• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.357-360
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• 2002

Nowadays, the improvement and development of Multi-media, information and communication technology are rapidly processed. And many products, for example, digital camera, digital camcorder, and PDA, are used for them. They need large data storage capacity and small size, light storage system. Due to that, many studies and researches in data storage system have been carried out. Especially, micro drive system was presented by IBM.(1) However, its system is expensive and uneasy to be portable. In ODD technologies, 1 inch drive system is not yet or in processing status.(2) If to be possible and to be come up, it is cheap than HDD system and easy to transfer information. In this paper, a miniaturized actuator(about linch) is designed and tested for ODD system. Specially, it is adapted for NFR(Near-field Recoding) system using SIL(Solid Immersion Lens). It is the dual-servo actuator which consists of a coarse actuator and fine actuator. Its actuating force generation method is VCM(Voice Ceil Motor). The fine actuator has 4-wire suspensions and bobbin wrapped by coil and includes focusing motion as well as tracking motion. The coarse actuator has an actuating coil and V-grooved guide mechanism. Also, the characteristics of the designed actuator is estimated by sine-swept mode and LDV(Laser Doppler Vibro-meter).

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1439-1443
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• 2007

In this paper, vibration reduction techniques of a voice coil motor (VCM) actuator are presented for AFM imaging system. The damping coefficient of the actuator driven by VCM with a flexure hinge is quite low and it cause the about 30dB peak amplitude response at the resonance frequency. To decrease this peak response, we design and apply elliptical band-stop filters to xy and z axis VCM actuator. Frequency response of each actuator with filter is measured to verify the effect of the filters. As a sensor, capacitive sensor is used. Vibration reduction rate of the xy actuator with the filter is also measured while real AFM scanning condition. As another method, closed loop control with the capacitive sensor is applied to the xy axis actuator to add an electrical damping effect and vibration reduction rate measured. These vibration reduction rates with each method are compared. In the case of z axis actuator, the frequency response of force (gap) control loop is measured. For comparison, the frequency response using a conventional PID controller is also obtained. Finally, the AFM image of a standard grid sample is measured with the designed controller to analyze the effect in the AFM imaging.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.4
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• pp.51-58
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• 2008

This paper presents a new design of the precision stage for the reticle in lithography process and a low hunting control method for the stage. The stage has three axes for X, Y, ${\theta}_z$ those actuated by three voice coil motors individually. The designed reticle stage system has three gap sensors and voice coil motors, and supported by four air bearings and the forward/inverse kinematics of the stage were solved to get an accurate reference position. When a stage is in regulating control mode, there always exist small fluctuations(stage hunting) in the stage movement. Because the low stage hunting characteristic is very important in recent lithography and nano-level applications, a special regulating controller for ultra low hunting is proposed in this paper. Also this research proposed the 2-step transmission system for preventing the noise infection from environmental devices. The experimental results showed the proposed regulating control system reduced hunting noise as 35nm(rms) when a conventional PID generates 77nm(rms) in the same mechanical system. Besides the reticle stage has 100nm linear accuracy and $1{\mu}rad$ rotation accuracy at the control frequency of 8kHz.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.11a
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• pp.754-758
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• 2000

In recent years, the LDM(Linear DC Motor) is widely used, because it has more merits than other rotary motors. First, if system requires linear motion, LDM realizes direct linear motion as rotary motor does not. Second, system is simple and easy to control, and so on. In optical disc drive, a tracking system consists of two parts. One is fine actuating and the other is coarse actuating. For coarse actuating VCM(Voice Coil Motor) actuator is used as a basic drive mechanism. In this paper, MC(Moving Coil) type LDM is designed, manufactured and controlled. System is composed of mechanical-electromagnetic component, therefore mechanical loss and electromagnetic loss exist. The dominent mechanical loss is friction which results from sliding between guide shaft and hole. Therefore, this paper shows the friction compensation control. High speed and accurate position is not gained only PID control, therefore other control method is applied to the system.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.1700-1703
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• 1997

The flexibility of the manipulator inevitably inducess the vibration at the end effector. For the increase in speed and accuracy at the end tip, in this work, position and vibration control of a flexible manipuator with a separate voice coil type actrator for vibration suppression, is studied. The flexible manipulator with a tip mass is modeled an Euler-Bernoulli beam. An H.inf. controller is designed in order to make the controlled system robust against unmodeled higher-order mode vibration of the manipulator, output sensor noise, and etc. Simulations and experiments show that the modeling of the system is valid and that robust vibration control of the flexible manipulator is efficiently achieved.

• Proceedings of the KIEE Conference
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• 2003.04a
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• pp.137-139
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• 2003

In this paper, a design of VCM(Voice Coil Motor) for the measurement system of nano-level force and displacement was proposed and developed. This paper present the VCM shape for improvement of position resolution and guarantee of a large displacement. And then the finite element analysis method(FEM) utilized to produce linear driving thrust and satisfy required thrust of the system. The result shows the applicable possibility of the proposed VCM as a study for nano-level measurement system.

• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.51 no.10
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• pp.439-445
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• 2002

In this paper force feedback control system is investigated for improving the quality of the haptic feedback in virtual reality applications. We suggested the method of controlling the haptic device and modelling the virtual environment. Haptic device is composed of five bar link structure, voice coil motor, control board, and virtual environment modeling program. We applied voice coil motor in the actuating system for simple structure and easy control. Virtual environment modelling is constructed in PC, and the control signals of the actuators and the encoder data are transferred to the control system through USB. Experiment is performed to evaluate the characteristics of the haptic device.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.53 no.2
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• pp.69-75
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• 2004

In this paper, we propose the shape of extremely small thrust VCM for application of the Nanoindenter, which enables control of very small force and displacement. We performed optimization of the VCM shape using conjugated gradient method. And the purposes of optimization are the minimization of the permanent magnet size for the efficient systems, minimization of deviation of flux density from the air gap for operate on regular thrust and a linearization of thrust for a good control characteristic. The finite element method is used for characteristic analysis. The node moving method is used to redundant changes of design variables. As a result, the VCM produces a yew small force by the difference of flux density of lower part from higher one. Also, in a wide range of current (0［A］-1［A］), the VCM produces linear driving thrust by saturating the magnetic circuit path and operate on regular thrust by minimizing deviation of flux density of the air gap.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.7
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• pp.637-643
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• 2010

The paper is about the development of 6-DOF active vibration isolation systems using VCM. Firstly, formulate the vertical 3-DOF mathematical model under eccentric load, and compare the model with the case in which the center of mass is located at the centroid. And then, complete the 6-DOF mathematical model by formulating the horizontal 3-DOF mathematical model. Find main parameters by comparing the result of the frequency response test with simulation result on the model. Finally, achieve the performance of vibration isolation by applying loop shaping approach & feedforward controller.