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Optimal Design of Extremely Small Thrust VCM for Nanoindenter  

조주희 (KOMOTEK 모토팀)
이진우 (한양대 전자전기제어계측공학과)
이철규 (한양대 전자전기제어계측공학과)
권병일 (한양대 전기공학과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers B / v.53, no.2, 2004 , pp. 69-75 More about this Journal
Abstract
In this paper, we propose the shape of extremely small thrust VCM for application of the Nanoindenter, which enables control of very small force and displacement. We performed optimization of the VCM shape using conjugated gradient method. And the purposes of optimization are the minimization of the permanent magnet size for the efficient systems, minimization of deviation of flux density from the air gap for operate on regular thrust and a linearization of thrust for a good control characteristic. The finite element method is used for characteristic analysis. The node moving method is used to redundant changes of design variables. As a result, the VCM produces a yew small force by the difference of flux density of lower part from higher one. Also, in a wide range of current (0［A］-1［A］), the VCM produces linear driving thrust by saturating the magnetic circuit path and operate on regular thrust by minimizing deviation of flux density of the air gap.
Keywords
Voice Coil Motor(VCM); optimal design; Nanoindenter; extremely small thrust;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
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