• Proceedings of the Korean Vacuum Society Conference
• /
• 2000.02a
• /
• pp.93-93
• /
• 2000

수소화된 비정질 탄소(a-C:H)는 그 증착 조건에 따라서 여러 가지 다른 구조와 특성을 갖게 되며, 특히 DLC(diamond-like carbon) 및 CNT(Carbon nanotube)는 FED (field emission display) 개발 면에서 중요하게 연구되고 있다. 우리는 a-C:H 박막을 PECVD (plasma-enhanced chemical vapor deposition) 방법으로 증착하고 CH4 가스를 사용하였고 기판 온도는 상온-32$0^{\circ}C$ 사이에서 변화되었다. 기판은 Corning 1737 glass, quartz, Si, Ni 등을 사용하였다. 증착 압력과 R.F. power는 각각 0.1-1 Torr 와 12-60w 사이에서 변화되었다. ESR 측정은 X-band(주파수 약 9 GHz)에서 그리고 상온에서 행해졌다. 상온에서의 스핀밀도는 약한-표준피치(weak-pitch standard) 스펙트럼과 비교하여 얻을 수 있었다. 그리고 a-C:H 박막의 구조는 He-Ne laser(파장 632.8 nm)를 이용하는 micro-Raman spectroscopy로 분석하였다. 증착조건에 따른 스핀밀도의 변화 및 Raman 스펙트럼에서의 D-peak, G-peak의 위치 및 반치록, I(D)/I(G) 등을 조사하였다. 증착된 a-C:H 박막은 R.F.power가 증가할수록 대체로 스핀밀도가 증가하였으며, Raman 스펙트럼에서의 I(D)/I(G) 비율은 대체로 감소하였다. 증착된 박막들은 polymer-like Carbon으로 추정되었으며, 스핀밀도가 증가할수록 대체적으로 흑연 구조 영역이 증가됨을 알 수 있었다. 또한 glass나 Si 기판에 비해 Ni 기판위에서 polymer-like Carbon 구조는 향상되는 경향을 보였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.11a
• /
• pp.590-593
• /
• 2004

본 논문에서는 $As_{40}Ge_{10}Se_{15}S_{35}$ (300nm)박막과 $As_{40}Ge_{10}Se_{15}S_{35}$ (300nm)/Ag(20nm)박막에 홀로그래피 격자를 형성시킨 후 Tg 온도$(240^{\circ}C)$를 기준으로 하여 유리질 천이온도(Tg) 온도 이하 $(190^{\circ}C)$와 이상$(270^{\circ}C)$에서 열처리 시킨 후의 회절효율 변화를 알아보았다. $As_{40}Ge_{10}Se_{15}S_{35}$ (300nm) 박막의 경우 $190^{\circ}C$ : 50%, $240^{\circ}C$ : 약80%, $270^{\circ}C$ : 약 98%의 회절효율 감소가 일어났으며 $As_{40}Ge_{10}Se_{15}S_{35}$(300nm)/Ag(20nm)박막에서는 Tg 온도 이하 즉 $190^{\circ}C$, $240^{\circ}C$ 에서는 회절효율의 변화가 없었으나 Tg온도 이상인 $270^{\circ}C$에서는 약 1.5배 증가한 회절효율을 나타내었다.

• Journal of the Korean Ceramic Society
• /
• v.37 no.11
• /
• pp.1091-1096
• /
• 2000

본 연구에서는 기상 반응법을 이용하여 TMS(Tetramethylsilane:Si($CH_3$)$_4$)와 NH$_3$그리고 H$_2$의 혼합기체로부터 반응 온도 1000~120$0^{\circ}C$ 및 입력비(NH$_3$/Si($CH_3$)$_4$) 1~3의 조건에서 초미분의 SiC-Si$_3$N$_4$복합 분말을 합성하였다. 합성되어진 복합 분말들의 결정상의 변화와 평균 입경을 알아보기 위해 XRD와 TEM 분석을 행한 결과, 구형의 비정질 분말이 형성되었으며, 입자의 크기는 약 70~130nm이었다. 입자의 크기는 입력비에 관계없이 거의 일정하였으나 반응 온도가 증가함에 따라서 감소하였다. FT-IR과 EA 분석 결과, 합성되어진 분말은 Si, N, C, 그리고 H로 이루어진 화합물임을 확인할 수 있었다. 또한 입력비가 다른 조건에서 합성되어진 분말을 $N_2$분위기 하에서 155$0^{\circ}C$로 2시간 열처리를 행한 결과, 낮은 입력비인 경우 $\beta$-SiC, $\alpha$-Si$_3$N$_4$와 $\beta$-Si$_3$N$_4$의 결정상들이 혼재하였으나, 높은 입력비인 경우는 결정화 후 $\alpha$-Si$_3$N$_4$상만이 존재하였다.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.17 no.8
• /
• pp.1873-1878
• /
• 2013

ITZO ($In_2O_3$ : $SnO_2$ : ZnO = 90wt.% : 5wt.% : 5wt.%) thin films were fabricated on glass substrates (Eagle 2000) at room temperature with various working pressures (1~7 mTorr) by RF magnetron sputtering. The influence of the working pressure on the structural, electrical, and optical properties of the ITZO thin films were investigated. The XRD and FESEM results showed that all ITZO thin films are amorphous structures with very smooth surfaces regardless of the working pressure. Amorphous ITZO thin films deposited at 3 mTorr showed the best properties, such as a low resistivity, high transmittance, and figure of merit of $3.08{\times}10^{-4}{\Omega}{\cdot}cm$, 81 %, and $10.52{\times}10^{-3}{\Omega}^{-1}$, respectively.

• Resources Recycling
• /
• v.22 no.3
• /
• pp.50-56
• /
• 2013

Recycled plastic composites of ABS/PE (50/50 and 20/80) and ABS/GF (90/10) were fabricated from plastic components of waste LCDs and effects of PE composition on elongation of ABS/PE composites were investigated. Increased PE contents improved elongation of the composite from 2.4% to 13%, which was attributed to increased crystalline behavior of the ABS/PE composite afforded by ductile PE fraction: SEM fractographs showed some sign of plastic deformation of PE matrix before ductile fracture of the composites.

• Korean Journal of Materials Research
• /
• v.9 no.6
• /
• pp.630-634
• /
• 1999

Porous mullites were fabricated using $Al(OH)_3$ and amorphous $SiO_2$ as starting materials by reaction sintering method. The molar ratios of alumina and silica varied from stoichiometric mullite composition to silica-rich and alumina-rich compositions. $AlF_3$ of 0, 1, 5, 10 wt% wad added to each composition, and the effects of composition and the additive for the formation of mullite were examined. The temperature of mullite formation decreased as the amount of $AlF_3$ increased, and themullite phase was formed in the stoichiometric composition in addition of 5 wt% $AlF_3$ at $1250^{\circ}C$ and porous whiskered mullite were synthesized in the sample sintered at $1300^{\circ}C$ and higher temperature. The effect of temperature on the mullite formation was not observed for the sample with 5 wt% or higher content of $AlF_3$, and the body showed little contraction after sintering.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.19 no.1
• /
• pp.699-704
• /
• 2018

One-dimensional nanostructures have attracted increasing attention because of their unique electronic, optical, optoelectrical, and electrochemical properties on account of their large surface-to-volume ratio and quantum confinement effect. Vertically grown nanowires have a large surface-to-volume ratio. The vapor-liquid-solid (VLS) process has attracted considerable attention for its self-alignment capability during the growth of nanostructures. In this study, vertically aligned silicon oxide nano-pillars were grown on Si\$SiO_2$(300 nm)\Pt substrates using two-zone thermal chemical vapor deposition system via the VLS process. The morphology and crystallographic properties of the grown silicon oxide nano-pillars were investigated by field emission scanning electron microscopy and transmission electron microscopy. The diameter and length of the grown silicon oxide nano-pillars were found to be dependent on the catalyst films. The body of the silicon oxide nano-pillars exhibited an amorphous phase, which is consisted with Si and O. The head of the silicon oxide nano-pillars was a crystalline phase, which is consisted with Si, O, Pt, and Ti. The vertical alignment of the silicon oxide nano-pillars was attributed to the preferred crystalline orientation of the catalyst Pt/Ti alloy. The vertically aligned silicon oxide nano-pillars are expected to be applied as a functional nano-material.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.27 no.1
• /
• pp.47-56
• /
• 2017

In this study, the higher temperature thermal property of the fly ash-blast furnace slag system Geopolymer including alumina aggregate was investigated whether that Geopolymer will be or not useful as thermal-resistant construction materials. Under every mixing conditions, the crack on the surface of hardened body was not observed up to $800^{\circ}C$ and it corresponded with fact that level of changes was not significant before and after heating process. Residual compressive strength is most high when mixing Blast-Furnace Slag ratio is 60 wt% until temperature reaches $800^{\circ}C$. The major hydrates of hardened body of Geopolymer; amorphous halo pattern between $20{\sim}35^{\circ}$ (2theta) and mullite ($3Al_2O_3{\cdot}2SiO_2$) and quartz ($SiO_2$) was found during the experiment. Amorphous halo pattern was a aluminosilicate gel generated by geopolymeric polycondensation and it was found that the halo pattern of aluminosilicate gel was preserved up to $800^{\circ}C$. The patterns of aluminosilicate gel disappeared from $1,000^{\circ}C$ and crystal phases like gehlenite, calcium silicate, calcium aluminum oxide, microcline was observed with the increase of exposure temperature.

• Journal of the Korean Vacuum Society
• /
• v.11 no.3
• /
• pp.151-158
• /
• 2002

Fabricated were ultra-shallow $p^+-n$ junctions on n-type Si(100) substrates using decaborane $(B_{10}H_{14})$ ion implantation. Decaborane ions were implanted at the acceleration voltages of 5 kV to 10 kV and at the dosages of $1\times10^{12}\textrm{cm}^2$.The implanted specimens were annealed at $800^{\circ}C$, $900^{\circ}C$ and $1000^{\circ}C$ for 10 s in $N_2$ atmosphere through a rapid thermal process. From the measurement of the implantation-induced damages through $2MeV^4 He^{2+}$ channeling spectra, the implanted specimen at the acceleration voltage of 15 kV showed higher backscattering yield than those of the bare n-type Si wafer and the implanted specimens at 5 kV and 10 kV. From the channeling spectra, the calculated thicknesses of amorphous layers induced by the ioin implantation at the acceleration voltages of 5 kV, 10 kV and 15 kV were 1.9 nm, 2.5 nm and 4.3 nm, respectively. After annealing at $800^{\circ}C$ for 10 s in $N_2$ atmosphere, most implantation-induced damages of the specimens implanted at the acceleration voltage of 10 kV were recovered and they exhibited the same channeling yield as the bare Si wafer. In this case, the calculated thickness of the amorphous layer was 0.98 nm. Hall measurements and sheet resistance measurements showed that the dopant activation increased with implantation energy, ion dosage and annealing temperature. From the current-voltage measurement, it is observed that leakage current density is decreased with the increase of annealing temperature and implantation energy.

• Korean Journal of Materials Research
• /
• v.7 no.12
• /
• pp.1063-1069
• /
• 1997

For me1t-spun Fe-Nd-C alloys, variation of phase development and magnetic properties with the variety of alloy compositions and production conditions were investigated. To find out whether hard magnetic $Fe_{14}Nd_2C$ is crystallized direct1y from the melt by rapid quenching, the phase development of the as-spun ribbons spun at various speed was a1so studied. For the ribbons spun at 10m/s, ${\alpha}-Fe$ was the primary crystallization phase followed by the secondary $Fe_{17}Nd_2C$. At 20m/s ${\alpha}-Fe$ was suppressed so that the primary $Fe_{17}Nd_2C$ coexisted with the secondary ${\alpha}-Fe$ and the amorphous phase. Above 30m/s the ribbons were a1most amorphous, and the amorphization was complete at 40m/s. $Fe_{14}Nd_2C$ therefore was not found in as-spun state but obtained after heat treating the ribbons. The effective temperature range ($700{\sim}900^{\circ}C$) in which $Fe_{14}Nd_2C$ can be obtained was wider than that of a cast alloy. An alloy made with the wheel speed of 20 or 30m/s yielded higher coercivities after heat treatment. In iron-rich Fe-Nd-C, the composition range in which a high coercivity (more than 10kOe) is expected is narrow, i.e., 77~78 Fe and 7~8 C(at.%).