Textile Coloration and Finishing (한국염색가공학회지)

The Korean Society of Dyers and Finishers (한국염색가공학회)
권호 표지

Separation Purification Characteristics of Rinsing Solution in Semiconductor Process using Bigh Performance Polymer Membranes ( I )

기능성 고분자막을 이용한 반도체 공정 세정액의 분리정제특성 (I)

  • Lee Jae-Dal (Dept. of Textile Hyejeon Junior College) ;
  • Hong Young-Ki (Sun Jin, Inc.) ;
  • Ro Duck-Kil (Dept. of Fashion Design & Textile Eng., Chungwoon Univ.) ;
  • Bae Kie-Seo (Dept. of Textile Engineering, Chungnam National University)
  • 이재달 (혜전대학 패션섬유과) ;
  • 홍영기 ((주)선진인더스트리) ;
  • 노덕길 (청운대학교 패션디자인섬유공학과) ;
  • 배기서 (충남대학교 섬유공학과)
  • Published : 2005.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this work, a practical separation performance was investigated on aqueous alcohol solutions, especially for iso-propyl alcohol (IPA), which is usually used during the semi- conductor rinsing process. The removal of various substances from waste aqueous IPA solutions was carried out by microfiltration with $0.1\~1{\mu}$m pore size of mean diameter as a pre-filter. Permeability and molecular weight cut-off of the functional polysulfone(PSf) ultrafiltration membrane to purify waste aqueous IPA solutions were measured through the ultrafiltration test. The solute rejection of PSf membrane had $92\%$ in 1,000ppm aqueous PEG solution with PEG molecular weight 10,000, the molecular weight cut-off had 10,000. The IPA concentration on the $CMPA-K^+$ membrane performance using pervaporation module system could be increased from $95.04 wt\%$ to more than $98.50wt\%$ in about 9hr at operation temperature of $70^{\circ}C$ using the pervaporation module system.

Keywords

References

  1. 順藤 誠司, 三田 雅昭, 'IPAの On-Site 回收 精製技術', No. L 03-20, pp 39-42, 1996
  2. R.d.Noble, 'Membrane separation technology -principle and application', Elsevier, pp 93-197, 1995
  3. 五味亮, '半導體 プロセスにおける 超純水, 藥品の 淸淨管理', 4.1, サイエンスフオ-うム, pp. 23-48, 1984
  4. J.D. Ferry, Ultrafilter membranes and ultrafiltration, Chem. Rev., 18, 373-375(1936) https://doi.org/10.1021/cr60061a001
  5. C. Orr, 'Filtration: Principles and Practices', Marcel Dekker, New York, p. 475, 1977
  6. M. C. Porter and L. Nelson, In Recent Developments in Separation Science, Industrial eng. chem., 2, 227(1972)
  7. T.Hirotsu and S.NakaJima, water-ethanol permeation separation by pervaporation through the plasma graft copolymeric membranes of acrylic acid and acrylate, J. Appl. Polym. Sci. 36, 177-189(1988) https://doi.org/10.1002/app.1988.070360114
  8. S.T.Suneda, K.Saito, S.Furusaki, T.Saugo and Ishigaki, Water/acetone permeability of porous hollow-fiber membrane containing diethylamino groups on the grafted polymer branches, J. Memb. Sci., 71, 1-12(1992) https://doi.org/10.1016/0376-7388(92)85001-Y
  9. L.G.Wu, C.L.Zhn and M.Liu, Study of a new pervaporation membrane. part II, Performance test and analysis of the new membrane, J. Memb. Sci., 90, 207-212(1994) https://doi.org/10.1016/0376-7388(94)80072-3
  10. H.E.A. Bruschke, 'Membrane & membrane process', Plenum press., NY, p. 581, 1986
  11. K.scott and R.Hughes, 'Industrial membrane separation technology', Blackie academic & professional, pp. 1-7, 1996
  12. B.Will and R.N.Lichtenthaler, Comparison of the separation of mixtures by vapor permeation and by pervaporation using PVA composite membrane, I. Binary alcohol-water systems, J. Memb. Sci., 68, 119-125(1992) https://doi.org/10.1016/0376-7388(92)80154-C
  13. R.Y.M.Huang, 'Pervaporation membrane separation process', Bsevier science publishers, B. V. Amsterdam, pp. 111-144, 1991
  14. J.Neel, Q.T.Nguyen, R.Clement and R.Francois, 'Proc. 2nd. Int. Conf. on Pervaporation Proc', In the Chem. Ind., p. 35, 1987
  15. Young-ki Hong and Kie-seo Bae, Pervaporation Purification Technology used in cleansing liquids in conjunction with Semi-conductor, Journal of the Korean fiber society, 36(1), 90-97(1999)