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A Study on the Dry Cleaning of Aluminium Surfaces by Low Temperature Plasma Process  

Lim, Gyeong-Taek (Research Institute for Catalysis and Center for Photonic Materials and Devices, Chonnam National University)
Kim, Kyung Hwan (School of Applied Chemical Engineering and Center for Functional Nano Fine Chemicals, Chonnam National University)
Kim, Kyung Seok (School of Applied Chemical Engineering and Center for Functional Nano Fine Chemicals, Chonnam National University)
Li, Hui Jie (School of Applied Chemical Engineering and Center for Functional Nano Fine Chemicals, Chonnam National University)
Song, Sun Jung (School of Applied Chemical Engineering and Center for Functional Nano Fine Chemicals, Chonnam National University)
Shon, Hokyong (Faculty of Engineering, University of Technology, Sydney)
Cho, Dong Lyun (Research Institute for Catalysis and Center for Photonic Materials and Devices, Chonnam National University)
Publication Information
Applied Chemistry for Engineering / v.19, no.6, 2008 , pp. 640-644 More about this Journal
Abstract
Lubricating oil on aluminium surfaces was cleaned by a low temperature plasma process. Oxygen plasma mixed with argon was used, and process parameters were the mixing ratio of argon in oxygen, discharge power, and negative DC potential. The aluminium surfaces were analyzed with FTIR and EDX after the cleaning. It was found that almost all of the oil was eliminated in 20 min. if the oil was pure. Elimination efficiency was highly dependent on operational conditions of the process. The highest efficiency was obtained when treated at 300 W with oxygen plasma mixed with 30% argon applying negative potential more than -500 V on the aluminium surfaces. However, efficiency higher that 60% cannot be obtained at any condition if the oil contained inorganic materials.
Keywords
low temperature plasma; elimination efficiency; discharge power; negative DC potential;
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