Laser-etched group exhibited significantly higer bond strength than that of control group, while still weaker than that of the phosphoric acid-etched group.

Shear bond strength of Universal bonding systems to Ni-Cr alloy (니켈-크롬 합금에 대한 다용도 접착 시스템의 전단결합강도)

  • Song, So-Yeon;Son, Byung-Wha;Kim, Jong-Yeob;Shin, Sang-Wan;Lee, Jeong-Yol
    • The Journal of Korean Academy of Prosthodontics
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    • v.53 no.4
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    • pp.295-300
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    • 2015
  • Purpose: The aim of this study was to evaluate the shear bond strength between Ni-Cr alloy and composite resin using universal adhesive systems coMPared to conventional method using metal primers. Materials and methods: For this study, a total of 120 cast commercial Ni-Cr alloy (Vera Bond 2V) disks were embedded in acrylic resin, and their surfaces were smoothed with silicon carbide papers and airborne-particle abrasion. Specimens of each metal were divided into 6 groups based on the combination of metal primers (Metal primer II, Alloy primer, Metal & Zirconia primer, MKZ primer) and universal adhesive systems (Single Bond Universal, All Bond Universal). All specimens were stored in distilled water at $37^{\circ}C$ for 24 hours. Shear bond strength testing was performed with a universal testing machine at a cross head speed of 1 m/min. Data (MPa) were analyzed using one-way ANOVA and the post hoc Tukey's multiple comparison test (${\alpha}$=.05). Results: There were significant differences between Single Bond Universal, All Bond Universal, Metal Primer II and Alloy Primer, MKZ Primer, Metal & Zirconia Primer (P<.001). Conclusion: Universal Adhesive system groups indicated high shear bond strength value bonded to Ni-Cr alloy than that of conventional system groups using primers except Metal Primer II. Within the limitations of this study, improvement of universal adhesive systems which can be applied to all types of restorations is recommended especially non-precious metal alloy. More research is needed to evaluate the effect of silane inclusion or exclusion in universal adhesive systems.

Fatigue fracture of different dental implant system under cyclic loading (반복하중에 따른 수종 임플란트의 피로파절에 관한 연구)

  • Park, Won-Ju;Cho, In-Ho
    • The Journal of Korean Academy of Prosthodontics
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    • v.47 no.4
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    • pp.424-434
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    • 2009
  • Statement of problem: Problems such as loosening and fractures of retained screws and fracture of implant fixture have been frequently reported in implant prosthesis. Purpose: Implant has weak mechanical properties against lateral loading compared to vertical occlusal loading, and therefore, stress analysis of implant fixture depending on its material and geometric features is needed. Material and methods: Total 28 of external hexed implants were divided into 7 of 4 groups; Group A (3i, FULL $OSSEOTITE^{(R)}$Implant), Group B (Nobelbiocare, $Br{\aa}nemark$ $System^{(R)}$Mk III Groovy RP), Group C (Neobiotec, $SinusQuick^{TM}$ EB), Group D (Osstem, US-II). The type III gold alloy prostheses were fabricated using adequate UCLA gold abutments. Fixture, abutment screw, and abutment were connected and cross-sectioned vertically. Hardness test was conducted using MXT-$\alpha$. For fatigue fracture test, with MTS 810, the specimens were loaded to the extent of 60-600 N until fracture occurred. The fracture pattern of abutment screw and fixture was observed under scanning electron microscope. A comparative study of stress distribution and fracture area of abutment screw and fixture was carried out through finite element analysis Results: 1. In Vicker's hardness test of abutment screw, the highest value was measured in group A and lowest value was measured in group D. 2. In all implant groups, implant fixture fractures occurred mainly at the 3-4th fixture thread valley where tensile stress was concentrated. When the fatigue life was compared, significant difference was found between the group A, B, C and D (P<.05). 3. The fracture patterns of group B and group D showed complex failure type, a fracture behavior including transverse and longitudinal failure patterns in both fixture and abutment screw. In Group A and C, however, the transverse failure of fixture was only observed. 4. The finite element analysis infers that a fatigue crack started at the fixture surface. Conclusion: The maximum tensile stress was found in the implant fixture at the level of cortical bone. The fatigue fracture occurred when the dead space of implant fixture coincides with jig surface where the maximum tensile stress was generated. To increase implant durability, prevention of surrounding bone resorption is important. However, if the bone resorption progresses to the level of dead space, the frequency of implant fracture would increase. Thus, proper management is needed.

Elemental analysis of the fluoride varnish effects on root caries initiation (불소 바니쉬 도포 후 초기 치근 우식 발현에 대한 정량원소분석)

  • Park, Se-Eun;Yi, Kee-Wook;Kim, Hae-Young;Son, Ho-Hyun;Chang, Ju-Hea
    • Restorative Dentistry and Endodontics
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    • v.36 no.4
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    • pp.290-299
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    • 2011
  • Objectives: The usage of fluoride varnish for a moderate to low caries-risk group has not been well validated. This study aimed to evaluate the preventive and therapeutic efficacies of fluoride varnish on the initiated root caries. Materials and Methods: Ten premolars were sectioned into quarters, further divided into two windows, one of which was painted with Fluor Protector (1,000 ppm fluoride, Ivoclar Vivadent). An initial lesion with a well-preserved surface layer was produced by pH cycling. Scanned line analysis using energy dispersive spectrometry determined the weight percentages of Ca and P in the demineralized layer. Scanning Electron microscopy and confocal laser scanning microscopy (CLSM) evaluated the varnish-applied root surfaces. Results: The mean lesion depth (SD) was 12.3 (2.6) ${\mu}m$ (single cycling) and 19.6 (3.8) ${\mu}m$ (double cycling). Double cycling extended the lesion depth, but induced no more mineral loss than single cycling (p < 0.05). The mean weight percentages of Ca and P between groups with and without varnish were not significantly different (p < 0.05). A CLSM showed varnish remained within 15 ${\mu}m$ of the surface layer. Conclusions: When a mild acid challenge initiated root tissue demineralization, the application of low-concentration fluoride varnish did not influence the lesion depth or the mineral composition of the subsurface lesion.

MICROLEAKAGE OF THE EXPERIMENTAL COMPOSITE RESIN WITH THREE COMPONENT PHOTOINITIATOR SYSTEMS (3종 광중합개시제를 함유한 실험용 복합레진의 미세누출도)

  • Kim, Ji-Hoon;Shin, Dong-Hoon
    • Restorative Dentistry and Endodontics
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    • v.34 no.4
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    • pp.333-339
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    • 2009
  • This study was done to determine if there is any difference in microleakage between experimental composite resins, in which various proportions of three component photoinitiators (Camphoroquinone, OPPI, Amine) were included. Four kinds of experimental composite resin were made by mixing 3.2% silanated barium glass (78 wt.%, average size; 1 ${\mu}m$) with each monomer system including variously proportioned photoinitiator systems used for photoinitiating BisGMA/BisEMA/TEGDMA monomer blend (37.5:37.5:25 wt.%). The weight percentage of each component were as follows (in sequence Camphoroquinone, OPPI, Amine): Group A - 0.5%, 0%, 1% / Group B - 2%, 0.2%, 2% / Group C - 0.2%, 1%, 0.2% / Group D - 1%, 1%, 2%. Each composite resin was used as a filling material for round class V cavities (diameter: 2/3 of mesiodistal width; depth: 1.5 mm) made on extracted human premolars and they were polymerized using curing light unit (XL 2500, 3M ESPE) for 40 s with an intensity of 600 mW/$cm^2$. Teeth were thermocycled fivehundred times between $50^{\circ}C$and $550^{\circ}C$for 30s at each temperature. Electrical conductivity (${\mu}A$) was recorded two times (just after thermocycling and after three-month storage in saline solution) by electrochemical method. Microleakage scores of each group according to evaluation time were as follows [Group: at first record / at second record; unit (${\mu}A$)]: A: 3.80 (0.69) / 13.22 (4.48), B: 3.42 (1.33) / 18.84 (5.53), C: 4.18 (2.55) / 28.08 (7.75), D: 4.12 (1.86) / 7.41 (3.41). Just after thermocycling, there was no difference in microleakage between groups, however, group C showed the largest score after three-month storage. Although there seems to be no difference in microleakage between groups just after thermocycling, composite resin with highly concentrated initiation system or classical design (Camphoroquinone and Amine system) would be more desirable for minimizing microleakage after three-month storage.