Separation Purification Characteristics of Rinsing Solution in Semiconductor Process using Bigh Performance Polymer Membranes ( I ) |
Lee Jae-Dal
(Dept. of Textile Hyejeon Junior College)
Hong Young-Ki (Sun Jin, Inc.) Ro Duck-Kil (Dept. of Fashion Design & Textile Eng., Chungwoon Univ.) Bae Kie-Seo (Dept. of Textile Engineering, Chungnam National University) |
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