• The Transactions of the Korean Institute of Electrical Engineers D
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• v.51 no.10
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• pp.439-445
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• 2002

In this paper force feedback control system is investigated for improving the quality of the haptic feedback in virtual reality applications. We suggested the method of controlling the haptic device and modelling the virtual environment. Haptic device is composed of five bar link structure, voice coil motor, control board, and virtual environment modeling program. We applied voice coil motor in the actuating system for simple structure and easy control. Virtual environment modelling is constructed in PC, and the control signals of the actuators and the encoder data are transferred to the control system through USB. Experiment is performed to evaluate the characteristics of the haptic device.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.57-58
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• 2006

A Simulation model is developed to minimize the path tracking errors when the non-circular cutting is done by a VCM(voice coil motor) driven tool. The relationship between PWM(Pulse Width Modulation) duty ratio and velocity of voice coil motor is theoretically derived from combining the circuit equation for the coils and the motion equation for the magnetic rod of the voice coil motor. The path tracking errors are showed differently according to the rotational speed, the number of segments and the control period in digital control. Given a required accuracy in the non-circular cutting, the optimal values for those parameters are determined based on the developed simulation model.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.153-154
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• 2006

Development of sorting machine for photo diode and its control system is addressed. The sorting machine for optical communication device requires high positional precision because the alignment is one of the most important point in the sorting process. This sorting method describes how to detect the target chip's angle and position from the wafer. The machine vision system is used for the feedback control. This sorting machine is implemented by motion controller, machine vision and various solenoid valve and is interfaced with RS-232c, GPIB and PCI communication. This system gets the position accuracy within $1{\mu}m$ with our experiments.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.10a
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• pp.83-89
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• 2000

This paper presents a dynamic modeling and a sliding mode controller for the high-speed / high-accuracy position control system. Selected target system is the wire bonder head assembly which is used in semiconductor assembly process. This system is a reciprocating one around the pivot point that consists of VCM(voice coil motor) as a actuator and transducer horn as a bonding tool. For the modeling elements, the system is divided into electrical circuit, magnetic circuit and mechanical system. Each system is modeled by using the bond graph method and united into the full system. Two major aims are considered in the design of the controller. The first one is that the horn must track the given reference trajectory. The second one is that the controller must be realizable by using the DSP board. Computer simulation and experimental results show that the designed sliding mode controller provides better performance than the PID controller.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.3
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• pp.86-93
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• 2008

This paper presents a design of the reticle stage for lithography using VCM(Voice Coil Motor) and kinematic analysis. The stage has three axes for X,Y,${\theta}_z$, those actuated by three VCM's individually. The reticle stage has cross coupled relations between X,Y,${\theta}_z$ axes, and the closed solution of the forward/inverse kinematics were solved to get an accurate reference position. The reticle stage for lithography was designed for reaching both high accuracy and long stroke, which was $0.1{\mu}m$ (X,Y)/ $1{\mu}rad({\theta}_z)$ accuracies and relatively long strokes about 2mm (X,Y) and 2 degrees(${\theta}_z$). Also this research presents a rotational compensation algorithm for the precision gap sensor for the stage. Simulation results show the overall performance of the whole algorithm and the improvement quantity of the rotational compensation algorithm.

• Proceedings of the KIEE Conference
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• summer
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• pp.1034-1036
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• 2004

The most basic form of a direct-drive linear motor is the voice coil motor(VCM). The voice coil motor employs a stationary permanent magnet field assembly in conjunction with a moving coil winding assembly to produce a force proportional to the current applied to the coil. Voice coil motor provide motion capable of extremely fine position sensitivity, limited only by the feedback sensor used to close the control loop. This paper presents dual-servo voice coil motor for improvement of driving range and position resolution. The voice coil motor is a cylindrical shape to improve reliability of a nanoindenter.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.7
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• pp.637-643
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• 2010

The paper is about the development of 6-DOF active vibration isolation systems using VCM. Firstly, formulate the vertical 3-DOF mathematical model under eccentric load, and compare the model with the case in which the center of mass is located at the centroid. And then, complete the 6-DOF mathematical model by formulating the horizontal 3-DOF mathematical model. Find main parameters by comparing the result of the frequency response test with simulation result on the model. Finally, achieve the performance of vibration isolation by applying loop shaping approach & feedforward controller.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.43-50
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• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.19 no.8
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• pp.788-794
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• 2009

Various types of latch designs for hard disk drives using load/unload mechanism have been introduced to protect undesired release motions of a voice coil motor(VCM) actuator from sudden disturbances. Recently, various inertia-type latches have been widely used because locking performance is better than that of other types of latch. However there has been a limit in the inertia type in order to guarantee perfect latch and unlatch operations because of changes in latch/unlatch conditions due to mechanical tolerance and temperature-dependent friction. In this paper, a reliable and robust magnetic latch mechanism is proposed through only simple modifications of coil and yoke shapes in order to overcome the mechanical limit of current inertia-type latches. This new magnetic latch does not have only a simple structure but it also ensures reliable operations and anti-shock performance. The operating mechanism of the proposed latch is theoretically analyzed and optimally designed using an electromagnetic simulation.