• Title/Summary/Keyword: 반응 표면 분석

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플라즈마 공정 모니터링용 사중극자 질량 분석기의 필라멘트 파손분석

  • Ha, Seong-Yong;Kim, Dong-Hun;Ju, Jeong-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.93.2-93.2
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    • 2015
  • 플라즈마를 포함한 반응성 가스 공정 분석용 사중극자 질량분석기의 필라멘트의 파손양상을 조사하였다. 또한 유전체 증착층이 이온원 성능에 미치는 영향을 분석하기 위하여 이온원의 일반적인 가동 전압 조건에서 Poisson방정식을 이용하여 전위를 수치 해석으로 구하였다. 사용중 파손된 필라멘트의 파단면을 주사전자현미경으로 관찰결과, 수직으로 절단되는 양상과 직경이 점차 작아지면서 erosion되는 두가지 양상을 보였다. 또한 파단면은 표면균열과 패시팅(faceting) 현상을 보였다. 필라멘트 사용시 가장 큰 문제는 패시팅(faceting)이다. 대부분의 결정에서는 다른 결정면보다 에너지 준위가 낮은 결정면이 존재한다. W 원자는 고온에서 확산 또는 증발하여 표면에서 다시 응축할 때 표면 에너지를 최소화하기 위한 독특한 평형 형상이 만들어 지는데 이것이 패시팅의 구동력이다. 이때 국부적으로 단면적이 감소하는 곳이 생기는데, 이 지점이 집중적으로 가열되고 증발이 가속화하여 파손된다. 파단면을 EDS 분석결과, 산화물을 포함한 F, Fe 및 C이 검출되었다. 이 F과 C는 공정중 사용된 CF4의 분해에 의한 것으로 생각되며, 파손된 필라멘트를 Ar 유도결합 플라즈마로 처리한 결과 이 F, Fe 및 C의 양이 감소하였다.

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Synthesis of Ethyl levulinate from Chitosan Using Homogeneous Acid Catalyst (Chitosan으로부터 균일 산 촉매를 이용한 Ethyl Levulinate의 합성)

  • Jeong, Gwi-Taek;Kim, Sung-Koo
    • Korean Chemical Engineering Research
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    • v.58 no.2
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    • pp.266-272
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    • 2020
  • In this study, the production of ethyl levulinate from chitosan using successive acid-catalyzed hydrolysis and esterification was investigated. To optimize and analysis the reaction factors and heir reciprocal interaction, response surface methodology was introduced. In the effect of water content in ethanol solvent, the production yield of ethyl levulinate was high at 5% water content (or 95% ethanol). As a result of optimization of reaction factors, 30.1% ethyl levulinate yield was obtained under the condition of 200 ℃, 3.19% chitosan, 0.49M sulfuric acid, 5% water content, and 58 min. Finally, the formation yield of ethyl levulinate was tended to enhance by increase of combined severity factor. This result indicated that the potential of chitosan as feedstock for production of chemicals and fuels.

Optimization of Crude Papain Extraction from Papaya Latex Using Response Surface Methodology (반응표면 분석법에 의한 crude papain 추출 조건의 최적화)

  • Oh, Hoon-Il;Oh, Sang-Joon;Kim, Jeong-Mee
    • Korean Journal of Food Science and Technology
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    • v.29 no.3
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    • pp.509-515
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    • 1997
  • Crude papain was extracted from papaya latex under various conditions. Extraction conditions of crude papain were optimized by the response surface methodology (RSM). Extraction yield of papain was affected by concentration of $NaHSO_3$, extraction time and pH. Three independent factors were chosen to determine their effects on the various responses and the function was expressed in terms of a quadratic polynomial equation, which measures the linear, quadratic and interaction effects. According to the results of RSM, the stationary point for quantitatively dependent variable was found to be the maximum point for extraction yield. Optimum conditions of papain extraction were 4% of $NaHSO_3$, 120 min of extraction time and pH 7.6. Under these conditions, 793.16 mg of papain per g latex was extracted from papaya latex.

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Effect of Functionalized Binary Silane Coupling Agents by Hydrolysis Reaction Rate on the Adhesion Properties of 2-Layer Flexible Copper Clad Laminate (이성분계 실란 커플링제의 가수분해속도 조절에 의한 2-FCCL의 접착특성 변화 연구)

  • Park, U-Joo;Park, Jin-Young;Kim, Jin-Young;Kim, Yong-Seok;Ryu, Jong-Ho;Won, Jong-Chan
    • Polymer(Korea)
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    • v.35 no.4
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    • pp.302-307
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    • 2011
  • The parameters of silanol formation reaction of organosilane including solvent type, solution concentration, pH and hydrolysis time influence the adhesion property of 2 layer flexible copper clad laminate (FCCL). Especially, the hydrolysis reaction time of silane coupling agent affects the formation of the silanol groups and their self-condensation to generate oilgomeric structure to enhance the surface treatment as an adhesive promoter. In our study, we prepared the binary silane coupling agents to control hydrolysis reaction rate and surface energy after treatment of silane coupling agents for increasing the adhesive property between a copper layer and a polyimide layer. The surface morphology of rolled copper foil, as a function of the contents of the coated binary silane coupling agent, was fully characterized. As fabricated 2-layer FCCL, we observed that adhesive properties were changed by hydrolysis rate and surface energy.

Accuracy Analysis for Velocity Measurement of Microwave Water Surface Current Meter Considering Yaw Angle and Illuminated Area (편각과 측정영역을 고려한 전자파표면유속계의 유속 측정 정확도 분석)

  • Son, Geunsoo;Kim, Dongsu;Kim, Kyungdong;Kim, Seojun
    • Proceedings of the Korea Water Resources Association Conference
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    • 2016.05a
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    • pp.100-100
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    • 2016
  • 전자파표면유속계는 대표적인 비접촉식 계측기기로 최근 유량조사를 위해 활발하게 활용되고 있다. 국내에서 사용되고 있는 전자파표면유속계는 평수기 저유속에서도 측정이 가능하고 편각 측정이 가능하도록 개발되어 한 측정 지점에서 다 지점의 유속이 측정이 가능해 평수기 홍수기에 비교적 적은 인원으로 빠른 시간에 유량측정이 가능하다. 하지만 국내의 경우 전자파표면유속계가 과연 얼마만큼의 정확한 유속을 측정하는지에 대한 분석이 다소 부족한 실정으로 특히, 실제 하천에서 정확한 분석은 수행되지 않은 상태에서 유량 측정에 사용되고 있다. 전자파표면유속계를 실제 하천에서 사용할 경우 발생 할 수 있는 오차의 요인으로는 교량과 같이 높은 지점에서 측정을 수행할 경우 측정영역(Footprint or Illuminated area)에 따른 오차가 발생할 수 있는 가능성이 있고, 동일 측정 지점에 대해 수직각과 편각에 변화에 따른 유속 측정 오차가 발생할 수 있다. 이에 본 연구에서는 국내에서 개발된 Mutronics사의 전자파표면유속계(MWSCM; Microwave Water Surface Current Meter)에 레이저포인터를 부착하여 표면유속 약 0.5m/s ~ 1m/s의 자연 하천과 매우 유사한 실제 소하천 규모의 한국건설기술연구원 안동실험센터 직선하천에서 수직각(Tilt angle) 및 편각(Yaw angle)을 변화시켜가며 유속를 측정하였다. 그리고 측정된 결과를 활용하여 수직각과 편각의 변화에 따른 전자파표면유속계의 측정영역을 검토하였고, 동일한 측정 지점에 micro-ADV를 이용해 측정된 연직유속분포를 외삽하여 산정된 표면유속과 비교하여 전자파표면유속계의 측정 정확도를 분석하였다. 분석결과, 수직각(Tilt angle) 15도 이하에서는 유속 측정의 정확도가 떨어지는 것으로 나타났고, 편각(Yaw angle)이 커질수록 측정영역이 커지게 되어 변동 계수가 증가하는 것으로 나타났다. 그리고 전자파표면유속계의 측정 오차는 측정영역에 민감하게 반응하는 것으로 나타나 실제 전자파표면유속계를 이용한 유량측정 시 측정영역을 고려한 측정이 수행되어야 할 것으로 판단된다.

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Morphology Evolution of GaAs(100) Surfaces during Inductively Coupled Plasma Etching at Biased Potential (유도결합 플라즈마 식각시 bias에 의한 GaAs(100) 표면의 형태 변화)

  • Lee, Sang-Ho
    • Journal of the Korean Vacuum Society
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    • v.16 no.4
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    • pp.250-261
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    • 2007
  • We present the morphological evolution at different source powers in the ion-enhanced etching of GaAs(100) in $BCl_3-Cl_2$ plasma. With little ion bombardment at floating potential, the surface develops <110> ridges and {111} facets, as it does in purely chemical etching. Higher source power (900 W) produces well developed crystallographic surfaces while lower source power (100 W) produces poorly developed crystallographic surfaces. This is attributed to the availability of excited reactive species (chlorine atoms) depending on source powers. With more concentration of the reactive species at higher source powers, the surface of GaAs(100) would be a surface that is expected from thermodynamics while the surface morphology would be determined by sputtering in the lack of reactive species. Statistical analysis of the surfaces, based on scaling theory, revealed two spatial exponents: one (smaller than one) is formed by atomic scale mechanisms, the other (larger than one) is formed by larger scale mechanisms which is believed to develop facets. When samples are biased, the surfaces experienced bombardment resulting in suppression of ridge formation at high source power and islands formation at low source power.

A Study on Plasma Etching Reaction of Cobalt for Metallic Surface Decontamination (금속 표면 제염을 위한 코발트의 플라즈마 식각 반응 연구)

  • Jeon, Sang-Hwan;Kim, Yong-Soo
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.6 no.1
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    • pp.17-23
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    • 2008
  • In this study, plasma processing of metal surface is experimentally investigated to enhance the surface decontamination efficiency and to find out the reaction mechanism. Cobalt, the major contaminant in the nuclear facilities, and three fluorine-containing gases, $CF_4/O_2$, $SF_6/O_2$, and $NF_3$ are chosen for the investigation. Thin metallic disk specimens are prepared and their surface etching reactions with the three plasma gases are examined. Results show that the maximum etching rate of $17.2\;{\mu}m/min.$ is obtained with NF3 gas at $420^{\circ}C$, while with $CF_4/O_2$, $SF_6/O_2$ gas plasmas those of $2.56\;{\mu}m/min.$ and $1.14\;{\mu}m/min.$ are obtained, respectively. Along with etching experiments, constituent elements of the reaction products are identified to be cobalt, oxygen, and fluorine by AES (Auger Electron Spectroscopy) analysis. It turns out that the oxygen atoms are physically adsorbed ones to the surface from the ambient not participation ones during the analysis after reaction, which supports that the surface reaction of cobalt is mainly to be a fluorination reaction.

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Solid state reaction between Titanjum dixide and Barium Carbonate (이산화 티타늄 ($TiO_2$) 과 탄산 바륨 ($BaCO_3$) 간의 고체상태 반응)

  • Lee, Sang-Beom;Son, Byeong-Chan
    • The Journal of Natural Sciences
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    • v.1
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    • pp.33-45
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    • 1987
  • $BaCO_3$ 와 다양한 입자크기의 $TiO_2$ 의 고체상태 반응을 산소 ( 혹은 공기 ) 와 이산화탄소 중에서 열중량 분석법 (TG) 과 시차 열분석법 (DTA) 를 이용하여 반응속도론 및 반응기구를 조사하였다. 중간생성물과 최종생성물의 확인은 X-ray 회절 분석법 (XRD) 을 이용하였다. $TiO_2$ 의 반응성은 입자의 크기가 $0.15\mum$이하일 때 현저히 증가하였다. 반응초기에 $BaTiO_3$ 는 반응물의 접촉표면에서 생기기 시작하며 반응의 진행과정은 Jander 에 따라 확산조절과정이 된다. 반응과정에서 BaO-$TiO_2$ 의 상평형도에 기술된 화합물들이 중간물질로써 나타난다. 공기중에서는 상당한 양의 $Ba_2$$TiO_4$ 가 생성되지만 $CO_2$ 의 분위기에서는 약 $1100^{\circ}C$까지 억제된다. 이 온도는 열역학적 계산치인 $1060\pm$ $50^{\circ}C$와 잘 일치하고 있다. 확산과정의 활성화 에너지 값은 공기중에서는 56.4Kcal/mol 이었으며 이산화탄소의 경우에서는 79.6Kacl/mol 이었다.

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Spectroscopic Analysis on the Michael Addition Reaction between Secondary Amino Group Containing Silica Nanoparticles with (Meth)acrylate Monomers (2차 아미노기를 갖는 실리카 나노입자와 (메타)아크릴레이트 단량체와의 마이클 부가반응에 대한 분광학적 분석)

  • Jeon, Ha-Na;Ha, Ki-Ryong
    • Polymer(Korea)
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    • v.36 no.5
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    • pp.668-676
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    • 2012
  • In this study, we modified silica nanoparticles with bis[3-(trimethoxysilyl)propyl]amine (BTMA) silane coupling agent to introduce secondary amino groups on the silica surface. After modification of silica, we investigated effects of different types of (meth)acrylate group containing monomers on the Michael addition reaction to introduce reactive (meth)acrylate groups on the BTMA modified silica surface. We used two kinds of (meth)acrylate monomers, trimethylolpropane ethoxylate triacrylate (TMPET) which has three identical acrylate groups, and 3-(acryloyloxy)-2-hydroxypropyl methacrylate (AHM) which has one acrylate and one methacrylate group. We used fourier transform infrared spectroscopy (FTIR), elemental analysis (EA) and solid state cross-polarization magic angle spinning (CP/MAS) nuclear magnetic resonance spectroscopy (NMR) to understand reactions between NH groups on the silica surface with (meth)acrylate groups of TMPET and AHM monomers. We found almost complete Michael addition reaction between all three acrylate groups of TMPET with NH groups on the BTMA modified silica. But, for the AHM treatment of BTMA modified silica, we found Michael addition reaction occurred only between acrylate groups of AHM and NH groups of silica surface, not between methacrylate groups of AHM and NH groups of BTMA modified silica surface.

Effects of Retort Sterilization on Quality Characteristics of the Imitation Crab Leg (레토르트 살균처리가 게맛어묵의 품질특성에 미치는 영향)

  • Kang, Jin-Yeong;Yun, Jae-Ung;Hwang, Seok-Min;Kang, Jeong-Gu;Kim, Nam-Woo;Oh, Kwang-Soo
    • Journal of agriculture & life science
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    • v.44 no.6
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    • pp.147-157
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    • 2010
  • This study was carried out to develop the normal temperature-circulatable retort sterilized imitation crab leg (RSIC) with long shelf-life by retort sterilization. We have examined the optimum retort sterilization conditions and quality characteristics of the RSIC. Central composite design for response surface methodology (RSM) was adopted for optimization of retort sterilization, and experimental central composite design consisted of 11 samples such as 4 factorial points; 4 star points; 3 central points. Sterilization temperature and $F_0-value$ for retort sterilization were chosen for independent variables, and shearing force, whiteness and sensory score about texture were selected as a dependent variable. As a results of RSM analysis, multiple response optimization for the RSIC by Minitap statistical programing was $F_0-value$ 3.3 min. at $117.5{^{\circ}C}$. Also RSM analysis indicated such as sterilization temperature during retort sterilization was the most influential factor, while $F_0-value$ little affected on quality of the RSIC.