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Development of The System of Clearing Static Electricity with A Fan in the VLSI Device  

Yi, Chong-Ho (Department of Digital Electronics, Inha Technical College)
Jun, Sung-Ho (Tech-Line Co.,LTD)
Publication Information
전자공학회논문지 IE / v.46, no.3, 2009 , pp. 26-32 More about this Journal
Abstract
The reason of the contamination in the VLSI industry is the electric charge of the wafer itself. We develop the corona discharged system of clearing static electricity with a fan. This system has automatic cleaner of discharging electrode, check the state of jot control a suitable mount of discharged ion, and monitor all state using Zigbee communication module.
Keywords
VLSI; wafer; corona discharge; zigbee;
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