A Study on the Characteristics of Stick-slip Friction in CMP |
Lee, Hyunseop
(부산대학교 정밀기계공학과)
Park, Boumyoung (부산대학교 정밀기계공학과) Seo, Heondeok (부산대학교 정밀기계공학과) Park, Kihyun (부산대학교 정밀기계공학과) Jeong, Haedo (부산대학교 정밀정형 및 금형가공 연구소) |
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