• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.247-251
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• 2004

반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

• Membrane Journal
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• v.15 no.2
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• pp.147-156
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• 2005

It is well-known that polyethersulfone (PES) has high $CO_2$ selectivity over $N_2\;(or\;CH_4)$ and excellent pressure resistance of $CO_2$ plasticization among muy commercialized engineering plastics[1-4]. Asymmetric PES hollow fiber membranes for flue gas separation were developed by dry-wet spinning technique. The dope solution consists of PES, NMP and acetone. Water and water/NMP mixtures are used in outer and inner coagulants, respectively. Gas permeation rate (i.e., permeance) and $CO_2/N_2$ selectivity were measured with pure gas, respectively and the micro-structure of hollow fiber membranes was characterized by scanning electron microscopy. The effects of polymer concentration, ratio of NMP to acetone, length of air gap, evaporation condition and silicone coating were investigated on the $CO_2/N_2$ separation properties of the hollow fibers. Optimized PES hollow fiber membranes exhibited high permeance of $25\~50$ GPU and $CO_2/N_2$ selectivity of $30\~40$ at room temperature and have the apparent skin layer thickness of about $0.1\;{\mu}m$. The developed PES hollow fiber membranes, would be a good candidate suitable for the flue gas separation process.

• Composites Research
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• v.35 no.2
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• pp.115-119
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• 2022

The performance of carbon fiber is important for the production of these high-quality polymer composite materials such as CFRP (Carbon Fiber Reinforced Plastic). For this purpose, it is essential to use an optimized spinning process for improving the mechanical, physical, and structural properties of the precursor fiber, which greatly affects the properties of the carbon fiber, and the use of a suitable precursor polymer. In this study, the content of MAA (Methacrylic Acid), MAA injection time, and concentration of AIBN (2,2'-Azobis(2-methylpropionitrile)) were set as parameters for the polymer synthesis process, and Poly(AN-co-MAA) (poly(acrylonitrile-co-methacrylic acid)) was polymerized by solution polymerization. Poly(AN-co-MAA) with a molecular weight of 305,138 g/mol and an MAA ratio of 4.2% was dissolved in DMF (N,N-dimethylformamide) at a concentration of 16.0 wt%, and then a precursor fiber was prepared through dry-jet-wet spinning. The precursor fiber had a tensile strength of ~1.06 GPa and a tensile modulus of ~22.01 GPa, and no voids and structural defects were observed on the fiber.

• Economic and Environmental Geology
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• v.50 no.5
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• pp.341-352
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• 2017

Along with Cs-137 (half-life: 30.17 years), Sr-90 (half-life: 28.8 years) is one of the most important environmental monitoring radioactive elements. Rapid and easy monitoring method for Sr-90 using Laser-Induced Breakdown Spectroscopy (LIBS) has been studied. Strontium belongs to a bivalent alkaline earth metal such as calcium and has similar electron arrangement and size. Due to these similar chemical properties, it can easily enter into the human body through the food chain via water, soil, and crops when leaked into the environment. In addition, it is immersed into the bone at the case of human influx and causes the toxicity for a long time (biological half-life: about 50 years). It is a very reductive and related with the specific reaction that makes wet analysis difficult. In particular, radioactive strontium should be monitored by nuclear power plants but it is very difficult to be analysed from high-cost problems as well as low accuracy of analysis due to complicated analysis procedures, expensive analysis equipment, and a pretreatment process of using massive chemicals. Therefore, we introduce the Laser-Induced Breakdown Spectroscopy (LIBS) analysis method that analyzes the elements in the sample using the inherent spectrum by generating plasma on the sample using pulse energy, and it can be analyzed in a few seconds without preprocessing. A variety of analytical plates for samples were developed to improve the analytical sensitivity by optimizing the laser, wavelength, and time resolution. This can be effectively applied to real-time monitoring of radioactive wastewater discharged from a nuclear power plant, and furthermore, it can be applied as an emergency monitoring means such as possible future accidents at a nuclear power plants.

• Polymer(Korea)
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• v.25 no.6
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• pp.765-773
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• 2001

In In order to remove harmful trace elements such as $Co^{2+}$, $Ni^{2+}$ , $Cr_2O_7\;^{2-}$ from water, we synthesized AN-co-(MMA/IA) according to various mole ratio of monomers and spun by wet-spinning. And multi-functional PAN ion exchangers were prepared by hydrolysis. We observed structure, degree of functionalization, ion exchange capacity, distribution coefficient and mechanical properties for ion exchanger. Anion exchange capacity decreased in 4.5 ~ 4.2 meq/g with increasing of IA content and cation exchange capacity increased in 1.8 ~ 2.2 meq/g. Tensile strength of the ion exchanger increased up to 0.008 mol% IA content and appeared maximum value by 216$kg/cm^2$Distribution coefficient for AN-co-(MMA/IA) ion exchanger appeared maximum value for Co(II), Ni(II) in pH 5-6 range and for Cr(III) in pH 3-4 range. And the adsorption capacity was in the order of Cr(III) > Co(II) > Ni(II) for multicomponent in continuous process.

• Composites Research
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• v.29 no.4
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• pp.161-166
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• 2016

Carbon nanotube buckypaper (CNTs-BP)/thermoplastic polyurethane (PU) elastomer composites were successfully fabricated. The CNTs-BP/PU nanocomposites exhibited simultaneous improvements in both tensile modulus and strength by 1360 and 430%, respectively, as compared to pure PU. Possible reinforcing mechanisms were evidenced by SEM analyses and tensile tests. The CNTs-BP/PU nanocomposites can be potentially used as an inter-reinforcing agent in ultra-lightweight, high-strength aircraft, carbon-fiber-reinforced plastics, etc.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1999.10a
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• pp.105-105
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• 1999

핵연료 피복관은 핵연료에서 방사성 핵분열생성물의 방출을 저지하는 가장 뚱요한 방어막인데, 현재 지르칼로이 4가 피복관의 재료로 사용되고 있다. 사용후 핵연료는 원자력발전소내 습식 저장조에 저장되고 있으나, 지속적인 관리와 장소확보의 용이 성으로 인해 건식 저장조를 사용하는 추세에 있다. 본 연구에선 건식 저장조에 장 기간 저장되는 핵연료 피복관에 주변 환경으로부터 오염될 수 있는 소금기나 기름 등이 지르칼로이의 공기중 산화에 미치는 영향의 존재를 밝히려 한다. 현재 고리 원자력발전소에서 사용중인 핵연료 피복관을 1cm정도 높이로 자르고, 피복관 표면 을 ASTM -G2-88 방법으로 처리한 후 산화실험을 수행하였다. 산화정도는 간헐적 (intermittent) 방법을 사용하여 시편의 무게를 측정하여 구하였으며, 산화온도는 $400-500^{\circ}C$로 하였다. 소금이 흡착이 된 경우, 산화 속도는 흡착이 안된 시편보다 가속되었으며, 거의 이차법칙을 따르고 있다. 산화막 위의 흡착물의 영향을 알아보기 위해, 지르칼로이를 $500^{\circ}C$ 수증기에 $5g/m^2$ 두께로 산화시킨 후, 다시 산화실험을 수행하였다. 사용한 흡착물은 LiF, NaF, KF, NaCI 이다. 흡착물들은 산화를 대체로 가속시켰으며, NaF, KF, NaCI 순으로 그 영향력이 컸다. 그러나, LiF는 산화에 전혀 영향을 미치지 않았다. SIMS를 사용하여 각 시편의 두께에 따른 흡착물의 분포 를 알아보았다. 음이온(CI, F)과 양이온(Na, Li, K)이 산화막과 금속 경계면까지 관 찰되었으며, 음이온과 양이온의 분포는 대게 동일하였다. LiF의 경우 산화막에서 이들의 농도가 급격히 떨어지고 있음을 알 수 있었다. 산화막 내에서 이들 흡착물의 확산이 산화속도 가속의 원인이며 이들 흡착물중 CI과 F는 산화막과 금속 겸계면 에서 새로 생성되는 산화막의 강도에 영향을 미쳐, 일찍 미세균열을 만들기 시작하여 산화를 가속시키는 것으로 판단된다.

• Textile Coloration and Finishing
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• v.34 no.1
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• pp.27-37
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• 2022

In this study, a study and interpretation of the spinning process in copolymerized aramid spinning was conducted. In order to proceed with the spinning process modeling and analysis, the spinning process was modeled through the physical property modeling of the spinning solution and the structural modeling of the spinneret, and structural stability and flow of the spinneret for this spinning were analyzed. After modeling the spinning solution and the spinneret in a virtual space, the pack pressure and flow rate when the spinning solution was discharged were simulated. Macroscopically, the structural stability of the spinneret was confirmed at the standard pack pressure (100 kg·f/cm²), and microscopically, the flow rate and pressure drop data of the spinning solution according to the L/D(Length (L)/Diameter (D)) value were analyzed. Based on the research and development of virtual engineering modeling and analysis, we present the possibility of changing the shape and mechanical properties of copolymer aramid fibers according to the spinning process.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.5 no.3
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• pp.179-188
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• 2007

In this work $^{14}C\;and\;^3H$ distribution characteristics of spent resins from nuclear power plants(NPPs), pressurized water reactors(PWRs), was investigated. It was found that the recovery percent of $^{14}C$ by the wet oxidation-acid stripping was $81%{\sim}100%$ for the added activity range of $^{14}C,\;0.72\;Bq{\sim}460\;Bq$, and it was not affected by the kinds of stripping acids, 3N-HCl, $3\;N-HNO_3\;and\;3\;N-H_2SO_4$. And the recovery percent of $^3H$ by distillation using the same apparatus was $81%{\sim}101%$ for the added activity range of $^3H,\;0.60\;Bq{\sim}435\;Bq$. Among the tested stripping acids, 3\;N-HCl, $3\;N-HNO_3\;and\;3\;N-H_2SO_4$, only the trapped $^3H$ solution by distillation in $3\;N-H_2SO_4$ was compatible with the 3H scintillator, Ultimagold XR. Neither of the $^{14}C\;and\;^3H$ trapping solutions from the spent ion exchange resin samples by the wet oxidation-3 $N-H_2SO_4$ stripping contained gamma nuclides. However, some gamma nuclides, $^{60}Co,\;^{134}Cs,\;^{137}Cs\;and\;^{54}Mn$, were found in the trapped $^3H$ solutions of the spent resins by the wet oxidation-3 N-HCl stripping. It was the same for the $^3H$ trapping solutions of the spent resins by Sample Oxidizer(PACKARD MODEL 307). Meanwhile only two nuclides, $^{134}Cs,\;and\;^{134}Cs$, were found in the $^{14}C$ trapping solutions of the spent resins by Sample Oxidizer(PACKARD MODEL 307). It was found that most of the $^{14}C$ in the spent resins existed as inorganic carbon form, more than about 70% of the total $^{14}C$ content. Among the analyzed 30 spent ion exchange resin samples, the average concentration of $^{14}C$ and $^3C$ for the high radioactive samples, 8 samples, was $19000\;Bq/g{\pm}41000\;Bq/g,\;670\;Bq/g{\pm}460\;Bq/g$ and that for the low radioactive samples, 22 samples, was $4.2\;Bq/g{\pm}4.3\;Bq/g,\;6.0\;Bq/g{\pm}5.3\;Bq/g$, respectively. And the average $^{14}C/^3H$ ratio for the high radioactive samples, was higher, 28, than that of low radioactive samples, 0.70. Some linear relationship trend was found between the activity concentrations of $^{14}C\;and\;^3H$.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.2 no.2
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• pp.125-133
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• 2004

Fission products of DUPIC (Direct Use of Spent PWR Fuel in CANDU Reactors) fuel, irradiated in HANARO research reactor with 61 ㎾/m of maximum linear power and 1,770 ㎿d/tU of average burn-up, was characterized by EPMA(Electron Probe Micro Analyzer). In order to find accurate characterization, the analysis results by EPMA of fresh simulated DUPIC fuel containing fission products as chemicals were compared with that of wet chemical analysis. The metallic precipitates observed at the center of the fresh simulated DUPIC fuel were about 1 $\mu\textrm{m}$ in size and their major components by EPMA were Mo-53.89 at.%, Ru-37.40 at.%, and Pd+Rh-8.71 at.%. Established procedure through the fresh simulated DUPIC fuel was applied to the irradiated DUPIC fuel. Observed size of metallic precipitates were 2∼2.5 $\mu\textrm{m}$ and their compositions were Mo-47.34 at.%, Ru-46 at.%, and Pd+Rh-6.65 at.%. What are uncommon things for this experiment, special treatment for improving the conductivity was attempted to the specimen and the conditions of exact irradiation of electron beam to small metallic precipitate were suggested.