• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.7 s.124
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• pp.565-571
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• 2007

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.2
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• pp.124-131
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• 2002

This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.10a
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• pp.175-176
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• 2010

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1995.04a
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• pp.233-239
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• 1995

정밀장비의 내진 및 방진설계에 대한 일반적인 procedure를 제시하고 이를 정밀제어 장비인 HDD CELL에 적용하였다. 정밀장비의 내진 설계를 위해서 는 정확한 진동 허용규제치와 정밀장비가 설치되는 구조물의 진동 환경에 대한 데이터를 확보하는 것이 우선적으로 해야할 일이다. 구조물의 진동은 직접 측정을 하거나 설계 자료를 이용하는 것이 가능하지만 진동 허용규제치는 장비 제작사에서 진동환경시험을 통하여 얻어진 자료를 사용 자에게 제시하는 것이 일반적인 과정이다. 그러나 고도의 정밀성을 요하는 장비 전체를 가진 테이블에 설치하여 진동환경시험을 수행하는 일은 시간과 경제적인 측면에서 유익하지 못하다. 그러한 면에서 본 논문에 제시한 진동 허용가진력 규제치를 이용한 정밀장비의 내진 및 방진의 정량적인 설계뿐만 아니라 진동 허용규제치를 손쉽게 구할 수 있다는 점에서 유익하다 하겠다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.831-836
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.909-914
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• 2006

Vibration isolation tables are mostly required in precise measurement and manufacturing system. Among the vibration isolation tables, an air spring is the most favorable equipment because of low resonant frequency and high damping ratio. However, it is difficult to design the air spring with the required stiffness and damping ratio. Futhermore, whenever conventional active control methods are applied to the air spring, it may be difficult to obtain effective control performance due to high nonlinearity of air spring. In this paper, the optimal design of the air spring is performed using genetic algorithm to bring out low resonant frequency and high damping ratio. Also, active control of the vibration isolation table with 3-DOF model is proposed using the adaptive control method. Through experiments, optimal design is shown to be effective. And performance of the proposed control method is verified to be better than those of the passive control method and the conventional active control methods.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.184-189
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by rising experiment and simulation. Optimal design for a passive air spring can be obtained by fluting the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the act ive vibration isolation table wi th the bet ter isolation performance.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.227-232
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• 2003

As the most precision equipment requiring very strict vibration environment are vulnerable to the surrounding vibration condition, they adapt the passive or active vibration isolation system. When it comes to the passive isolation system, the resonance of the isolation system causes excessive resonance response, and finally results in the degrade the equipment performance. This paper deals with the active control method to control this resonance induced response, and includes the experiment on the active control for controlling the resonance response on the table against the excitation of the same frequency with the natural frequency of the isolation system. The electromagnetic actuator was designed and the control effect was verified by the experiment. The experiment showed that the electromagnetic actuator is effective for controlling the low frequency isolation resonance response of the precision equipment.