• Title/Summary/Keyword: 실리콘유

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반도체 나노구조 제작 및 광전자 소자 응용

  • Yu, Jae-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.65.2-65.2
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    • 2013
  • 발광다이오드, 태양전지, 광센서, 바이오센서, 나노발전기 등을 포함한 여러 종류의 광전자 소자들의 성능을 향상시키기 위한 새로운 기술적 시도들이 제안되어 왔다. 반도체기반 나노구조는 넓은 표면적과 독특한 특성을 가지고 다양한 기능성의 부여가 용이하며, 주로 나노패턴형성 및 식각에 의한 top-down 방법과 성장/합성에 의한 bottom-up 방법들에 의해 제작되어 왔다. 최근, 단순성, 저비용 공정을 바탕으로 소자 표면상에 나노구조를 형성하여 성능을 개선하기 위한 연구가 활발히 이루어지고 있다. 또한 다층박막을 통한 무반사 코팅을 대체할 수 있는 moth-eye 효과를 이용한 생체모방형 서브파장 무반사 나노구조에 대한 관심이 증가하고 있다. 본 발표에서는 실리콘, 화합물, 산화물을 포함한 반도체 나노구조들의 설계 및 제작을 통해 구조적, 광학적 특성을 측정, 분석하고 이들의 다양한 광전자소자 응용에 대한 연구결과를 발표하고자 한다.

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NKNLTS 비납계 압전체의 도핑원소에 따른 특성평가

  • Lee, Yun-Gi;Park, Eun-Hye;Ryu, Seong-Rim;Gwon, Sun-Yong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.83-83
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    • 2009
  • 우수한 압전성을 가지는 PZT는 인체에 유해한 다량의 PbO을 함유하여 심각한 환경문제를 야기함은 물론 제조 공정 중 PbO 휘발 억제 시설 구비에 따른 경제적 부담 등 문제점이 지적되었다. 따라서 환경오염 및 가격경쟁력을 갖추기 위해 현재 무연 조성 세라믹스에 대한 많은 연구가 진행되고 있다. 최근 비납계 압전 세라믹의 연구는 비스무스 레이어형과 페로브스카이트 형 비납계 세라믹스의 연구가 활발히 진행되고 있다. 특히 $(Na,K)NbO_3$ 계는 페로브스카이트 구조를 가지는 비납계 세라믹으로 현재 많은 연구가 진행되고 있다. 이 물질은 PZT계와 유사하게 상전이(morphotropic phase boundary:MPB)영역을 가지고 있 으며 이 영역에서 높은 압전 특성을 보여주고 있다. 최근 $Na_{0.5}K_{0.5}NbO_3$$LiTaO_3$를 치환하여 우수한 압전 특성을 지니는 조성이 개발되고 있지만, 보통 소성법으로 제조된 세라믹스는 PZT계 세라믹스와 비교하여 특성이 떨어진다. 본 연구에서는 압전성이 우수한 $(Na_{0.44}K_{0.52}Li_{0.44})(Nb_{0.90}Sb_{0.06}Ta_{0.04})O_3$ 조성에 도너 도핑과 억셉터 도핑을 한 다음 전기기계결합계수, 압전상수, 유전상수의 변화를 평가하고, hardener 와 softener 특성이 본조성에서 나타나는지를 관찰하였다. 실험방법은 보통 소성법을 사용하였으며, 분쇄와 혼합은 직경 3 mm zirconia ball을 사용하여 볼밀 하였다. $850^{\circ}C$ 에서 5h 하소 후 $1100{\sim}1200^{\circ}C$ 에서 소결하고, 두께 1 mm로 연마한 다음 silver paste를 $650^{\circ}C$ 에서 소부하여 전극을 형성하였다. 제작된 시편은 $90^{\circ}C$의 실리콘유에서 3~4 kV/mm의 전계를 가해 20분간 분극 처리를 수행하였다. 제작된 시편의 압전전하 상수 값은 d33-meter(APC-8000)를 이용하여 측정하였고, 유전율, 전기기계결합계수 및 기계적품질계수 등은 임피던스 분석기 (impedance/gain phase analyzer)를 이용하여 특성을 측정 하였다. 또한 전압-분극 특성의 평가에는 강유전특성 측정기(ferroelectric tester: Precision-LC, Radiant Technologies, USA)를 이용하였다.

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Optimization of Synthesis Process for Zeolite 4A Using Statistical Experimental Design (통계적 실험계획법을 이용한 제올라이트 4A 합성 최적화)

  • Yun, Mi Hee;Yoo, Kye Sang
    • Applied Chemistry for Engineering
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    • v.28 no.3
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    • pp.286-289
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    • 2017
  • Synthesis of zeolite 4A was carried out to optimize the nanoparticle synthesis process using statistical experimental design method. The zeolite 4A was synthesized by controlling the concentration of the silicon precursor, sodium metasilicate (SMS), and characterized by XRD, SEM and nitrogen adsorption. In particular, the property of zeolite 4A can be determined by XRD analysis. Using the general factor analysis in the design of experiments, we analyzed main effects and interactions according to the reactor, reaction temperature and reaction time. The optimum reaction condition for the synthesis of zeolite 4A crystallinity was using an autoclave for 3 hours at $110^{\circ}C$. Furthermore, the optimal synthesis conditions of zeolite 4A with various crystallinity using Ludox as a silicon precursor were presented of what using both the surface and contour plot.

Fabrication and Characteristics of Pd/Pt Gate MISFET Sensor for Dissolved Hydrogen in Oil (유중 용존수소 감지를 위한 Pd/Pt Gate MISFET 센서의 제조와 그 특성)

  • Baek, Tae-Sung;Lee, Jae-Gon;Choin, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.5 no.4
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    • pp.41-46
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    • 1996
  • The Pd/Pt gate MISFET type hydrogen sensors, for detecting dissolved hydrogen gas in the transformer oil, were fabricated and their characteristics were investigated. These sensors including diffused resister heater and temperature monitoring diode were fabricated on the same chip by a conventional silicon process technique. The differential pair plays a role in minimizing the intrinsic voltage drift of the MISFET. To avoid the drift of the sensors induced by the hydrogen, the gate insulators of both FETs were constructed with double layers of silicon dioxide and silicon nitride. In order to eliminate the blister formation on the surface of the hydrogen sensing gate metal, Pt and Pd double metal layers were deposited on the gate insulator. The hydrogen response of the Pd/Pt gate MISFET suggests that the proposed sensor can detect the dissolved hydrogen in transformer oil with 40mV/10ppm of sensitivity and 0.14mV/day of stability.

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Application of rapid thermal annealing process to the aluminum induced crystallization of amorphous silicon thin film (비정질 실리콘의 부분적 알루미늄 유도 결정화 공정에서의 급속 열처리 적용 가능성)

  • Hwang, Ji-Hyun;Yang, Su-Won;Kim, Young-Kwan
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.29 no.2
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    • pp.50-53
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    • 2019
  • In this study, polycrystalline silicon thin film useful for the solar cells was fabricated by AIC(Aluminum Induced Crystallization) process. A diffusing barrier for this process is prepared with $Al_2O_3$. For the maximization of the grain size of the polycrystalline silicon, a selective blasting of the $Al_2O_3$ diffusing barrier was conducted before annealing treatment. The heat treatment for the activation of the amorphous-Si (a-Si) layer was carried out with Rapid Thermal Annealing (RTA) process. Crystallization of the a-Si layer was analyzed with XRD. It was confirmed that a-Si was crystallized at $500^{\circ}C$ and the silicon crystal is observed to be formed and the grain size of the polycrystalline silicon was observed to be $15.9{\mu}m$.

Processing and quality stability of precooked frozen fish foods : (III) Processing of mackerel based burger (조리냉동식품의 가공 및 저장중 품질안정성 : (III) 고등어버어거의 가공)

  • Lee, Eung-Ho;Kim, Jin-Soo;Ahn, Chang-Bum;Joo, Dong-Sik;Lee, Chung-Suk;Son, Kwang-Tae
    • Applied Biological Chemistry
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    • v.36 no.1
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    • pp.51-57
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    • 1993
  • For the effective untilization of mackerel as a food source, the most desirable processing conditions of mackerel based burger were investigated. The mackerel was beheaded, gutted, washed with tap water and deboned with the meat seperator. Then it was substituted with 15% pig meat and mixed with additives such as 18.3% emulsion curd, 3.0% soybean protein, 2.0% sodium chloride, 2.0% sugar, 0.1% monosodium glutamate, 0.2% polyphosphate, 0.4% sodium bicarbonate, 0.5% beef extract powder, 0.3% onion powder, 0.1% ginger powder and 0.1% garlic powder to a mixed meat. The seasoned mackerel based meat was molded to a thickness of 10 mm and a diameter of 80 mm, fried for 2 min. The examined mackerel based burger was superior to mackerel based burger by another processing conditions.

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A Study on the Characteristics of Chemical Accidents and Reduction of Accidents in Jeollabuk-do (전라북도 내 화학사고 특성분석과 사고 발생 저감을 위한 연구)

  • Jeong, Jae-Uk;Park, Chong-Eun
    • Fire Science and Engineering
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    • v.34 no.2
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    • pp.49-53
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    • 2020
  • This study aimed to identify the characteristics of 40 chemical accidents that occurred in Jeollabuk-do from 2004 to 2019. During this time, there were 2.5 accidents per year on average in the province; their types were classified as spill/leak, fire, explosion, adverse reaction, and complex. There were 34 leaks and six explosions, and they are categorized as follows: 12 by worker error, 16 from facility defects, and 12 by transport vehicle accidents. The substances involved in these accidents were ammonia (15%), sulfuric acid (12.5%), and silicon tetrachloride (7.5%). Notably, the rate of chemical accidents (75%) is the highest during spring and summer. In order to reduce chemical accidents, first, there should be compliance with the relevant laws. Second, the quality of safety education and training of workers should be improved. Finally, valuable government support is also necessary to improve facilities.

Effect of Metal-Induced Lateral Crystallization Boundary Located in the TFT Channel Region on the Leakage Current (박막트랜지스터의 채널 내에 형성된 금속 유도 측면 결정화의 경계가 누설전류에 미치는 영향)

  • Kim, Tae-Gyeong;Kim, Gi-Beom;Yun, Yeo-Geon;Kim, Chang-Hun;Lee, Byeong-Il;Ju, Seung-Gi
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.4
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    • pp.31-37
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    • 2000
  • In the case of metal-induced lateral crystallization (MILC) for low temperature poly-Si TFT, offset length between Ni-thin film and the sides of gate could be modified to control the location of MILC boundary. Electrical characteristics were compared to analyze the effect of MILC boundary that was located either in or out of the channel region of the TFT. By removing the MILC boundary from channel region, on current, subthreshold slope and leakage current properties could be improved. When MILC boundary was located in the channel region, leakage current was reduced with electrical stress biasing. The amount of reduction increased as the channel width increased, but it was independent of the channel length.

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Artificial Vision : Electrical Stimulation of the Visual Cortex (뇌세포의 전기자극에 의한 맹인의 시감각 회복에 관한 연구)

  • Cha, Ki-Chul
    • Proceedings of the KOSOMBE Conference
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    • v.1991 no.05
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    • pp.28-30
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    • 1991
  • A visual prosthesis for the blind based upon electrical stimulation of the visual cortex requires the development of an array of electrodes. To establish design specifications for such an electrode array, we have conducted psychophysical experiments with normally sighted subjects wearing a portable 'phosphene' simulator. The simulator consists of a small video camera, a monitor masked by an opaque perforated film, and optical lenses. The visual angle subtended by the masked monitor is $1.7^{\circ}$ or less. We measured visual acuity and reading rate as a function of the number of pixels and their spacing. Our results indicate that a phosphene image produced by 600 electrodes implanted in a $1\;cm^2$, area near the foveal projection on the visual cortex should provide a limited but useful visual sense for the profoundly blind.

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Dynamic Characteristics of Multi-Channel Metal-Induced Unilaterally Precrystallized Polycrystalline Silicon Thin-Film Transistor Devices and Circuits (금속 유도 일측면 선결정화에 의해 제작된 다채널 다결정 실리콘 박막 트랜지스터 소자 및 회로의 전기적 특성 평가)

  • Hwang, Wook-Jung;Kang, Il-Suk;Lim, Sung-Kyu;Kim, Byeong-Il;Yang, Jun-Mo;Ahn, Chi-Won;Hong, Soon-Ku
    • Korean Journal of Materials Research
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    • v.18 no.9
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    • pp.507-510
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    • 2008
  • Electrical properties of multi-channel metal-induced unilaterally precrystallized polycrystalline silicon thin-film transistor (MIUP poly-Si TFT) devices and circuits were investigated. Although their structure was integrated into small area, reducing annealing process time for fuller crystallization than that of conventional crystal filtered MIUP poly-Si TFTs, the multi-channel MIUP poly-Si TFTs showed the effect of crystal filtering. The multi-channel MIUP poly-Si TFTs showed a higher carrier mobility of more than 1.5 times that of the conventional MIUP poly-Si TFTs. Moreover, PMOS inverters consisting of the multi-channel MIUP poly-Si TFTs showed high dynamic performance compared with inverters consisting of the conventional MIUP poly-Si TFTs.