• Title/Summary/Keyword: 쇼트키 접합

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Ab-Initio Study of the Schottky Barrier in Two-Dimensional Lateral Heterostructures by Using Strain Engineering (인장변형에 따른 이차원 수평접합 쇼트키 장벽 제일원리 연구)

  • Hwang, Hwihyeon;Lee, Jaekwang
    • New Physics: Sae Mulli
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    • v.68 no.12
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    • pp.1288-1292
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    • 2018
  • Using density functional theory calculations, we study the Schottky barrier (SB) change in a two-dimensional (2D) lateral heterostructure consisting of semiconducting $2H-MoS_2$ and the ferromagnetic metal $2H-VS_2$ by applying a uniaxial tensile strain from 0% to 10%. We find that the SB for holes is much smaller than that for electrons and that SB height decreases monotonically under increasing tensile strain. In particular, we find that a critical strain where the spin-up SB for holes is abruptly reduced to zero exists near a strain of 8%, implying that only the spin-up holes are allowed to flow through the $MoS_2-VS_2$ lateral heterostructure. Our results provide fundamental information and can be utilized to guide the design of 2D lateral heterostructure-based novel rectifying devices by using strain engineering.

Suppression of the leakage current of a Ni/Au Schottky barrier diode fabricated on AlGaN/GaN hetero-structure by oxidation (Ni/Au 쇼트키 접합의 산화를 통해, AlGaN/GaN heterostructure 웨이퍼 위에 제작한 쇼트키 장벽 다이오드의 누설전류 억제)

  • Lim, Ji-Yong;Lee, Seung-Chul;Ha, Min-Woo;Han, Min-Koo
    • Proceedings of the KIEE Conference
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    • 2005.11a
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    • pp.3-5
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    • 2005
  • Ni/Au 쇼트키 접합의 산화를 통해 항복전압이 증가하고 누설 전류가 감소한 수평방향 GaN 쇼트키 장벽 다이오드를 제작하였다. 산화 과정 후, 턴-온 전압이 미세하게 증가하였으며 높은 애노드 전압하에서 애노드 전류가 증가하였다. 5분과 10분의 산화 과정 후, 누설 전류는 1nA 이하 수준으로 현저히 감소하였다. Edge Termination 방법으로 Floating Metal Ring을 사용하고, 산화 과정을 적용하여 제안된 GaN 쇼트키 장벽 다이오드의 항복전압은 750볼트의 큰 값을 얻을 수 있었다. 상온과 $125^{\circ}C$ 에서 제작한 GaN 쇼트키 장벽 다이오드의 역방향 회복 파형도 측정하였으며, 제작한 소자는 매우 빠른 역방향 회복 특성을 보였다.

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The Effect of thin Stepped Oside Structure Along Contact Edge on the Breakdown Voltage of Al-nSi Schottky Diode (Al-nSi 쇼트키 다이오드의 접합면 주위의 얇은 계단형 산화막 구조가 항복 전압에 미치는 영향)

  • 장지근;김봉렬
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.20 no.3
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    • pp.33-39
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    • 1983
  • New Schottky devices with thin stepped oxide layer (about 1000 ${\AA}$) along the edge of metal-semiconductor junction have been designed and fabricated. The breakdown voltages of these diodes have been compared with those of conventional metal overlap and P guard ring Schottky diode structures. Thin stepped oxide layer has been grown by the process of T.C.E. oxidation. In order to compare and demonstrate the improved down phenomena of these devices, conventional metal overlap diode and P guard ring which have the same dimension with new devices have also been integrated in a same New Schottty devices structured with thin stepped oxide layer have shown significant improvement in breakdown phenomena compared with conventional diodes.

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Change of Schottky barrier height in Er-silicide/p-silicon junction (어븀-실리사이드/p-형 실리콘 접합에서 쇼트키 장벽 높이 변화)

  • Lee, Sol;Jeon, Seung-Ho;Ko, Chang-Hun;Han, Moon-Sup;Jang, Moon-Gyu;Lee, Seong-Jae;Park, Kyoung-Wan
    • Journal of the Korean Vacuum Society
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    • v.16 no.3
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    • pp.197-204
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    • 2007
  • Ultra thin Er-silicide layers formed by Er deposition on the clean p-silicon and in situ post annealing technique were investigated with respect to change of the Schottky barrier height. The formation of Er silicides was confirmed by XPS results. UPS measurements revealed that the workfunction of the silicide decreased and was saturated as the deposited Er thickness increased up to $10{\AA}$. We found that the silicides were mainly composed of Er5Si3 phase through the XRD experiments. After Schottky diodes were fabricated with the Er silicide/p-Si junctions, the Schottky barrier heights were calculated $0.44{\sim}0.78eV$ from the I-V measurements of the Schottky diodes. There was large discrepancy in the Schottky barrier heights deduced from the UPS with the ideal junction condition and the real I-V measurements, so that we attributed the discrepancy to the $Er_5Si_3$ phase in the Er-silicides and the large interfacial density of trap state of it.

The Modeling of ISL(Intergrated Schottky Logic) Characteristics by Computer Simulations (컴퓨터 시뮬레이션에 의한 ISL 특성의 모델링)

  • 김태석
    • Journal of Korea Multimedia Society
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    • v.3 no.5
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    • pp.535-541
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    • 2000
  • In this paper, we analyzed the characteristics of schottky junction to develop the voltage swing of ISL, and simulated the characteristics with the programs at this junctions. Simulation programs for analytic characteristics are the SUPREM V, SPICE, Medichi, Matlab. The schottky junction is rectifier contact between platinum silicide and silicon, the characteristics with programs has simulated the same conditions. The analytic parameters were the turn-on voltage, saturation current, ideality factor in forward bias, and has shown the results of breakdown voltage between actual characteristics and simulation characteristics in reverse bias. As a result, th forward turn-on voltage, reverse breakdown voltage, barrier height were decreased but saturation current and ideality factor were increased by substrates increased concentration variations.

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Analysis for Buffer Leakage Current of High-Voltage GaN Schottky Barrier Diode (고전압 GaN 쇼트키 장벽 다이오드의 완충층 누설전류 분석)

  • Hwang, Dae-Won;Ha, Min-Woo;Roh, Cheong-Hyun;Park, Jung-Ho;Hahn, Cheol-Koo
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.48 no.2
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    • pp.14-19
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    • 2011
  • We have fabricated GaN Schottky barrier diode (SBD) for high-voltage applications on Si substrate. The leakage current and the electrical characteristics of GaN SBD are investigated by annealing metal-semiconductor junctions. Ohmic junctions of Ti/Al/Mo/Au and Schottky junctions of Ni/Au are used in the fabrication. A test structure is proposed to measured buffer leakage current through a mesa structure. When annealing temperature is increased from $700^{\circ}C$ to $800^{\circ}C$, measured buffer leakage current is also increased from 87 nA to 780 nA at the width of 100 ${\mu}m$. The diffusion of Au, Ti, Mo, O into GaN buffer layer increases the leakage current and that is verified by Auger electron spectroscopy. Experimental results show that the low leakage current and the high breakdown voltage of GaN SBD are achieved by annealing metal-semiconductor junctions.

Ag metal의 급속 열처리에 따른 MgZnO 쇼트키 다이오드 특성연구

  • Na, Yun-Bin;Jeong, Yong-Rak;Lee, Jong-Hun;Kim, Hong-Seung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.231-231
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    • 2013
  • ZnO은 hexagonal wurtzite 구조를 갖는 직접 천이형 화합물 반도체로서, 상온에서 3.37 eV 정도의 wide band gap energy를 가지고 있으며, 60 meV의 큰 엑시톤 결합 에너지(exciton binding energy)를 갖는다. 또한 동종 기판이 존재하고 열, 화학적으로 안정한 상태이며 습식 식각이 가능한 장점으로 인해 각광받고 있다. 또한, ZnO 박막은 우수한 전기 전도성을 나타내며 광학적 투명도가 우수하기 때문에 투명전극으로 많이 이용되어 왔고, 태양 전지(solar cell), 가스 센서, 압전소자 등 많은 분야에서 사용되고 있다. 이와 같은 ZnO박막을 안정적인 쇼트키 다이오드 특성을 얻기 위해서는 쇼트키 배리어 장벽의 형성이 필수적이다. Mg을 ZnO에 첨가하여 MgZnO 박막을 형성할 경우, 금속의 일함수와 MgZnO의 전자친화력 차이가 증가하여 더 큰 쇼트키 장벽 형성이 가능하며, 금속의 일함수가 큰 물질을 사용해야 한다. 또한, 박막의 결함이 적은 박막을 형성해야 하는 에피탁셜 박막이 필요하다. SiC는 높은 포화 전자 드리프트 속도(${\sim}2.7{\times}107$ cm/s), 높은 절연 파괴전압(~3 MV/cm)과 높은 열전도율(~5.0W/cm) 특징을 가지고 있으며, MgZnO/Al2O3의 격자 불일치는 ~19%인 반면에 MgZnO/SiC의 격자 불일치는 ~6%를 가진다. 금속의 일함수가 큰 Ag 금속은 열처리가 될 경우 AgOx가 될 경우 더욱 안정적인 쇼트키 장벽을 형성될 수 있을 것으로 판단된다. 본 연구에서는 쇼트키 접합을 형성하기 위해 금속의 일함수가 큰 Ag 금속을 사용하였으며, Al2O3 기판과 6H-SiC 기판위에 MgZnO(30 at.%) 박막을 증착하였다. 증착 후에 Ag를 증착 한 뒤 급속 열처리를 하였다. 열처리된 MgZnO의 경우 열처리 하지않은 소자보다 약 $10^5$ 이상의 우수한 on/off 특성을 보였다.

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