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Effect of Inlet and Outlet Position on the Pumping Characteristics of a Diffuser/Nozzle Based Piezoelectric Micropumps  

Jang, Hun-Hee (Department of Mechanical Engineering, Kyung Hee University)
Kim, Chang-Nyung (College of Technology, Kyung Hee University)
Jung, Jin (Samsung Electronics)
Publication Information
Korean Journal of Air-Conditioning and Refrigeration Engineering / v.19, no.5, 2007 , pp. 411-417 More about this Journal
Abstract
This study has been conducted to investigate pumping characteristics of diffuser/nozzle based piezoelectric micropumps. The micropumps include a piezo disk (an actuator), a chamber and a set of diffuser and nozzle. Flow in the current micropumps is controlled by a set of diffuser and nozzle, not by a nap valve. The diffuser/nozzle based micropumps are more reliable in operation and are easier in manufacturing than the flap valve based micropumps. The flow rates of the piezoelectric micropumps have been closely analyzed with a numerical calculation. It has been found that the positions of the inlet and outlet of the micropump can influence the performance of the diffuser/nozzle based piezoelectric micropumps. This study may provide fundamental understanding for the design and analysis of the piezoelectric micropumps.
Keywords
Piezoelectic micropump; Piezo materials; Diffuser/Nozzle; Membrane;
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