Korean Journal of Air-Conditioning and Refrigeration Engineering (설비공학논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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Effect of Inlet and Outlet Position on the Pumping Characteristics of a Diffuser/Nozzle Based Piezoelectric Micropumps

디퓨저/노즐을 이용한 압전형 마이크로 펌프의 펌핑 특성에 미치는 입출구 위치의 영향

  • 장훈희 (경희대학교 기계공학과) ;
  • 김창녕 (경희대학교 테크노공학대학(산학협력기술연구원)) ;
  • 정진 (삼성전자)
  • Published : 2007.05.10
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Abstract

This study has been conducted to investigate pumping characteristics of diffuser/nozzle based piezoelectric micropumps. The micropumps include a piezo disk (an actuator), a chamber and a set of diffuser and nozzle. Flow in the current micropumps is controlled by a set of diffuser and nozzle, not by a nap valve. The diffuser/nozzle based micropumps are more reliable in operation and are easier in manufacturing than the flap valve based micropumps. The flow rates of the piezoelectric micropumps have been closely analyzed with a numerical calculation. It has been found that the positions of the inlet and outlet of the micropump can influence the performance of the diffuser/nozzle based piezoelectric micropumps. This study may provide fundamental understanding for the design and analysis of the piezoelectric micropumps.

Keywords

References

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