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RF-PECVD로 성장시킨 $a-Si_{1-x}C_x:H$ 박막의 증착조건에 따른 광학적 특성 분석

  • 박문기;김용탁;홍병유
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.76-76
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    • 2000
  • 최근 비정질 SiC 박막은 열과 광안정도면에서 비정질 Si 박막에 비해 우수하며 공정변수들을조절함으로써 비교적 쉽고 다양하게 광학적.전기적 특성을 얻을 수 있고, 낮은 광흡수계수 및 105($\Omega$cm)1 이상의 높은 전도도를 가지고 있어 Plasma Enhanced Chemical Vapor Deposition(PECVD)을 통해 가전자제어 (Valency electron control)가 가능한 비정질 SiC 박막이 제작된 이래 대한 많은 연구가 진행되고 있다. 결정성이 없는 비정질 물질은 상대적으로 낮은 온도에서 성장이 가능하며, 특히 glow-sidcharge 방식으로 저온에서 성장시킬 수 있음에 따라 유리등과 같은 다른 저렴한 물질을 기판으로 이용, 넓은 면적의 비정질 SiC 박막을 성장시켜 여러 분야의 소자에 응용되고 있다. 비정질 SiC 박막이 넓은 에너지띠 간격을 갖는 물질이라는 점과 화학적 안정성 및 높은 경도, 비정질성에 기인한 대면적 성장의 용이성 등의 장점이외에, 원자의 성분비 변화에 의해 에너지띠 간격(1.7~3.1eV)을 조절할 수 있다는 점은 광전소자의 응용에 큰 잠재성이 있음을 나타낸다. PECVD 방식으로 성장된 비정질 SiC 박막은 태양전지의 Window층이나 발광다이오드, 광센서, 광트랜지스터 등에 응용되어 오고 있다. 본 연구에서는, RF-PECVD(ULVAC CPD-6018) 방법에 의하여 비정질 Si1-xCx 박막을 2.73Torr의 고정된 압력에서 RF 전력(50~300W), 증착온도(150~30$0^{\circ}C$), 주입 가스량 (SiH4:CH4)등의 조건을 다양하게 변화시켜가며 증착된 막의 특성을 평가하였다. 성장된 박막을 X-ray Photoelectron Spectroscopy(XPS), UV-VIS spectrophotometer, Ellipsometry, Atomic Force Microscopy(AFM)등을 이용하여 광학적 밴드갭, 광흡수 계수, Tauc Plot, 그리고 파장대별 빛의 투과도의 변화를 분석하였으며 각 변수가 변화함에 따라 광학적 밴드갭의 변화를 정량적으로 조사함으로써 분자결합상태와 밴드갭과 광 흡수 계수간의상관관계를 규명하였고, 각 변수에 따른 표면의 조도를 확인하였다. 비정질 Si1-xCx 박막을 증착하여 특성을 분석한 결과 성장된 박막의 성장률은 Carbonfid의 증가에 따라 다른 성장특성을 보였고, Silcne(SiH4) 가스량의 감소와 함께 박막의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다.

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A Study on the Thermal Flow of Waste Heat Recovery Unit (WHRU) for Ship's Organic Rankine Cycle Power Generation System using CFD Method (CFD를 활용한 선박고온도차발전용 WHRU의 열유동 해석에 관한 연구)

  • Whang, Dae-jung;Park, Sang-kyun;Jee, Jae-hoon;Bang, Eun-shin;Oh, Cheol
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.27 no.5
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    • pp.647-655
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    • 2021
  • The IMO (International Maritime Organization) is discussing the improvement of energy ef iciency of ships in order to reduce greenhouse gas emissions from ships. Currently, by applying an ORC power generation system using waste heat generated from ships, high energy conversion efficiency can be expected from ships. This technology uses an organic medium based on Freon or hydrocarbons as the working fluid, which evaporates at a lower temperature range than water. Through this, it is possible to generate steam (gas) and generate power at a low and low temperature relatively. In this study, the analysis of heat flow between the refrigerant and waste heat in the ORC power generation system, which is an organic Rankine cycle, is analyzed using 3D simulation techniques to determine the temperature change, velocity change, pressure change, and mass change of the fluid flowing of the WHRU (Waste Heat Recovery Unit) inside and the outside the structure. The purpose of this study is to analyze how the mass change affects the structure, and this study analyzed the heat transfer of the heat exchanger from the refrigerant and the exhaust gas of the ship's main engine in the ORC power generation system using this technique.

A Security Nonce Generation Algorithm Scheme Research for Improving Data Reliability and Anomaly Pattern Detection of Smart City Platform Data Management (스마트시티 플랫폼 데이터 운영의 이상패턴 탐지 및 데이터 신뢰성 향상을 위한 보안 난수 생성 알고리즘 방안 연구)

  • Lee, Jaekwan;Shin, Jinho;Joo, Yongjae;Noh, Jaekoo;Kim, Jae Do;Kim, Yongjoon;Jung, Namjoon
    • KEPCO Journal on Electric Power and Energy
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    • v.4 no.2
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    • pp.75-80
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    • 2018
  • The smart city is developing an energy system efficiently through a common management of the city resource for the growth and a low carbon social. However, the smart city doesn't counter a verification effectively about a anomaly pattern detection when existing security technology (authentication, integrity, confidentiality) is used by fixed security key and key deodorization according to generated big data. This paper is proposed the "security nonce generation based on security nonce generation" for anomaly pattern detection of the adversary and a safety of the key is high through the key generation of the KDC (Key Distribution Center; KDC) for improvement. The proposed scheme distributes the generated security nonce and authentication keys to each facilities system by the KDC. This proposed scheme can be enhanced to the security by doing the external pattern detection and changed new security key through distributed security nonce with keys. Therefore, this paper can do improving the security and a responsibility of the smart city platform management data through the anomaly pattern detection and the safety of the keys.

A Study on the Buckling Stability due to Lateral Impact of Gas Pipe Installed on the Sea-bed (해저면에 설치된 가스관의 외부충격에 의한 좌굴 안전성 검토)

  • Park, Joo-Shin;Yi, Myung-Su
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.28 no.2
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    • pp.414-421
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    • 2022
  • Subsea oil and gas exploration is increasingly moving into deeper water depths, and typically, subsea pipelines operate under high pressure and temperature conditions. Owing to the difference in these components, the axial force in the pipe is accumulated. When a pipeline is operated at a high internal pressure and temperature, it will attempt to expand and contract for differential temperature changes. Typically, the line is not free to move because of the plane strain constraints in the longitudinal direction and soil friction effects. For a positive differential temperature, it will be subjected to an axial compressive load, and when this load reaches a certain critical value, the pipe may experience vertical (upheaval buckling) or lateral (snaking buckling) movements that can jeopardize the structural integrity of the pipeline. In these circumstances, the pipeline behavior should be evaluated to ensure the pipeline structural integrity during operation in those demanding loading conditions. Performing this analysis, the correct mitigation measures for thermal buckling can be considered either by accepting bar buckling but preventing the development of excessive bending moment or by preventing any occurrence of bending.

Effect of Mechanical Thermal Massage Inducing Gradual Spinal Segmentation on the Improvement of Pain (단계적 척추 분절운동을 유도하는 기계식 온열 마사지가 통증 개선에 미치는 영향)

  • Hyeun-Woo, Choi;Do-Hyun, Ahn;Kyung-Mi, Jung;Na-Young, Kim;Ji-Eun, Lee;Jong-Min, Lee
    • Journal of the Korean Society of Radiology
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    • v.16 no.7
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    • pp.879-887
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    • 2022
  • In this study, we tried to confirm whether the mechanical sequential elevation method of the body pressure measuring bed actually induces segmental motion for each part of the spine. To this end, a lateral X-ray examination was performed, and it was confirmed that the sequential pressure device induces a step-wise segmentation of the spine by mechanically lifting each part of the spine vertically. Then, pain, walking ability, and depression scale were measured and analyzed in subjects who were aware of back pain. VAS(p<0.05) and ODI(p<0.05) for 10 days tended to decrease in average after bed use. In the gait ability test(p<0.05), as the number of times of bed use increased, the moving time in the test decreased and the moving distance increased. In addition, GSDDF(p<0.05) decreased after bed use. As a result, it was confirmed that the spinal segmentation caused by the heat and acupressure provided by the bed affected gait and depression as well as pain relief.

Effect of Vertically Rising Pressure Providing Spinal Canal Segment Motion on Symptom Relief in Patients with Parkinson's Disease (척추관 분절운동을 제공하는 수직 상승 압력이 파킨슨병 환자의 증상 완화에 미치는 영향)

  • Do-Hyun, Ahn;Hyeun-Woo, Choi;Kyung-Mi, Jung;Na-Young, Kim;Jong-Min, Lee
    • Journal of the Korean Society of Radiology
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    • v.16 no.6
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    • pp.787-797
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    • 2022
  • The purpose of this study was to confirm the reduction of pain and symptom relief of Parkinson's disease by vertically stimulating the spine through the application of a mechanical bed capable of thermal and massage stimulation. For this purpose, after confirming the segmental motion of the spine due to the use of a medical combination stimulation bed for Parkinson's disease patients, VAS, ODI, gait ability, and spiral drawing tests were performed, and the relationship between the variables was identified. In the 10-day visual analog scale and evaluation of low back pain dysfunction, the average trend of decreasing after bed use was confirmed. For walking ability, a decrease in the moving time and an increase in the moving distance were observed. In the spiral drawing test, the mean test time after using bed was significantly lower than before. As a result, it suggested the possibility of using it as an auxiliary method for recovery and pain relief of Parkinson's disease patients due to spinal segmental movement with mechanical heating and massage. However, this study is a preliminary study, and there is a small number of subjects, so additional research is needed that considers the number and condition of future subjects in detail.

Seismic Impact Analysis of Buried Citygas Pipes through Structural Analysis (구조해석을 통한 도시가스 매설배관의 지진 영향 분석)

  • Yoon Ho Jo;Maria Choi;Ju An Yang;Sang Il Jeon;Ji Hoon Jeon
    • Journal of the Korean Institute of Gas
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    • v.27 no.4
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    • pp.19-26
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    • 2023
  • Earthquakes are one of the most important disasters affecting underground structures. Urban gas underground pipes may cause safety problems of structures in the event of an earthquake. Since Korea began digital observation, the number of earthquakes has been steadily increasing. The seismic design standard for urban gas pipes was established in 2008, but it is difficult to estimate the impact of pipes in the event of an earthquake based on the installation of pipes. In this study, structural analysis was performed on PE (polyethylene pipe) pipes and PLP (polyethylene coated steel pipe) pipes, which are mainly used as buried pipes in Korea, according to environmental and pipe variables in the event of an earthquake. This study sought to find the variables of the most vulnerable buried pipe by modeling pipes through Computer Aided Engineering (CAE) and generating displacement on the ground. Through this study, it was confirmed that the larger the elastic modulus of the soil, the deeper the buried depth, the smaller the tube diameter, and the higher the pressure, the more PLP pipes are affected by earthquakes than PE. Based on these results, the vulnerable points of buried urban gas pipes are inferred and used for special inspections of buried pipes in the event of an earthquake.

Imaging of Sequestered Lumbar Discs (요추 분리추간판의 영상 소견)

  • Gangwon Jeong;Heecheol Park;Sun Joo Lee;Dae-Hyun Park;Sung Hwa Paeng;Eugene Lee
    • Journal of the Korean Society of Radiology
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    • v.85 no.1
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    • pp.3-23
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    • 2024
  • Intervertebral disc herniation is frequently encountered in radiological practice. Sequestered disc herniation occurs when the disc material undergoes degeneration and completely loses continuity with the parent nucleus pulposus. Sequestered discs can reside within and outside the spinal canal, exerting a mass effect on adjacent structures, compressing nerve pathways, and eliciting a range of clinical symptoms. In particular, sequestered discs within the dura cannot be identified without durotomy. Therefore, precise preoperative localization is crucial for surgical planning. On MRI, the signal intensity of the sequestered disc may vary due to independent degeneration processes. Additionally, most sequestered disc fragments show varying degrees of peripheral enhancement depending on the degree of angiogenesis and granulation around the isolated tissue. In this article, we review various imaging findings and the location of the sequestered disc to provide patients with an accurate diagnosis and appropriate treatment direction.

Mitral Valvuloplasty using New Mitral Strip (Mitracon^{(R)}$) (새로운 Strip (Mitracon^{(R)}$)을 이용한 승모판막 성형술)

  • Kang, Seong-Sik;Kim, Sang-Pil;Song, Meong-Gum
    • Journal of Chest Surgery
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    • v.41 no.3
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    • pp.320-328
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    • 2008
  • Background: Numerous surgical devices for mitral repair have been used in the past with good results. In this study we describe a simple annuloplasty technique with using a new device ($Mitracon^{(R)}$). The aim of this study was to assess its efficacy and surgical results with using $Mitracon^{(R)}$. Material and Method: From May 2003 to October 2005, 46 patients (21 women and 25 men (mean age of $51.4{\pm}17.8$ years) with mitral regurgitation from various causes were treated with either the $Mitracon^{(R)}$ (the $Mitracon^{(R)}$ group) or the Capentier Edward rigid ring (the CE group). The median follow-up duration was 18.9 months. Result: The mean grade of mitral regurgitation before and immediately after surgery in the $Mitracon^{(R)}$ group and the CE group decreased from $3.2{\pm}0.8$ to $0.6{\pm}0.7$ and $3.4{\pm}0.7$ to $0.3{\pm}0.5$, respectively. There were no significant changes in the ejection fraction either between the two groups or before and immediately after surgery. No deaths were seen in either group. Early postoperative echocardiography of all 46 patients showed only trivial mitral regurgitation or none at all. Echocardiography at a median of 18.9 months also showed no progression in mitral regurgitation. The mean grade of mitral regurgitation in the $Mitracon^{(R)}$ group at this time point decreased from $3.2{\pm}0.8$ to $0.8{\pm}0.7$ (p<0.05). The CE group also showed a similar degree of decrease from $3.4{\pm}0.7$ to $0.3{\pm}0.6$ (p<0.05). The mitral valve area in the $Mitracon^{(R)}$ group at 1 year follow-up was $3.3{\pm}0.9cm^2$. The mitral valve area in the CE group was $2.7{\pm}0.6cm^2$. The mean mitral pressure gradient in the $Mitracon^{(R)}$ group at 1 year follow-up was $3.1{\pm}1.3$ mmHg. The mean pressure gradient in the CE group was $4.5{\pm}2.1$ mmHg, although any statistical significant difference for this between the groups was not reached. Conclusion: The present study showed the described technique to be safe and effective in the intermediate term. Because long term results are unavailable, a more extensive prospective randomized multicenter trial may be warranted to determine whether this procedure should be generally applied for repair of mitral valve disease.

Effect of Cooking Methods on Cooked and Antioxidant Characteristics of Cooked Mixed Grain Rice with Added Proso Millet (기장 첨가 잡곡밥의 취반 및 항산화 특성에 미치는 취반방법의 영향)

  • Kim, Mi-Jung;Lee, Kyung Ha;Ko, Jee Yeon;Kim, Hyun-Joo;Lee, Seuk Ki;Park, Hye Young;Sim, Eun-Yeong;Cho, Dong-Hwa;Oh, Sea Kwan;Woo, Koan Sik
    • The Korean Journal of Food And Nutrition
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    • v.30 no.2
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    • pp.218-225
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    • 2017
  • This study was carried out to compare the cooked and antioxidant characteristics with of cooked mixed grain rice with an addition rate (0, 5, 10, 15 and 20%) of proso millet and various cooking methods. Mixed grain rice with added proso millet was cooked by general and high pressure cooking methods with and without fermented alcohol. All pasting characteristics, except for breakdown viscosity, decreased with increasing the amounts of proso millet. Water binding capacity and swelling power significantly decreased when increasing the amounts of proso millet, however the water solubility index significantly increased. The palatability characteristics of rice with added proso millet showed similar results to rice without proso millet. Total polyphenol contents of rice with 20% proso millet and fermented alcohol added, cooked by general and high pressure cooking methods, were $184.33{\pm}2.69$ and $179.80{\pm}5.22{\mu}g\;GAE/g$, respectively. Total flavonoid contents increased as amounts of proso millet increased. DPPH radical scavenging activities with and without proso millet added were 4.20~7.50 and 2.97~5.19 mg TE/100 g, respectively. ABTS radical scavenging activities with and without proso millet added were 14.36~27.92 and 14.07~15.83 mg TE/100 g, respectively. In this study, cooked and antioxidant characteristics of cooked mixed grain rice with added proso millet were expected to be used as basic data for manufactured processed products.