• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.4
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• pp.313-320
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• 2005

Stick-slip friction is one of the material removal mechanisms in tribology. It occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction monitoring of chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. In this paper, an attempt to show the similarity between stick-slip friction and the friction of CMP was conducted. The prepared hard pa(IC1000/Suba400 stacked/sup TM/) and soft pad(Suba400/sup TM/) were tested with SiO₂ slurry. The friction force was measured by piezoelectric sensor. According to this experiment, it was shown that as the head and table velocity became faster, the stick-slip time shortened because of the change of real contact area. And, the gradient of stick-slip period as a function of head and table speed in soft pad was more precipitous than that of hard one. From these results, it seems that the fluctuating friction force in CMP is stick-slip friction caused by viscoelastic behavior of the pad and the change of real contact area.

• Tribology and Lubricants
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• v.21 no.1
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• pp.33-38
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• 2005

Fretting is the oscillatory motion with very small amplitudes, which usually occurs between two solid surfaces in contact. Fretting wear is the removal of material from contacting surfaces through fretting action. Fretting wear of steam generator tubes in nuclear power plant becomes a serious problem in recent years. The materials for the tubes usually are Inconel 690 (I-690) and Inconel 600 (I-600). In this paper, fretting wear tests for I-690 and I-600 were performed under various applied loads in water at room temperature. Results showed that the fretting wear loss of I-690 and I-600 tubes was largely influenced by stick-slip. The fretting wear mechanisms were the abrasive wear in slip regime and the delamination wear in stick regime. Also, I-690 had somewhat better wear resistance than I-600.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.04a
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• pp.214-215
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• 2009

The friction is inevitable and unpredictable phenomena, so most mechanical systems are designed to low friction effect by using bearings and lubricants. However, the slip-stick actuator applies the friction force to its movement. The slip-stick mechanism is applied the piezoelectric actuator to overcome short displacement. Fast response of piezoelectric actuator is also good characteristic for the slip-stick mechanism. However, the piezoelectric actuator with slip-stick mechanism isn't common, because its cost and driving voltage are too high. In this paper, a voice-coil actuator with slip-stick mechanism is introduced. The cost and the driving voltage of a voice-coil actuator are much less than the piezoelectric actuator. And a dynamic vibration amplifier is proposed to adjust the dynamic performance of the actuator. By the results of numerical analysis, the feasibility of a dynamic vibration amplifier is verified.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.5
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• pp.1419-1425
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• 1996

In this work, a precies actuator which is capable of high positioning accuracy is developed. For estimation the dynamic behavior of the actuator, system modeling is performed by employing a stick-slip frection law. Dynamic characteristics over various types of driving input signals and vibraiton loci of the driving tip are examined by experiments. Phase differences between the input signals are applied, and the dynamic behavior of slider is investigated. From the simulation and experimental results, it is observed that the dynamic behaviors from the simulation results agree fairly well to those of the experimental results. Thisindicates that the model developed in this work is applicable to other precision mechanisms in which a friction farce is as improtant factor for actuation.

• Tribology and Lubricants
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• v.34 no.3
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• pp.115-122
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• 2018

Chemical mechanical polishing (CMP) is a hybrid processing method in which the surface of a wafer is planarized by chemical and mechanical material removal. Since mechanical material removal in CMP is caused by the rolling or sliding of abrasive particles, interfacial friction during processing greatly influences the CMP results. In this paper, the trend of tribology research on CMP process is discussed. First, various friction force monitoring methods are introduced, and three elements in the CMP tribo-system are defined based on the material removal mechanism of the CMP process. Tribological studies on the CMP process include studies of interfacial friction due to changes in consumables such as slurry and polishing pad, modeling of material removal rate using contact mechanics, and stick-slip friction and scratches. The real area of contact (RCA) between the polishing pad and wafer also has a significant influence on the polishing result in the CMP process, and many researchers have studied RCA control and prediction. Despite the fact that the CMP process is a hybrid process using chemical reactions and mechanical material removal, tribological studies to date have yet to clarify the effects of chemical reactions on interfacial friction. In addition, it is necessary to clarify the relationship between the interface friction phenomenon and physical surface defects in CMP, and the cause of their occurrence.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.13 no.12
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• pp.903-910
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• 2003

A two-degree-of-freedom model is suggested to describe basic dynamical behaviors of the interaction between the pad and the disc of a disc brake system. Although a pad (and a disc) has many modes of vibration in practice, only one mode of each component Is considered. In this paper, a linear analysis is performed by means of the stability analysis to show various conditions for the system to become unstable, and is based on the assumption that the existence of limit cycle (this corresponds to an unstable equilibrium point inside the limit cycle) represents the squeal state of the disc brake system. The results of the stability analysis show that the damping of the disc is as much Important as that of the pad, whereas the damping of the pad only is considered In most practical situations.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.89-96
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• 2002

A two-degree of freedom model is suggested to understand the basic dynamical behaviors of the interaction between two masses of the friction induced vibration system. The two masses may be considered as the pad and the disk of the brake, The phase space analysis is performed to understand complicated dynamics of the non-linear model. Attractors in the phase space are examined for various conditions of the parameters of the model especially by emphasizing on the damping parameters. In certain conditions, the attractor becomes a limit cycle showing the stick-slip phenomena. In this paper, not only the existence of the limit cycle but also the size of the limit cycle is examined to demonstrate the non-linear dynamics that leads the unstable state. For the two different cases of the system frequency ((1)two masses with same natural frequencies, (2) with different natural frequencies), the propensity of limit cycle is discussed in detail. The results show an important fact that it may make the system worse when too much damping is present in the only one part of the masses.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.19 no.1
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• pp.85-93
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• 2009

There are many curves in Seoul subway system. Therefore, the noise from subway system in curved line gives displeasure to passenger. The subway noise in curved line is affected not only by rail condition but also wheel condition and dynamic characteristics. The railway curving noise can be divided into 2 categories. The first is the noise due to stick-slip between wheel tread and rail head, and the second is one by wheel flange contact on rail side. Because of these phenomena - stick-slip and wheel flange contact - wheels are worn seriously. In this study the curving noise was reviewed by using eigen-mode of wheel and waterfall plot which shows noise level in time-frequency domain. And also those were reviewed in viewpoint of stick-slip noise and wheel flange contact noise. Finally, the relationship between curving noise and wheel wear was studied.

• Transactions of the Korean Society of Automotive Engineers
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• v.11 no.5
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• pp.112-118
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• 2003

The friction coefficients of the rubber for clutch master cylinder were experimentally measured in this study. The cylindrical rubber samples for primary cup-seal and secondary cup-seal were tested against the aluminum or the steel plates of master cylinder housing under the various conditions of brake oil temperatures and normal loads. Dry sliding friction coefficients were also measured under various load conditions. The test revealed following results. First, the friction coefficient under fluid lubrication condition in general decreases, as the oil temperature or normal load increases. Second, the steel plate of low surface roughness yielded comparatively low friction coefficient on the range of 0.30∼0.67. On the other hand, the aluminum plate of high surface roughness yielded high friction coefficient on the range of 0.31∼1.15. Third, the friction coefficient of dry surface contact decreases as the normal load increases. This is contrary to the general principle of friction coefficient between metal plates.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.8 s.227
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• pp.1075-1086
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• 2004

In this paper, Time Delay Control(TDC) for robot manipulators is analyzed and its problems are founded. In order to remedy the problems, the enhanced controller is proposed and analyzed. The effect of friction associated with TDC is reported and its cause is presented. Through the analysis, simulation and experiment, it is shown that the friction effect causes serious degradation in control performance and that it is a result of the error of Time Delay Estimation(TDE) in TDC. In order to remedy the problems, TDC combined with Internal Model Control(IMC) concept is proposed. The proposed compensator is effective enough to handle the bad effect of friction, and is so simple and efficient as to match positive attribute of TDC. The simulation and experimental results show the effectiveness of proposed controller against the friction of the robot manipulators.