• 한국재료학회지
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• 제7권10호
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• pp.832-837
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• 1997

본 연구에서는 반도체 소자의 수율을 현저히 저하시키는 반도체 습식 세정 시 건조 후 웨이퍼 표면에 형성된 water mark의생성 원인을 고찰하였다. 이를 위해 초순수수의 물방울을 다른 접촉각의 시편 위에 고의로 잔류시킨 후 질소 및 산소 분위기에서 건조시켰다. 건조 분위기와 상관없이 HF 처리된 소수성의시편 뿐만 아니라 친수성의 시편에서도 water mark이 관찰되었다. 생성된 water mark의 크기는 분위기에 무관하게 접촉각이 증가함에 따라 감소하였다. 그러나 산소 분위기에서 HF처리된 시편은 건조 후 질소 분위기에서 생성된 water mark의 크기보다 2배이상 크게 형성되었다. 이들 산소 및 질소 분위기에서 HF 처리된 실리콘 시편 위에 생성된 water mark의 성분을 AES(Auger Electron Spectroscopy)로 분석한 결과 water mark는 실리콘과 산소의 화합물 형태로 존재함을 확인하였다. AAS(Atomic Absorption Spectroscopy)분석 결과 건조 분위기에 상관 없이 HF처리된 실리콘 시편 위에 물방울을 30분 잔류시 물방울 내의 실리콘 농도가 증가하였다. 또한 물방울내 ozone을 첨가하여 실리콘 표면을 산화 시켰을 때 물방울과 표면의 접촉각 감소와 water mark의크기의 증가를 초래하였다.

• 한국염색가공학회지
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• 제17권3호
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• pp.34-42
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• 2005

In this work, a practical separation performance was investigated on aqueous alcohol solutions, especially for iso-propyl alcohol (IPA), which is usually used during the semi- conductor rinsing process. The removal of various substances from waste aqueous IPA solutions was carried out by microfiltration with $0.1\~1{\mu}$m pore size of mean diameter as a pre-filter. Permeability and molecular weight cut-off of the functional polysulfone(PSf) ultrafiltration membrane to purify waste aqueous IPA solutions were measured through the ultrafiltration test. The solute rejection of PSf membrane had $92\%$ in 1,000ppm aqueous PEG solution with PEG molecular weight 10,000, the molecular weight cut-off had 10,000. The IPA concentration on the $CMPA-K^+$ membrane performance using pervaporation module system could be increased from $95.04 wt\%$ to more than $98.50wt\%$ in about 9hr at operation temperature of $70^{\circ}C$ using the pervaporation module system.

• 한국염색가공학회지
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• 제17권4호
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• pp.21-26
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• 2005

A combination separation system is composed of three parts, simple microfiltration unit for the pretreatment of real waste IPA, pervaporation unit with plate and frame type module(the effective membrane area 9,040$cm^2$), and simple ultrafiltration unit as a refiner. Utrafiltration module with hollow fiber membrane(MWCO 10,000) used to purify waste aqueous IPA solution. In addition, the flux of $CMPA-K^+$ composite membrane for waste aqueous IPA solution was very steady-state with long experiment time(30 days). And the standard deviation($\sigma$) was 0.152 and then the coefficient of variation($CV\%$)was 10.82 The IPA concentration on the membrane performance using pervaporation module system could be increased from $89.85wt(\%)$ to more than $99.90wt\%$ in about 8hr at operation temperature of $70^{\circ}C$ using the pervaporation module system. Therefore, a combination separation process system of simple filtration and pervaporation was very effective for the purpose of the IPA purification and reuse front industrial electronic components cleaning process.

• 한국해양환경ㆍ에너지학회지
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• 제5권2호
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• pp.35-40
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• 2002

어구용 폐스티로폼을 자원으로 활용할 수 있도록 하기 위하여 세정과 건조공정을 도입하여 감용하는 장치를 자체 개발하였으며, 시스템을 폐스티로폼 발생 지자체에 설치하여 설비의 운전 신뢰성을 확인하였다. 굴피 및 홍합피 등의 이물질을 완벽하게 제거하고 해수에 포함된 염분을 육상에서 발생되는 스티로폼 수준까지 낮춤으로써 어구용 폐스티로폼은 플라스틱의 원료로 탈바꿈할 수 있었으며, 종래의 처리 방법에 비해 1/10수준에 불과한 비용으로 어구용 폐스티로폼의 처리가 가능하도록 함으로써 설비의 설치나 운영에 따르는 경제성 문제를 해결하고자 하였다.

• 한국물환경학회지
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• 제25권1호
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• pp.120-124
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• 2009

This study was performed to investigate the application of submerged membrane bioreactor (MBR) system for biological nutrient removal of municipal wastewater. MBR bioreactor consists of four reactors such as anaerobic, stabilization, anoxic and submerged membrane aerobic reactors with two internal recycles. The hydraulic retention time (HRT), sludge retention time (SRT) and flux were 6.2 hr, 34.1 days and $19.6L/m^2/hr$ (LMH), respectively. As a result of operation, the removal efficiency of $COD_{Cr}$, SS, TN and TP were 94.3%, 99.9%, 69.4%, and 74.6%, respectively. There was no significant effect of microbial activity after the maintenance cleaning using 200 mg/L of NaOCl. Membrane filtration for the treatment of municipal wastewater was performed for longer than 9 months without chemical recovery cleaning.

• 한국환경과학회지
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• 제16권4호
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• pp.433-440
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• 2007

The photodegradation and by-products of the gaseous toluene with $TiO_2$ (P25) and short-wavelength UV ($UV_{254+185nm}$) radiation were studied. The toluene was decomposed and mineralized efficiently owed to the synergistic effect of photochemical oxidation in the gas phase and photocatalytic oxidation on the $TiO_2$ surface. The toluene by the $UV_{254+185nm}$ photoirradiated $TiO_2$ were mainly mineralized $CO_2$ and CO, but some water-soluble organic intermediates were also formed under severe reaction conditions. The ozone and secondary organic aerosol were produced as undesirable by-products. It was found that wet scrubber was useful as post-treatment to remove water-soluble organic intermediates. Excess ozone could be easily removed by means of a $MnO_2$ ozone-decomposition catalyst. It was also observed that the $MnO_2$ catalyst could decompose organic compounds by using oxygen reactive species formed in process of ozone decomposition.

• 상하수도학회지
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• 제25권3호
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• pp.399-405
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• 2011

In a desalination technology using RO membranes, chemical cleaning makes damage for membrane surface and membrane life be shortened. In this research cleaning technology using direct osmosis (DO) was introduced to apply it under the condition of high pH and high concentration of feed. When the high concentration of feed is injected to the concentrate side after release of operating pressure, then backward flow occurred from treated water toward concentrated for osmotic pressure. This flow reduces fouling on the membrane surface. Namely, flux of DO was monitored under pH 3, 5, 10 and 12 conditions at feed concentrations of NaCl 40,000 mg/L, 120,000 mg/L and 160,000 mg/L. As a result, DO flux in pH 12 increased about 21% than pH 3. DO cleaning was performed under the concentrate NaCl 160,000 mg/L of pH 12 during 20 minutes. Three kinds of synthetic feed water were used as concentrates. They consisted of organic, inorganic and seawater; chemicals of SiO2 (200 mg/L), humic acid (50 mg/L) sodium alginate (50 mg/L) and seawater. As a result, fluxes were recovered to 17% in organic fouling, 15% in inorganic fouling and 14% of seawater fouling after cleaning using DO under the condition of concentrate NaCl 160,000 mg/L of pH 12.

• 상하수도학회지
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• 제31권2호
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• pp.169-175
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• 2017

This study applied microbubbles to reduce membrane fouling in wastewater reuse membrane processes, evaluated and compared the transmembrane pressure with or without the application of microbubbles and the cleaning efficiency with the application of aeration and microbubbles. In addition, this study analyzed foulants removed from the membrane surface. Changes in the transmembrane pressure of membranes with the presence or absence of microbubbles were observed. As a result, transmembrane pressure (TMP) increasing rate decreased twofold when applying microbubbles to realize stable operations. This study compared and evaluated cleaning efficiency applying aeration and microbubbles. As a result, the cleaning efficiency was 5% higher on average when applying microbubbles. In turbidity and total organic carbon (TOC), foulants were discharged when applying microbubbles twice as much as applying aeration. It is thought that particulate foulants precipitated on the membrane surface were more likely to desorb because the adhesion between the membrane surface and particle was weakened by microbubbles. Therefore, it is considered possible to effectively control membrane fouling because of the increase in cleaning efficiency when applying microbubbles to wastewater reuse membrane processes.

• 한국생물공학회:학술대회논문집
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• 한국생물공학회 2002년도 생물공학의 동향 (X)
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• pp.145-148
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• 2002

막 생물반응기를 이용하여 일정한 TMP 와 일정한 플턱스 여과방식에 따른 실험을 수행한 결과, 일정한 TMP 에서보다 일정 한 투과 플럭스에서 여과하는 것이 여과의 초기 단계동안 과도한 오염을 피할 수 있으므로 바람직하다는 것을 확인하였다. 투과 플럭스를 고정시킨 실험에서 속도에 대한 임계 플럭스 증가 간격은 선형적이었으며, supra-critical zone 과 sub-critical zone 의 두 지대로 구분되었다. 막 생물반응기는 화학적 세정 없이 장 기간 운전되어야하므로 TMP를 고정시키는 깃보다 플럭스를 고정시켜 운전하는 것이 효과적이여, 최적운선조건은 sub-critical zone 경계층 위, 임계플렉스 바로 아래상태임을 알 수 있었다.

• 상하수도학회지
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• 제30권3호
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• pp.335-341
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• 2016

Various studies have forwarded an outstanding wastewater effluent treatment systems toward securing sustainable supply of water sources. In this paper, a broad overview of the performance of MF membrane as pretreatment option for wastewater reuse will be presented based on the literature survey and experiments conducted over the wastewater reuse pilot plant. The pilot plant was operated with a continuous data acquisition for about 300days under various chemical enhanced backwash (CEB) system with subsequent treated water quality analysis. Accordingly, assessment of the effluent revealed that the pretreated water is suitable enough to be used as an input for Reverse Osmosis (RO) unit and significant effect of CEB and concentration of NaOCl is also conceived from the analysis. Moreover, it's also observed that the application of various CEB condition over long operational hours induced a constant declination of overall performance of MF membrane.