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http://dx.doi.org/10.6109/jkiice.2013.17.8.1873

Electrical and Optical Properties of ITZO Thin Films Deposited by RF Magnetron Sputtering  

Seo, Jin-Woo (Department of Electrical＆Semiconductor Engineering, Chonnam National University)
Joung, Yang-Hee (Department of Electrical＆Semiconductor Engineering, Chonnam National University)
Kang, Seong-Jun (Department of Electrical＆Semiconductor Engineering, Chonnam National University)
Publication Information
Journal of the Korea Institute of Information and Communication Engineering / v.17, no.8, 2013 , pp. 1873-1878 More about this Journal
Abstract
ITZO ($In_2O_3$ : $SnO_2$ : ZnO = 90wt.% : 5wt.% : 5wt.%) thin films were fabricated on glass substrates (Eagle 2000) at room temperature with various working pressures (1~7 mTorr) by RF magnetron sputtering. The influence of the working pressure on the structural, electrical, and optical properties of the ITZO thin films were investigated. The XRD and FESEM results showed that all ITZO thin films are amorphous structures with very smooth surfaces regardless of the working pressure. Amorphous ITZO thin films deposited at 3 mTorr showed the best properties, such as a low resistivity, high transmittance, and figure of merit of $3.08{\times}10^{-4}{\Omega}{\cdot}cm$, 81 %, and $10.52{\times}10^{-3}{\Omega}^{-1}$, respectively.
Keywords
ITZO thin film; RF magnetron sputtering; Transmittance; Resistivity; Figure of merit;
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Times Cited By KSCI : 2  (Citation Analysis)
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1 Y. Liang, J. Frisch, L. Zhi, H. N. Arasi, X. Feng, J. P. Rabe, N. Koch, and K. Mullen, "Transparent, Highly Conductive Graphene Electrodes from Acetylene Assi sted Thermolysis of Graphite Oxide Sheets and Nanographene Molecules," Nanotechnology, vol. 20, pp. 434007 (2009).   DOI   ScienceOn
2 Y. C. Lin, J. Y. Li, and W. T. Yen, "Low Temperature ITO Thin Film Deposition on PES Substrate Using Pulse Magnetron Sputtering," Appl. Sur. Sci., vol. 254, pp. 3262-3268, 2008.   DOI   ScienceOn
3 D. J. Son, Y. D. Ko, D. G. Jung, J. H. Boo, S. H. Choa, and Y. S. Kim, "Thermal Effect on Characteristics of IZTO Thin Films Deposited by Pulsed DC Magnetron Sputtering," Bull. Korean Chem. Soc., vol. 32, pp. 847-851, 2011.   과학기술학회마을   DOI   ScienceOn
4 G. P. Crawford, Flexible Flat Panel Displays, New York, Wiley, 2005.
5 J. H. Bae, J. M. Moon, S. W. Jeong, J. J. Kim, J. W. Kang, D. G. Kim, J. K. Kim, J. W. Park, and H. K. Kim, "Transparent Conducting Indium Zinc Tin Oxide Anode for Highly Efficient Phosphorescent Organic Light Emitting Diodes," J. Electrochem. Soc., vol. 155, pp. J1-J6, 2008.   DOI
6 D. H. Kim, W. J. Kim, S. J. Park, H. W. Choi, and K. H. Kim, "Electrical and Optical Properties of In-Zn-Sn-O Thin Film Deposited on Polymer Substrates Through Facing Targets Co-sputtering System," Surf. Coat. Technol., vol. 205, pp. S324-S327, 2010.   DOI   ScienceOn
7 G. Haacke, "New Figure of merit for Transparent Conductors," J. Appl. Phys., vol. 32, pp. 4086-4089, 1976.
8 H. S. Jang, D. H. Choi, Y. S. Kim, J. H. Lee, and D. I Kim, "The Luminescence and Optoelectrical Properties of ITO Films Prepared by a Sputter Type Negative Metal Ion Deposition," Optics Communications, vol. 278, pp. 99-103, 2007.   DOI   ScienceOn
9 U. Betz, M. K. Olsson, J. Marthy, M. F. Escola, and F. Atamny, "Thin Films Engineering of Indium Tin Oxide : Large Area Flat Panel Displays Application," Surf. Coat. Technol., vol. 200, pp. 5751-5759, 2006.   DOI   ScienceOn
10 J. Y. Lee, J. P. Shim, and H. K. Jung, "Influence of Surface Texturing on the Electrical and Optical Properties of Aluminum Doped Zinc Oxide Thin Films," Journal of information and communication convergence engineering, vol. 9, pp. 461-465, 2011.   DOI   ScienceOn
11 J. Liu, D. Wu, and S. Zeng, "Influence of Temperature and Layers on the Characterization of ITO Films," J. Materials Processing Technology, vol. 209, pp. 3943-3948, 2009.   DOI   ScienceOn
12 Y. Yang, Y. Jiang, J. Xu, and J. Yu, "Conducting PEDOTPSS Composite Films Assembled by LB Technique," Colloids and Surfaces A : Physicochem. Eng. Aspects, vol. 302, pp. 157-161, 2007.   DOI   ScienceOn