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Separation Purification Characteristics of Rinsing Solution in Semiconductor Process using Bigh Performance Polymer Membranes ( I )  

Lee Jae-Dal (Dept. of Textile Hyejeon Junior College)
Hong Young-Ki (Sun Jin, Inc.)
Ro Duck-Kil (Dept. of Fashion Design & Textile Eng., Chungwoon Univ.)
Bae Kie-Seo (Dept. of Textile Engineering, Chungnam National University)
Publication Information
Textile Coloration and Finishing / v.17, no.3, 2005 , pp. 34-42 More about this Journal
Abstract
In this work, a practical separation performance was investigated on aqueous alcohol solutions, especially for iso-propyl alcohol (IPA), which is usually used during the semi- conductor rinsing process. The removal of various substances from waste aqueous IPA solutions was carried out by microfiltration with $0.1\~1{\mu}$m pore size of mean diameter as a pre-filter. Permeability and molecular weight cut-off of the functional polysulfone(PSf) ultrafiltration membrane to purify waste aqueous IPA solutions were measured through the ultrafiltration test. The solute rejection of PSf membrane had $92\%$ in 1,000ppm aqueous PEG solution with PEG molecular weight 10,000, the molecular weight cut-off had 10,000. The IPA concentration on the $CMPA-K^+$ membrane performance using pervaporation module system could be increased from $95.04 wt\%$ to more than $98.50wt\%$ in about 9hr at operation temperature of $70^{\circ}C$ using the pervaporation module system.
Keywords
Membrane; Pervaporation; Flux; Solute rejection; IPA; UF membrane;
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