• Title/Summary/Keyword: 분극이력곡선

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Improvement of Precision in Ferroelectric Polarization Hysteresis Measurement (강유전체 분극 이력곡선의 측정 정밀도 향상)

  • Jae Hwan Park
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.3
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    • pp.51-55
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    • 2023
  • Measurement of the ferroelectric polarization hysteresis curve is an important means of overall evaluation and interpretation of the ferroelectric structure and dielectric properties. If a resistive component is included in the ferroelectric sample, an error is included in the measured value of the spontaneous polarization. When configuring the electrical circuit to measure the polarization, by properly utilizing the external resistance corresponding to the resistive component included in the sample, the error due to the resistive loss of the sample was excluded and the size of the ferroelectric polarization induced inside could be accurately measured. It is expected that the displacement and dielectric characteristics of ions inside the ferroelectric can be more accurately evaluated through the evaluation of such an accurate polarization hysteresis curve.

Errors and Their Corrections in the Measurement of Dielectric Hysteresis in Ferroelectrics (강유전체의 유전이력특성 측정에서의 오차요인 및 보정)

  • 박재환
    • Journal of the Korean Ceramic Society
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    • v.38 no.7
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    • pp.667-671
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    • 2001
  • Sawyer-tower 회로를 이용한 강유전 이력곡선의 측정과정에서의 주요 오차 원인을 살펴보고 이에 대한 대안을 제시해 보았다. 강유전체 시편에 존재하는 직류 누설성분에 의해 잔류분극과 항전계는 과대평가될 수 있는 위험성이 항상 있음을 알 수 있었으며 이러한 오차의 보정에 대하여 논의하였다. 또한 강유전 이력곡선의 측정에서 측정하는 시간이 증가되면서 시편의 발열로 인해서 시편의 온도가 증가하게 되어 잔류분극 값과 항전계 값이 감소하는 경향으로 나타남을 관찰하였고, 그 대책을 제안하였다.

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Characteristics of quasi-MFISFET device with various ferroelecric thin films (강유전체 박막의 특성에 따른 Quasi-MFISFET 소자의 특성)

  • Lee, Guk Pyo;Yun, Yeong Seop;Gang, Seong Jun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.3
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    • pp.12-12
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    • 2001
  • PLZT(10/30/70), PLT(10) 및 PZT(30/70) 와 같은 강유전체 박막의 이력곡선을 field-dependent polarization 모델을 이용하여 시뮬레이션하고, 측정한 실험적 결과와 비교, 분석하였다. PZT(30/70) 박막의 경우, 5V 이상의 인가전압에서 분극의 포화현상이 둔감하게 나타나고 시뮬레이션 값과의 차이도 심해 강유전체 분극이 순수한 dipole 외에도 다양한 전하의 영향을 받아 형성된다는 사실을 알 수 있다. 또, quasi-MFISFET 소자의 드레인 전류는 field-dependent polarization 모델의 강유전체 이력곡선에서 얻은 파라미터를 square-law FET 모델에 적용시켜 효과적으로 추출하였고, 모델링 결과는 실험값과 유사하였다. 그리고, quasi-MFISFET 소자의 gate 에 -10V의 ′write′ 전압을 인가한 상태에서 PZT(30/70) 박막을 사용한 경우, PLZT(10/30/70), PLT(10) 박막 보다 빨리 채널이 형성되었는데, 그 원인은 강유전체 박막에 따른 retention 특성에서 PZT(30/70) 박막의 분극 감소가 PLZT(10/30/70), PLT(10) 박막의 분극 감소 보다 약 3∼4 배 이상 크다는 점에서 찾을 수 있다.

Measurement of Dielectric Hysteresis and Current Hysteresis for Determining Ferroelectricity (유전이력곡선 및 전류이력곡선을 통한 강유전성 확인 방법)

  • 박재환;박재관;김윤호
    • Korean Journal of Crystallography
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    • v.12 no.2
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    • pp.65-91
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    • 2001
  • Errors and its compensation in the measurement of dielectric hysteresis in ferroelectric by using Sawyer-Tower circuit were discussed. When ferroelectrics are lossy, remanent polarization and coercive field are likely to be over-estimated. As the DC conductivity and measuring time increases, measurement errors in ferroelectric properties increase. Current hysteresis measurement was suggested for compensation such errors.

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A Hystesis Loop Modeling of Ferroelectric Thin Film Using Numerical Integration Method (수치적분을 이용한 강유전체의 이력곡선 모델링)

  • 강성준;정양희;유일현
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2003.05a
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    • pp.696-699
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    • 2003
  • In this study, we suggested the model to precisely evaluate the ferroelectric hysteresis loop, using the modified Sawyer-Tower circuit and the ferroelectric capacitor with a MDFM(Metal-Dielectric-ferroelectric-Metal) structure. The mathematical expression of dipole polarization is applied to the numerical integration algorithm, and the fatigue property can be considered including the dielectric layer between ferroelectrics and bottom electrode. The validity of our model is proved comparing the estimated value of our model and the measured results of PLT(10) thin film.

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Characteristics of Quasi-MFISFET Device with Various Ferroelectric Thin Films (강유전체 박막의 특성에 따른 Quasi-MFISFET 소자의 특성)

  • Lee, Guk-Pyo;Yun, Yeong-Seop;Gang, Seong-Jun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.3
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    • pp.166-173
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    • 2001
  • Hysteresis loops of the ferroelectric thin films such as PLZT(10/30/70), PLT(10) and PZT(30/70) was simulated using the field-dependent polarization model and compared to the measured loops. In case of PZT(30/70) thin film, as the real saturation or polarization at the applied voltage or larger than 5V appears slack and its value is quite different from the simulated one, it is deduced that the ferroelectric polarization of PZT(30/70) is generated not only by the pure dipoles but also by various electric charges. The drain current of quasi-MFISFET is expressed by using the square-law FET and field-dependent polarization models. The modeling results are analogous to the experimental values. The channel of quasi-MFISFET using PZT(30/70) forms more quickly compared to that of quasi-MFISFET using PLZT(10/30/70) or PLT(10) in the state of 'write' gate voltage of -10V. This may be because the decrease rate of the polarization in the PZT(30/70) thin film is 3~4 times more rapid than that of the polarization in the PLZT(10/30/70) or the PLT(10) thin film in the retention characteristics.

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Electrode Dependence of Asymmetric Behavior of (La,Sr)CoO₃/Pb(Zr,Ti)O₃/(La,Sr)CoO₃ Thin Film Capacitors ((La,Sr)CoO₃/Pb(Zr,Ti)O₃/(La,Sr)CoO₃박막 캐패시터의 비대칭성의 전극 의존성)

  • 최치홍;이재찬;박배호;노태원
    • Journal of the Korean Ceramic Society
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    • v.35 no.7
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    • pp.647-647
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    • 1998
  • (La,Sr)CoO3/Pb(Zr,Ti)O3/(La,Sr)CoO3 (LSCO) heterostructures have been grown on LaAlO3 substrates by pulsed laser deposition (PLD) to investigate asymmetric polarization of Pb(Zr,Ti)O3 (PZT) thin flims with different electrode configuration. P-V hysteresis loop of LSCO/PZT/LSCO was symmetric. However, LaCoO3 (LCO_/PZT/LSCO showed a largely asymmetric P-V hystersis loop and large relaxation of the remanent polarization at the negatively poled state, which means that the negatively poled state was unstable. On the other hand, LSCO/PZT/LCO exhibited large relaxation of the positively poled state. The asymmetric behavior of the polarized states implies the presence of an interal electric firld inside the PZT layer. It is suggested that internal electric field is caused by built-in voltages at LCO/PZT and LSCO/PZT interfaces. The built-in voltages at LCO/PZT and CSCO/PZT interfaces were 0.6 V and -0.12 V, respectively.

Studies on the Deformation in the Hysteresis Loop of $Pb(Zr,Ti)O_3$ Ferroelectric Thin Films ($Pb(Zr,Ti)O_3$ 강유전체 박막 이력곡선의 변형에 관한 연구)

  • Lee, Eun-Gu;Lee, Jong-Guk;Lee, Jae-Gap;Kim, Seon-Jae
    • Korean Journal of Materials Research
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    • v.10 no.5
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    • pp.360-363
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    • 2000
  • Deformation in the hysteresis loop of $Pb(Zr,Ti)O_3$ (PZT) thin films with various Zr/Ti ratios has been studied by varying the top electrode preparation method and the annealing temperature. Pt/PZT/Pt capacitors was found to be positively poled due to dc plasma potential generated during reactive ion etch (RIE) of Rt. Internal field is formed by space charges trapped at domain boundaries. Aging phenomenon such as constriction in the middle of the hysteresis loop was observed in the PZT film with top electrode deposited by sputtering. Top electrode annealing restores the hysteresis loop by removing the space charges. As Zr/Ti ratio decrease, voltage shift increases and an-nealing temperature at which internal field disappears also increases.

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Effect of Zr/Ti concentration in the PLZT(10/y/z) thin films from the aspect of NVFRAM application (비휘발성 메모리 소자로의 응용의 관점에서 PLZT(10/y/z) 박막에서의 Zr/Ti 농도 변화 효과)

  • Kim, Seong Jin;Gang, Seong Jun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.5
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    • pp.1-1
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    • 2001
  • 비휘발성 메모리 소자로의 응용의 관점에서, sol-gel 방법으로 La 을 10mo1% 로 고정시킨 PLZT (10/y/z) 박막을 제작하여 Zr/Ti 조성비에 따른 구조적 및 전기적 특성을 조사하였다. PLZT(10/40/60) 박막은 로제트와 파이로클로르 상이 관찰되었으며, Zr/Ti 조성비에서 Ti 함유량이 증가함에 따라, (100) 배향성, 결정립 크기와 표면 거칠기는 증가되었다. 또한 Zr/Ti 조성비에서 Ti 함유량이 증가함에 따라, 10㎑ 에서 비유전율은 600 에서 400 으로 감소된 반면, 유전손실은 0.028 에서 0.053 로 증가되었으며, 170 ㎸/cm 에서 누설전류밀도는 1.64×$10^{-6}$ 에서 1.26×$10^{-7}$A/㎠ 으로 감소되었다. 그리고 ± 170㎸/㎝ 에서 측정한 PLZT 박막의 이력곡선을 측정한 결과, Zr/Ti 조성비가 40/60 에서 0/100 로 변화함에 따라 PLZT 박막의 잔류분극과 항전계는 6.62 에서 12.86 μC/cm2, 32.15 에서 56.45㎸/㎝ 로 각각 증가되었으며, 피로와 retention 특성 역시 개선되었다. PLZT 박막에 ±5V 의 사각펄스를 $10^9$ 회 인가하여 피로특성을 측정한 결과, PLZT(10/40/60) 박막의 잔류분극은 초기분극값으로부터 50% 감소된 반면, PLZT(10/0/100) 박막은 30% 감소되었다. 또, $10^5$ 초의 retention 결과에서 PLZT(10/0/100) 박막은 초기분극값에서 오직 11% 만이 감소된 반면, PLZT(10/40/60) 박막은 40% 감소되었다.

Ferroelectric Properties of Ti-Doped and W-Doped SBT Ceramics (Ti와 W이 첨가된 SBT 세라믹스의 강유전 특성)

  • 천채일;김정석
    • Journal of the Korean Ceramic Society
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    • v.41 no.5
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    • pp.401-405
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    • 2004
  • Undoped SrB $i_2$T $a_2$O$_{9}$, donor-doped Sr$_{0.99}$B $i_2$(Ta$_{0.99}$W$_{0.01}$)$_2$O$_{9}$ and acceptor-doped SrB $i_2$(Ta$_{0.99}$Ti$_{0.01}$)$_2$O$_{8.99$ ceramics were prepared and their microstructure, ferroelectric P-E hysteresis and Curie temperature were investigated. Grain size did not influence P-E hysteresis curve in undoped SrB $i_2$T $a_2$O$_{9}$ ceramics. Donor-Doped Sr$_{0.99}$B $i_2$(Ta$_{0.99}$W$_{0.01}$)$_2$O$_{9}$ ceramics showed more saturated P-E hysteresis curve with larger remanent polarization (P$_{r}$) than undoped SrB $i_2$T $a_2$O$_{9}$ ceramics while acceptor-doped SrB $i_2$(Ta$_{0.99}$Ti$_{0.01}$)$_2$O$_{8.99}$ ceramics led to a pinched P-E hysteresis loop. Larger polarization in donor-doped Sr$_{0.99}$B $i_2$(Ta$_{0.99}$W$_{0.01}$)$_2$O$_{9}$ ceramics resulted from easier domain wall motion by Sr-vacancies.