• Proceedings of the KAIS Fall Conference
• /
• 2011.05b
• /
• pp.761-764
• /
• 2011

본 연구에서는 대면적 백색광 간섭계의 개발과 개발 되어진 대면적 백색광 간섭계의 고속화를 위하여 Multi-PC를 이용한 동기화 이미지 획득 및 이미지 분할연산과 최적의 Multi-Thread 구성을 통한 영역분할 ROI 알고리즘에 대한 연구결과를 기술하였다.

• Journal of the Korean Society for Precision Engineering
• /
• v.24 no.4 s.193
• /
• pp.21-28
• /
• 2007

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.5 s.170
• /
• pp.21-27
• /
• 2005

• Journal of the Institute of Electronics Engineers of Korea SP
• /
• v.47 no.2
• /
• pp.51-60
• /
• 2010

This paper proposes a new scheme to obtain enhanced 3D shape information rapidly for WLPSI(White Light Phase Shifting Interferometry). WLPSI is a convenient method to measure the height of the micro products. First we propose an effective method of limiting search interval for detecting the peak of the visibility function in order to obtain 3D shpae information rapidly. Second we propose an automatic base level decision method basad on image processing and a correction algorithm using the least square approximation method to overcome the global tilt problem of the conventional WLPSI algorithms. Third we propose an adaptive filtering method to remove the distortion known as bat-wing effect which appears near the step discontinuity. Experimental results show that the proposed overall technique is fast and provides more enhanced 3D shape information compared with the conventional WLPSI algorithms.

• Korean Journal of Optics and Photonics
• /
• v.15 no.4
• /
• pp.331-336
• /
• 2004

The phase change due to the reflection from target surfaces in a white-light interferometer induces measurement errors when target surfaces are composed of dissimilar materials. We prove that this phase change on reflection as the polarization of the white-light changes causes a shift of both envelope peak position and fringe peak position of several tens of nanometers as the polarization of the white-light changes. In addition, we propose a new equation for white-light interference fringes depending on the polarization of the source.

• Journal of the Korean Institute of Intelligent Systems
• /
• v.22 no.6
• /
• pp.694-699
• /
• 2012

In this paper, semiconductor package inspection results using white light interferometer with large F.O.V., in order to apply semiconductor product inspection process, are shown. Experimental 3D data repeatability test results for the same special bumps of each substrate are shown. Experimental 3D data repeatability test results for all the bumps in each substrate are also shown. Semiconductor package inspection using white light interferometer with large F.O.V. is very important for the fast 3D data inspection in semiconductor product inspection process. This paper is surely helpful for the development of in-line type fast 3D data inspection machine.

• Korean Journal of Optics and Photonics
• /
• v.12 no.5
• /
• pp.362-370
• /
• 2001

We prove that 3-D profile mapping using white light interferometry has systematic errors caused by aberrations of the optimal system. The tilt of an object invokes an offset between the object and the reference ray, which eventually makes the aberration cancel incompletely. The fringe peak of a white light interferogram is mainly affected by the aberration effect while the envelope peak remains stable. By the difference between the two peaks, it is easily confirmed how much the error existed in the fringe peak. Experimental results prove that the error caused by aberration is varied by object tilt, microscope NA, optics alignment within the range of $\pm$50nm.

• Korean Journal of Optics and Photonics
• /
• v.11 no.5
• /
• pp.317-322
• /
• 2000

We present a compensation method of the phase change upon reflection in the scannll1g whIte light interferometry. which pracl1cally allows precIse 3-D profIle mappmg for compo~Ite target surfaces comprising of multipledissinular matenals. The compensation method estimates the vanatlon 01 pbase change with the spectral distribution of the light source through first-order approximation, and then diIectly compensates the measurement errors by perIormmg two-wavelength white light intetferomctric measurements. Experimental results prove that the proposed self-compensatIOn mcthod is capable of reducing the measmement error in step height gauging within $\pm2nm$..

• Journal of the Korean Society for Nondestructive Testing
• /
• v.30 no.5
• /
• pp.471-478
• /
• 2010

Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media, MEMS and surface coatings. It is well known that a thin film's material properties can be very different from the corresponding bulk properties and thus there has been a strong need for the development of a reliable test method to measure the mechanical properties of a thin film. We have developed an alternative and convenient test method to overcome the limitations of previous membrane deflection experiment and uniaxial tensile test by adopting a white light interferometer having sub-nanometer out-of-plane displacement resolution. The freestanding aluminium specimens are tested to verity the effectiveness of the test method developed and get the tensile properties. The specimens are 0.5 rum wide, $1{\mu}m$ thick and fabricated through MEMS processes including sputtering. 1 to 5 specimens are fabricated on Si dies. The membrane deflection experiments are carried out by using a homemade tester consisted of a motor-driven loading tip, a load cell, and 6 DOF alignment stages. The test system is compact enough to set it up beneath a commercial white light interferometric microscope. The white light fringes are utilized to align a specimen with the tester. The Young's modulus and yield point stress of the aluminium film are 62 GPa and 247 MPa, respectively.

• Korean Journal of Optics and Photonics
• /
• v.20 no.5
• /
• pp.272-275
• /
• 2009

In order to enhance the background noise filtering performance of the white light interferometry(WLI), we demonstrate the noise filtering performance of preprocessing of the measured fringe signals. The WLI was realized through a mirau interferometer which was equipped with a green LED. When measuring large-height and rough surface objects, the illumination optics are considered the numerical aperture(NA) and the depth of focus(DOF). In this case, the limited NA of the illumination optics has a considerable impact on the interference fringe. Therefore, we propose a preprocessing method that uses the intensity difference between the measured intensity and the moving average intensity. The performance is demonstrated by measuring an array of metal solder balls fabricated on printed circuit board(PCB). The proposed method reduces the noise pixels by 15 percent.