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http://dx.doi.org/10.4313/JKEM.2005.18.4.313

A Study on the Characteristics of Stick-slip Friction in CMP  

Lee, Hyunseop (부산대학교 정밀기계공학과)
Park, Boumyoung (부산대학교 정밀기계공학과)
Seo, Heondeok (부산대학교 정밀기계공학과)
Park, Kihyun (부산대학교 정밀기계공학과)
Jeong, Haedo (부산대학교 정밀정형 및 금형가공 연구소)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.18, no.4, 2005 , pp. 313-320 More about this Journal
Abstract
Stick-slip friction is one of the material removal mechanisms in tribology. It occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction monitoring of chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. In this paper, an attempt to show the similarity between stick-slip friction and the friction of CMP was conducted. The prepared hard pa(IC1000/Suba400 stacked/sup TM/) and soft pad(Suba400/sup TM/) were tested with SiO₂ slurry. The friction force was measured by piezoelectric sensor. According to this experiment, it was shown that as the head and table velocity became faster, the stick-slip time shortened because of the change of real contact area. And, the gradient of stick-slip period as a function of head and table speed in soft pad was more precipitous than that of hard one. From these results, it seems that the fluctuating friction force in CMP is stick-slip friction caused by viscoelastic behavior of the pad and the change of real contact area.
Keywords
CMP(chemical mechanical polishing); Friction force; Friction force monitoring; Stick-slip; Viscoelastic behavior;
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