• Journal of Soil and Groundwater Environment
• /
• v.7 no.3
• /
• pp.79-84
• /
• 2002

The optimal operation conditions, including voltage applied, reaction time, distance between electrodes. and electrode material. were investigated for the treatment of soil flushing effluent using electrofloatation. When 3V was applied for 1 hour, 88% oil-water separation efficiency was achieved. In case of 6V and above, 90% efficiencies were achieved. As reaction time and distance between electrodes were longer, separation efficiencies were higher and lower, respectively. Separation efficiencies for different anode materials were copper > aluminum > iron > titanium. It might result from the differences of their electrical conductivities.

• 전자공학회논문지 IE
• /
• v.46 no.3
• /
• pp.26-32
• /
• 2009

The reason of the contamination in the VLSI industry is the electric charge of the wafer itself. We develop the corona discharged system of clearing static electricity with a fan. This system has automatic cleaner of discharging electrode, check the state of jot control a suitable mount of discharged ion, and monitor all state using Zigbee communication module.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.52 no.12
• /
• pp.579-585
• /
• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• Applied Chemistry for Engineering
• /
• v.19 no.6
• /
• pp.640-644
• /
• 2008

Lubricating oil on aluminium surfaces was cleaned by a low temperature plasma process. Oxygen plasma mixed with argon was used, and process parameters were the mixing ratio of argon in oxygen, discharge power, and negative DC potential. The aluminium surfaces were analyzed with FTIR and EDX after the cleaning. It was found that almost all of the oil was eliminated in 20 min. if the oil was pure. Elimination efficiency was highly dependent on operational conditions of the process. The highest efficiency was obtained when treated at 300 W with oxygen plasma mixed with 30% argon applying negative potential more than -500 V on the aluminium surfaces. However, efficiency higher that 60% cannot be obtained at any condition if the oil contained inorganic materials.

• Proceedings of the Korean Vacuum Society Conference
• /
• 1999.07a
• /
• pp.34-34
• /
• 1999

토카막(Tokamak)에서는 플라즈마(plasma)로 불순불(impurity)의 유입을 방지하기 위해 고진공을 유지해야 하며 이를 위해 가열탈리(backing), 방전세정(discharge codanning) 등 wall conditioning이 기본적으로 요구된다. KT-1 토카막은 실험실 이전에 따른 해체로 인해 진공용기(vacuum vessel) 가 대기압 하에 수개월 동안 노출되어 있었기 때문에 재조립 후 가열 탈 리가 필수적이나 진공용기의 외부에 saddle loop coil을 비롯해 Rogowski, diamagnetic coil, poloidal field coil 등 많은 magnetic pick up coil 들이 설치되어 있어 열선 등 일반적인 방법으로 가열 탈 리가 어려운 상황이다. 따라서 KT-1 토카막에서는 전자석 코일에 상전원을 부가하였을 때 진공용기에 발생하는 유도가열 (inductive heatin)을 이용해 가열 탈리를 시도하였다. 유도 가열 탈리(inductive backing)는 토로이달 자장 코일(toroidal field coil)과 가열 저장 모일(ohmic heating coil)을 각각 이용하여 코일의 온도가 6$0^{\circ}C$ 이하가 유지되는 코일 전류 범위내에서 수행하였으며 먼저 이 둥 경우에 있어서 진공용기의 온도분포를 비교하엿다. 그리고 가열 탈리 기간 및 그 전, 후의 진공압력과 잔류기체 분압을 측정, 분석하였다. 유도가열에 의한 방법으로 KT-1 토카막에서 얻은 탈리온도는 12$0^{\circ}C$정도로 비교적 낮았으나 탈리 시간을 연장하여 탈리효과를 어느 정도 보상할 수 있으며 일반적인 가열 탈리가 여려운 경우 유도 가열 탈 리가 채택될 수 있는 또 하나의 방법이라 볼 수 있다.

• Resources Recycling
• /
• v.19 no.4
• /
• pp.51-57
• /
• 2010

As a recycling of Si sludge from Si wafer process, a Si-SiC-CuO-C composite material was synthesized and investigated as an anode material for lithium batteries. The Si sludge consisted of Si, SiC, machine oil, and metallic impurities. The oil and metal impurities was removed by organic washing, magnetic separation, and acid washing. The Si-SiC-CuO-C composite from the recovered Si-SiC mixture was prepared by high-energy mechanical milling. According to the electrochemical tests such as charge-discharge capacity and cycling behavior, it showed the improved cycle performance. The SiC and CuO-related phases were presumed to restrain the volume expansion of the anode and Fe, however, should be removed below 10 ppm prior to synthesis of the composite because it caused the capacity loss of the active material itself.

• Journal of the Korean Vacuum Society
• /
• v.15 no.3
• /
• pp.314-324
• /
• 2006

The vacuum characteristics of the KSTAR ICRF antenna were experimentally investigated. The fabricated antenna was installed in the RF Test Chamber(RFTC) which has a vacuum system with an effective pumping speed of 1015 l/s. The time variations of RFTC pressure, total gas load and ultimate pressure were measured before the RF test. RF conditioning effect was studied by repeating RF pulses at low power level. A time variation of the RFTC pressure was measured during a RF power was applied to the antenna. Threshold pressure at which a RF breakdown occurs was investigated. Whenever the pressure was higher than $10^{-4}$ mbar, the RF breakdown occurred. During a long pulse testing, the temperature of the antenna and RFTC pressure were measured to investigate long pulse limitation of the maximum available voltage without any cooling, which were compared with testing results with a water cooling of the antenna.

• The Journal of Engineering Geology
• /
• v.31 no.3
• /
• pp.433-445
• /
• 2021

Plasma blasting by high voltage arc discharge were performed in laboratory-scale soil samples to investigate the fluid penetration efficiency. A plasma blasting device with a large-capacity capacitor and columnar soil samples with a diameter of 80 cm and a height of 60 cm were prepared. Columnar soil samples consist of seven A-samples mixed with sand and silt by ratio of 7:3 and three B-samples by ratio of 9:1. When fluid was injected into A-sample by pressure without plasma blasting, fluid penetrated into soil only near around the borehole, and penetration area ratio was less than 5%. Fluid was injected by plasma blasting with three different discharge energies of 1 kJ, 4 kJ and 9 kJ. When plasma blasting was performed once in the A-samples, penetration area ratios of the fluid were 16-25%. Penetration area ratios were 30-48% when blastings were executed five times consecutively. The largest penetration area by plasma blasting was 9.6 times larger than that by fluid injection by pressure. This indicates that the higher discharge energy of plasma blasting and the more numbers of blasting are, the larger are fluid penetration areas. When five consecutive plasma blasting were carried out in B-sample, fluid penetration area ratios were 33-59%. Penetration areas into B-samples were 1.1-1.4 times larger than those in A-samples when test conditions were the same, indicating that the higher permeability of soil is, the larger is fluid penetration area. The fluid penetration radius was calculated to figure out fluid penetration volume. When the fluid was injected by pressure, the penetration radius was 9 cm. Whereas, the penetration radius was 27-30 cm when blasting were performed 5 times with energy of 9 kJ. The radius increased up to 333% by plasma blasting. All these results indicate that cleaning agent penetrates further and remediation efficiency of contaminated soil will be improved if plasma blasting technology is applied to in situ cleaning of contaminated soil with low permeability.