• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.8
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• pp.744-750
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• 2009

In this study, the pumping performance of a piezoelectric valveless micropump is simulated. The micropump, which was developed in the previous work, is composed of a four-layer lightweight piezocomposite actuator, a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, the fluid domain and the structural domain are coupled in the three-dimensional simulation. We used ANSYS for the piezoelectric and structural domains and ANSYS CFX for the fluid domain. The effects of driven frequency on the flow rate have been investigated by simulating the flow characteristics for 10 Hz and 40 Hz driven frequencies. The flow rates with respect to driven frequencies up to 300 Hz have been calculated.

• Journal of Aerospace System Engineering
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• v.12 no.2
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• pp.7-14
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• 2018

In this study, a new check valve was studied to improve the load pressure of a brake system with a small piezoelectric-hydraulic pump. During the pressurization process, the steady-state pressure at the load is affected by the ratio of the cross-sectional area of the check valve the chamber pressure and load pressure. Since the flow path cover of the check valve is made wider than the cross-sectional area of the output flow to prevent backflow, a method of reducing the area ratio is proposed for a higher load pressure by mounting an additional mass to a thin plate spring type check valve. To identify the effect of mounting an additional mass to the existing check valve on the load pressure, a simple brake system with a small piezoelectric-hydraulic pump was modeled using a commercial code AMESim. The AMESim modeling was verified by comparing the simulation results with the experimental results of the pump the existing check valve. The additional mass was added to the verified AMESim modeling and higher load pressure was able to be obtained through simulation. The 35% performance improvement in load pressure identified by carrying out pressurization test of the brake system after adopting the new check valve the small piezoelectric-hydraulic pump.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.19 no.5
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• pp.411-417
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• 2007

This study has been conducted to investigate pumping characteristics of diffuser/nozzle based piezoelectric micropumps. The micropumps include a piezo disk (an actuator), a chamber and a set of diffuser and nozzle. Flow in the current micropumps is controlled by a set of diffuser and nozzle, not by a nap valve. The diffuser/nozzle based micropumps are more reliable in operation and are easier in manufacturing than the flap valve based micropumps. The flow rates of the piezoelectric micropumps have been closely analyzed with a numerical calculation. It has been found that the positions of the inlet and outlet of the micropump can influence the performance of the diffuser/nozzle based piezoelectric micropumps. This study may provide fundamental understanding for the design and analysis of the piezoelectric micropumps.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1442-1445
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• 2003

In precision machinery industry, it's required with small size and low noise design to using in constant liquid delivery equipment. To accomplish it's purpose, we designed the check valve with rubber sheet of circle shapes as a possible assembly in pump body. The test equipment for piezoelectric pump was able to test pressure-flow property and output property of piezoelectric pump by variation(magnitude of voltage and frequency) of input power.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.46.1-46.1
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• 2005

• 기계와재료
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• v.12 no.2 s.44
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• pp.85-92
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• 2000

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.448-448
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• 2013

최근 생물학적 분석 기구에서 시료를 처리, 분리, 검출, 샘플링 또는 분석하기 위해 사용되는 마이크로펌프(Micropump)에 대한 관심이 높아지고 있다. 또한 전자소자의 성능과 신뢰성의 증진을 위한 전자소자의 열 문제를 해결하기 위해 냉각장치로 마이크로 펌프가 적용되기도 한다. 그 외에도 마이크로펌프는 다양한 분야에 응용이 가능하다. 마이크로펌프는 작동 방식에 따라 압전형, 공압형, 열공압형, 연동형 등의 여러 종류로 분류되고 있다. 그중에서도 최근에는 연동형 마이크로 펌프의 개발이 각광받고 있다. 기존의 연동형 펌프들은 다중 챔버를 가지고 있으며, 각각의 챔버 내에서 Dead volume이 많이 발생할 뿐만 아니라 이상적인 연동운동과는 차이가 많이 나는 문제점을 가지고 있다. 또한 압전방식과 열공압방식은 느린 응답성으로 인해 효율적인 유체 이동이 어렵다. 본 논문에서는 이상적인 연동운동을 구현하기 위하여 기존의 연동형 펌프의 단점을 보완하고, 하나의 챔버에 다중전극 구조를 가지는 정전기력방식의 연동형 펌프를 개발하였다. 정전기력방식으로 펌프를 구동함으로써, 저전력으로 펌프구동이 가능하며, 하나의 챔버에 다중전극을 설치함으로써 이상적인 연동운동을 재현하였다. 그리고 Dead volume을 최소화 하였다. 또한, 빠른 반응속도로 인해 효율적인 유체 이동을 실현시킬 수 있었다. 본 연구에서 제안된 마이크로 펌프의 구성은 크게 챔버, 박막, Inlet/outlet hole으로 구성되었다. 챔버는 Si-wafer에 wet etching 공정으로 제작 하였고 그 위에 알루미늄 박막을 200 nm 증착시켰다. 챔버는 가로 32 mm, 세로 5 mm, 깊이는 $15{\mu}m$, 부피는 $200{\mu}l$으로 제작되었다. 박막은 폴리이미드(polyimide)를 사용하여 $3{\mu}m$의 두께로 제작 되었으며, 폴리이미드 박막 사이에는 200 nm 두께의 4개의 알루미늄 박막 전극을 삽입시켰다. 삽입된 4개의 전극에 개별적인 전기신호를 보냄으로써 연동운동이 가능하다. Inlet/outlet hole은 직경 2 mm의 크기로 제작되었으며, 튜브를 연결하여 유체가 흐를 수 있는 체널을 형성하였다. 제작된 마이크로 펌프의 구동전압은 115 V이며, 인가되는 주파수를 1 Hz~100 KHz까지 변화시켜 유량을 측정하였다. 작동 유체는 공기이며, 유량측정은 튜브 내에 물방울을 삽입하여 시간에 따른 이동거리를 관측하였다. 측정결과 2.2 KHz에서 2.4 mm/min의 가장 높은 유량을 확인할 수 있었다. 본 연구를 통해 제안된 연동형 마이크로펌프는 이상적인 연동운동이 가능함으로써 기존의 연동형 방식의 문제점을 보완하였으며, 생명과학, 의학, 화학 등의 분야에서 적용이 가능하리라 기대된다.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.3
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• pp.362-367
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• 2012

Though a micro pump is a crucial element in miniaturized bio-fluidic systems or drug delivery systems, most of the conventional micro pumps still have some limitations to miniaturize their controller system and to obtain the sufficient back pressure which can rise over the inner pressure of human body or experimental animals. In this paper, to overcome these limitation, a new PZT disc and its controller were designed and fabricated to get the sufficient flowrate and the back pressure with guaranteeing embeddability of the controller into pumping body. The amplitudes of the disc deflections were as large as 40 ${\mu}m$ at 200 V - 100 Hz condition. As results of experiments, the flow rate and the back pressure increase when the frequency increases. The obtainable maximum flow rate and back pressure are 5.2 ml/min at 95 Hz and 13.14 kPa at 90 Hz respectively.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3104-3109
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• 2007

The present study has been carried out to investigate the pumping characteristics for different figures of inlet and outlet in diffuser/nozzle based on piezoelectric micropump. Piezoelectric micropump system consists of several parts like a pumping chamber, diffuser/nozzle, piezoelectric element and tubes. Parts of the micropump connected with diffuser/nozzle and tubes have been analyzed.. The magnified parts have been classified into two different models based on their resistance. These models have been further classified into six models with each one having three different angles at the magnified parts. Each model has been compared and analyzed using the simulation tool, namely, CFD-ACE depending on their flow rates and characteristics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1087-1090
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• 2005

In precision machinery systems for medical and chemical applications, micropumps with a low pulsation have been demanded and investigated for accurate delivery of a small amount of liquid. This study proposes sheet type check valves instead of ball type check valves for PZT pumps and performs some tests on dynamics characteristics of check valves having different design parameter with variable frequency. The selected materials of check valves is NBR, PP film, Polyimide and Stainless steel(SUS304). In the experiment, dynamic characteristics of stainless steel thin plate have better performance than others.