• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.04a
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• pp.91-94
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• 2007

The fabrication and firing test of the ignition system for a micro solid propellant thruster are described in the present paper. Pt igniter coil was patterned on the glass membrane that was fabricated by the wet etching process. The thickness of Pt layer was $2000{\AA}$ and the width of igniter pattern was $40{\mu}m$. The thickness and diameter of glass membrane were $15{\mu}m$ and 1 mm, respectively. Ignition test was performed. Successful ignition of HTPB/AP propellant was obtained with an ignition delay of 1.6 s at an input voltage of 12 V. The ignition energy was estimated to be 1.4 J.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.6
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• pp.9-13
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• 2019

In this study, a miniature thin film-patterned heater was fabricated on a silicon substrate using semiconductor process technology and the thermal characteristics of the applied voltage, power, and temperature of the thin film heater were measured and analyzed. The temperature of the thin film pattern heater increased with increasing power, but the temperature increase rate was gradual at high power intervals. The characteristics of the high temperature section of the platinum thin film-patterned heater were analyzed using the heat resistance model under atmospheric and vacuum conditions. The thermal resistance measured in a vacuum atmosphere was 0.79 [K/mW] higher than the heat resistance value 0.69 [K/mW] in air. The temperature of the thin film pattern heater can be maintained at a low power in a vacuum rather than in air, and these results are expected to be utilized in the structural design of a thin film-patterned heater element.

• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.403-405
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• 2009

RF-스퍼터링법을 사용하여 메탄올 산화반응을 위해 박막형 전극을 제조하였다. 전극은 텅스텐 탄화물(WC)과 텅스텐 산화물($WO_3$), 그리고 백금(Pt) 타겟을 이용하였으며 그 구조적 특성과 전기화학적 특성을 TEM(Transmission electron microscopy와 CV(Cyclic Voltametry)를 통하여 촉매적 활성을 측정해 보았다. 같은 양의 백금과의 활성을 비교하고 활성을 확인하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.7
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• pp.612-616
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• 2000

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the Si membrane in which MgO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$layer. The MgO layer improved adhesion of Pt thin-film to SiO$_2$layer without any chemical reactions to Pt thin-film under high annealing temperatures. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 82 mV at $N_2$flow rate of 2000 sccm/min heating power of 1.2 W. The response time($\tau$:63%) was about 50 msec when input flow was stepinput

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2001.11a
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• pp.161-164
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• 2001

• Proceedings of the Materials Research Society of Korea Conference
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• 2001.11a
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• pp.88-88
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• 2001

• Proceedings of the Materials Research Society of Korea Conference
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• 2001.11a
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• pp.60-60
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• 2001

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1998.05a
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• pp.63-64
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• 1998

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.6
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• pp.509-513
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• 2000

The physical and electrical characteristics of MgO and Pt thin-films on it deposited by reactive sputtering and rf magnetron sputtering respectively were analyzed with annealing temperature and time by four point probe SEM and XRD. Under annealing conditions of 100$0^{\circ}C$ and 2 hr, MgO thin-film had the properties of improving Pt adhesion to SiO$_2$and insulation without chemical reaction to Pt thin-film and the sheet resistivity and the resistivity of Pt thin-film deposited on it were 0.1288 Ω/ and 12.88 $\mu$$\Omega$.cm respectively. We made Pt resistance pattern on SiO$_2$/Si substrate by life-off method and fabricated Pt thin-film type microheater for thermal microsensors by Pt-wire Pt-paste and SOG(spin-on-glass). In the temperature range of 25~40$0^{\circ}C$ we estimated TCR(temperature coefficient of resistance) and resistance ratio of thin-film type Pt-RTD(resistance thermometer device). We obtained TCR value of 3927 ppm/$^{\circ}C$ close to the bulk Pt value. Resistance values were varied linearly within the range of the measurement temperature. The thermal characteristics of fabricated thin-films type Pt micorheater were analyzed with Pt-RTD integrated on the same substrate. The heating temperature of Pt microheater could be up to 40$0^{\circ}C$ with 1.5 watts of the heating power.

• Journal of the Korean Electrochemical Society
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• v.5 no.3
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• pp.164-167
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• 2002

ABS/Polypyrrole composite film has been synthesized by means of electrochemical polymerization in order to enhance the oxidant stability by using ABS(Acrylonitrile-Butadiene-Strene) as a host-polymer. While the acetonitrile as a solvent swells the host-polymer ABS on Pt plate, and then the pyrrole in an electrolyte penetrates the Pre-coated ABS film during electrochemical Polymerization. Comparing with the sin91e-component Polypynole film, the resulting conducting ABS/PPy composite nim shows the good reliability for the uniform resistance and the enhancement of the oxidant stabilization.