• 제목/요약/키워드: 비활성 가스

검색결과 272건 처리시간 0.03초

High Density Planar Inductively Coupled Plasma Etching of GaAs in BCl$_3$-based Chemistries (BCl$_3$ 기반 가스를 이용한 GaAs의 고밀도 평판형 유도결합 플라즈마 식각)

  • ;;;;;;S.J. Pearton
    • Journal of the Korean institute of surface engineering
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    • 제36권5호
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    • pp.418-422
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    • 2003
  • 평판형 유도결합 플라즈마 식각장비(inductively coupled plasma etcher)를 이용하여 각종 공정조건들에 따른 GaAs의 식각특성을 연구하였다. 공정변수들은 ICP 소스파워(0-500 W), RIE 척파워(0-150 W), 가스 종류($BCl_3$, $BCl_3$/Ar, $BCl_3$/Ne) 및 가스혼합비였다. $BCl_3$ 가스만을 이용하여 GaAs를 식각한 경우보다 25%의 Ar이나 Ne같은 불활성 기체를 혼합한 $15BCl_3$/5Ar, $15BCl_3$/5Ne 가스를 이용한 경우의 식각률이 더 우수한 것을 확인하였다. 그리고 50% 이하의 Ar이 혼합된 $BCl_3$/Ar의 경우는 높은 식각률 (>4,000 $\AA$/min)과 평탄한 표면(RMS roughness : <2 nm)을 얻을 수 있었지만 지나친 양(>50%)의 Ar의 혼합은 오히려 표면을 거칠게 하거나 식각률을 떨어뜨리는 결과를 가져왔다. 그리고 20 sccm $BCl_3$, 100 W RIE 척파워, 300 W ICP 소스파워, 공정압력이 7.5 mTorr인 조건에서의 GaAs의 식각결과는 아주 우수한 특성(식각률: ∼ 4,000, $\AA$/min, 우수한 수직측벽도: >$87^{\circ}$, 평탄한 표면: RMS roughness : ∼0.6 nm)을 나타내었다.

Bioactive Foam Reactors for the Enhanced Biological Degradation of Toluene (계면활성제 거품을 이용한 미생물반응기에서의 기체상 톨루엔 분해)

  • Kim, Yong-Sik;Son, Young-Kyu;Khim, Jee-Hyung;Song, Ji-Hyeon
    • Journal of Korean Society of Environmental Engineers
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    • 제27권5호
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    • pp.468-475
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    • 2005
  • Biofilters packed with various materials have emerged as a sustainable technology for the treatment of volatile organic compounds (VOCs); however, problems including low performance and clogging are commonly encountered. Recently, a bioactive foam reactor (BFR) using surfactants has been suggested to ensure efficient and stable VOCs removal performance. This study was mainly conducted to investigate the feasibility of BFRs using toluene as a model compound. Prior to bioreactor studies, a series of bottle tests were used to select a suitable surfactant for the BFR application. Experimental results of the batch bottle tests indicated that TritonX-100 was the most appropriate one among the surfactants tested, since it showed a minimal effect on the toluene biodegradation rate while the other surfactants lowered the toluene biodegradation rate significantly. Using the selected surfactant, the BFR performance was determined by changing operating parameters including gas residence time and toluene loading. As the gas residence time increased from 0.5 minutes to 2 minutes, the toluene removal efficiency increased from approximately 50% to 80%. In addition, an increase of the toluene loading from $38\;g/m^3/hr$ to $454\;g/m^3/hr$ resulted in a decrease of toluene removal efficiency from approximately 70% to 20%. The BFR had a maximum elimination capacity of $108\;g/m^3/hr$ for toluene, which was much higher than those generally reported in the literature. The high toluene-elimination performance indicates that the BFR be a potential alternative to the conventional, packed-type biofilters. However, the limitation of toluene solubilization and foam stability at either high or low gas flow rate are still problems to be challenged.

Efficiency Investigation of Vanishing Composting Machine Using Exhaust gas Recirculation system (배기가스순환시스템을 적용한 소멸 퇴비화장치의 효율검토)

  • Phae, Chae-Gun;Kim, Jong-Chan
    • Journal of the Korea Organic Resources Recycling Association
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    • 제7권2호
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    • pp.93-104
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    • 1999
  • Existing composting system was improved to have a high performance for organic degradation, deodorization and energy reduction. Compared with conventional devices, this developed system uses the heat recovered from platinum catalytic tower by three times heat exchange in which 65% of exhaust gas was recirculated. Evaporation of water was made easy by maintaining negative pressure in entire system. It was possible for reaction to be maintained steadily by microorganism agent. The optimum mixing volume ratio of garbage to sawdust was 15:1 contrary to 20:1 in conventional one. Moreover, aerobic condition was maintained efficiently. Effects obtained by using a inner circulation system were as follows. It was possible to reduce the ammonia causing offensive odor and verified that consumption of electricity cut down to 1/3 with reduction of exhaust gas inflowing. According to this inner circulation, the optimum air flow was $0.44m^3$ to 100kg treatment capacity. The electricity consumption was changed in proportion to inflowing air volume.

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Effects of Activated Carbon and Charcoal on in vitro Nutrient Disappearances and Ruminal Fermentation Characteristics (고농후사료에 대한 목탄 및 활성탄의 첨가 수준이 인공위내 소화율, 휘발성 지방산 및 개스 생산량에 미치는 영향)

  • Lee, Soo-Kee;Cha, Sang-Woo;Kim, Sun-Kyun
    • Korean Journal of Agricultural Science
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    • 제29권2호
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    • pp.35-42
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    • 2002
  • This study was conducted to investigate the effects of the addition of activated charcoal (AC) and oak charcoal on in vitro ruminal fermentation characteristics, nutrient disappearance, and ruminal gas production. AC and oak charcoal were added at the levels of 0.50, and 1.00 % to experimental diet (roughage/concentrate ratio ; 2/8). Ruminal pH and ammonia-N tended to increase by adding AC(P<0.05). But oak charcoal did not affect the ruminal pH and ammonia-N. Although not significant, ruminal total VFA and molar percentage of butyric acid tended to decrease in AC diets. but molar percentage of acetate and propionate were not affected by adding AC. Ruminal degradation of dry matter, crude protein, NDF, and ADF in AC diets tended to increase than in non-AC diet, however, no tendency in ruminal degradation of hemicellulose was observed. Ruminal gas production tended to increase in the AC and oak charcoal diets(P<0.05). Although there appeared some beneficial effects in adding AC to ruminant diets in this study, more works should be done with AC before we can make clear conclusion on the use of AC in the ruminant diets.

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Preparation and Characterization of Ni Catalyst Supported on Mesoporous Silica for Methanation (메탄화 반응을 위한 중형 기공성 실리카 물질에 담지된 니켈 촉매의 제조와 특성 분석)

  • Yi, Jong-Heop;Kim, Woo-Young;Kang, Mi-Yeong;Cho, Won-Jun
    • Journal of the Korean Institute of Gas
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    • 제13권5호
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    • pp.26-32
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    • 2009
  • Ni catalysts on mesoporous silica and commercial silica were prepared for the methanation. XRD and TPR analyses indicated that Ni/mesoporous silica had smaller metal particle size and higher metal dispersion than that of Ni/commercial silica. In addition, Ni/mesoporous silica had stronger metal-support interaction. In methanation, Ni/mesoporous silica showed higher CO conversion and methane yield (65%) than Ni/commercial silica (58%). In the characterization results of catalysts after reaction, Ni/commercial silica was deactivated by the collapse of structure and metal sintering, but Ni/mesoporous silica showed stable catalytic performance.

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Effect of Surfactant and Anti-foaming Agent on the Properties of Silicone Rubber Impression Material (계면활성제와 소포제가 실리콘 고무인상재의 물성에 미치는 영향)

  • Kim, Kyoung-Nam;Cho, Lee-Ra;Oh, Young-Il;Kang, Seung-Kyung;Chung, Kyung-Ho
    • Elastomers and Composites
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    • 제36권2호
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    • pp.102-110
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    • 2001
  • The three types of surfactants such as nonylphenoxy poly(ethylene) ethanol homologues, caster oil poly(ethylene) ethanol homologues, and sodium perfluoroalkyl carboxylates are used to improve the wettability of rubber impression material. Among the surfactants, the usage of sodium perfluoroalkyl carboxylates containing fluoro group resulted in the lowest surface energy of impression material and the result gave the positive effect on the wettability of rubber impression material to teeth. Also, the anti-foaming agents were used to reduce or remove the hydrogen gas generating on the impression material by reaction. In the case of rubber impression material containing sodium perfluoroalkyl carboxylate as a surfactant, it was found that the tear strength of rubber impression material increased over 3 N/mm with the addition of anti-forming agent. Therefore, the anti-foaming agent could contribute to the mechanical property of rubber impression material without the change of surface property.

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Effects of Activated Charcoal on in vitro Ruminal Fermentation Characteristics and Nutrient Disappearances (사료에 대한 활성탄의 첨가가 in vitro 시험시의 발효성상 및 영양소 소실율에 미치는 영향)

  • Lee, B.D.;Lee, S.K.;Lee, K.D.
    • Korean Journal of Agricultural Science
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    • 제26권2호
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    • pp.25-32
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    • 1999
  • An in vitro study was conducted to examine the effects of the addition of activated charcoal (AC) on the ruminal fermentation characteristics, nutrient disappearance, and ruminal gas production. AC was added at the levels of 0.00, 0.25, and 0.50 % to each of the four types of diets (roughage/concentrate ratio : 8/2, 6/4, 4/6 and 2/8), respectively. Although not significant, ruminal pH tended to increase by adding AC, and as the concentrate level increased, ruminal pH decreased (P<0.05). Acetate concentration and acetate/propionate molar ratio tended to decrease in AC diets. but molar % of propionate tended to increase by the addition of AC. Ruminal degradation of dry matter, crude protein, NDF, ADF, and hemicellulose in AC diets tended to increase than in non-AC diet, however, no tendency in ruminal degradation of crude fat was observed. As the concentrate level increased, rumunal degradation of dry matter and nutrients in AC diets increased significantly(P<0.05). Ruminal gas production tended to decrease in the 0.50 % AC diets, however, it tended to increase in high roughage diets. Although there appeared some beneficial effects in adding AC to ruminant diets in this study, more works should be done with AC before we can make clear conclusion on the use of AC in the ruminant diets.

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Comparative Studies on K2CO3-based Catalytic Gasification of Samhwa Raw Coal and Its Ash-free Coal (삼화 원탄과 무회분탄의 촉매(K2CO3) 가스화 반응성 비교 연구)

  • Kong, Yongjin;Lim, Junghwan;Rhim, Youngjoon;Chun, Donghyuk;Lee, Sihyun;Yoo, Jiho;Rhee, Young-Woo
    • Clean Technology
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    • 제20권3호
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    • pp.218-225
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    • 2014
  • Catalytic gasification of raw coals at mild condition is not realized yet mainly due to deactivation of catalysts via their irreversible interaction with mineral matters in coal. In this work, the gasification behavior of ash-free coal (AFC) was compared with that of the parent raw coal. In order to modify the gasification conditions, the raw coal gasified with fixed variables (water supply, space velocity, temperature, catalysts) in a fixed bed reactor. When catalysts are added by physical mixing method with coal, $K_2CO_3$ was the most effective additives for steam gasification of coal. However, the activity of ash-free coal (AFC) was much less reactive than raw coal due to high temperature extraction in a 1-methylnaphthalene under 30bar at $370^{\circ}C$ for 1 h, almost removed oxygen functional groups, and increased carbonization. The addition of $K_2CO_3$ in AFC achieved higher conversion rate at low temperature ($700^{\circ}C$). At that time, the molar ratio of gases ($H_2/CO$ and $CO_2/CO$) was increased because of water-gas shift reaction (WGSR) by addition of catalysts. This shows that catalytic steam gasification of AFCs is achievable for economic improvement of gasification process at mild temperature.

Effects of La Addition and Preparation Methods on Catalytic Activities for Methane Partial Oxidation Catalysts (메탄 부분산화반응 촉매에 La 첨가 및 제조방법에 따른 촉매활성에 미치는 영향)

  • Cheon, Han-Jin;Shin, Ki-Seok;Ahn, Sung-Hwan;Yoon, Cheol-Hun;Hahm, Hyun-Sik
    • Journal of the Korean Institute of Gas
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    • 제14권2호
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    • pp.7-14
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    • 2010
  • Synthesis gas was produced by the partial oxidation of methane. For the preparation of catalysts, Ni, known to be active in this reaction and cheap, was used as the active component and $CeO_2$, having high oxygen storage capability and high redox ability, was used as the support. The catalysts were prepared by the impregnation and urea methods. The catalyst prepared by the urea method showed about 11 times higher surface area and finer particle size than that prepared by the impregnation method. The catalysts prepared by the urea method showed higher methane conversion and synthesis gas selectivity than that prepared by the impregnation method. In this reaction, carbon deposition is a problem to be solved, so La was added to the catalyst system to reduce the carbon deposition. TGA analysis results showed that there was 2% carbon deposition with La-added catalysts and 16% with La-free catalysts. It was found that the addition of La decreases the amount of carbon deposition and prevents catalyst deactivation.

투과증발공정의 기초 이론

  • 염충균
    • Proceedings of the Membrane Society of Korea Conference
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    • 한국막학회 1996년도 심포지움시리즈 Jan-96 투과증발막과 응용
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    • pp.1-23
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    • 1996
  • 투과증발(Pervaporation)이란 어원적으로 "permeation"과 "evaporation"의 합성어인데 액체혼합물이 치밀한 비다공질막을 통해 이동하는 동안 증기화되면서 분리되는 막분리 공정이다. 이 공정에서 막 한쪽면은 액체공급액과 접하고 있고 다른 한쪽면은 낮은 투과물의 증기압과 접하고 있는데 낮은 증기압은 진공(vacuum pervaporation)을 가하거나 혹은 불활성의 담체가스(sweep gas pervaporation)를 흐르게 하므로써 얻을 수 있다. 이때 막 내부에 트과증발막공정의 추진력인 화학 포텐셜(chemical potential) 구배가 발생하여 막을 통한 물질투과가 이루어지는데 각 투과성분의 투과속도는 투과성분과 막재료간의 물리화학적 인력에 의해 결정된다.의 물리화학적 인력에 의해 결정된다.

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