• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.219-223
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• 2005

Nowadays laser cutting is the most promising method of cutting FPD(Flat Panel Display) glass in mass-production line. And this method can also be used to cut other brittle materials such as quartz, sapphire, ceramic and semiconductor The concept of this method is shown in picture 1. Laser beam heats glass up to strain point, not to melting point and cooling system chills glass to induce maximun thermal stress in glass surface and then the thermal stress generates micro thermal crack, in other words blind depth of crack, along laser beam and cooling line.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.63-66
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• 2005

A soft error rate neutrons is a growing problem for integrated circuits with technology scaling. In the acceleration test with high-density neutron beam, a latch-up prohibits accurate estimations of the soft error rate (SER). This paper presents results of analysis for the latch-up characteristics in the circumstance corresponding to the acceleration SER test for SRAM. Simulation results, using a two-dimensional device simulator, show that the deep p-well structure has better latch-up Immunity compared to normal twin and triple well structures. In addition, it is more effective to minimize the distance to ground power compared with controlling a path to the $V_{DD}$ power.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.67-72
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• 2005

The bonding structure of organic materials such as fluorinated amorphous carbon films was classified into two types due to the chemical shifts. The electrical properties of fluorinated amorphous carbon films also showed very different effect of two types notwithstanding a very little difference. Fluorinated amorphous carbon films with the cross-link breakage structure existed large leakage current resulting from effect of the electron tunneling. Increasing the cation due to the electron-deficient group increased the barrier height of the films with the cross-link amorphous structure, therefore the electric characteristic of the final materials with low dielectric constant was also improved. The lowest dielectric constant is 2.3 at the sample with the cross-link amorphous structure.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.134-138
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• 2005

Recently many researches related with biotechnology are processed and it is the situation that research about micro fluidic devices is active. Micro fluidic devices has been one of the most widely used devices for the analysis in biotechnology because they have many advantages, flexibility, transparency, thermal and electrical stability, nontoxic, etc. In this study, micro fluidic device with PDMS is developed for particle counter which separates a small quantity of particles, The principle of micro particle counter is electrical-impedance method, and it was also applied hydrodynamic flow focusing. It is more efficient method to analyzing particles furthermore it can be applied to cell count ins for biotechnology.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.157-162
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• 2005

The wafer's size has been increased up to 300mm according as the devices have been integrated sophisticatedly. For this process to make 300mm-wafer, it is required strict level which removes the particulates on the surface of wafer. Therefore we need new type wet-station which can reduce DI water and chemical in the cleaning process. Moreover, it is very important to control the temperature and the concentration of chemical wet-stat ion. The chemical supply system which is used currently is not only difficult to make a fit mixing rate of chemical in cleaning process, but also it is difficult to make fit quantity and temperature. We propose new chemical supply system, which overcomes the problems via analysis of fluid and thermal transfer on chemical supply system,

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.173-179
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• 2005

본 연구에서는 Nickel-Metal Induced Lateral crystallization(Ni-MILC)에 depart에 따른 영향을 관찰함에 있어 Nickel에 Palladium Metal을 인접시켜(Pd assisted Ni-MILC) 그 결정화 속도를 향상시키는 방법을 제안하였다. a-Si에 Phosphorous가 doping 되어 있는 경우 Ni-MILC의 성장은 intrinsic에 비해 2.5배 감소되는 반면, Boron을 doping한 경우 Ni-MILC의 성장은 intrinsic의 경우보다 5배 이상의 성장을 보이게 되는데, well type의 Pd을 인접시킨 경우 Pd에 의해 유도된 tensile stress가 각 doping에 따른 성장 속도를 더욱 증대시키는 것을 확인할 수 있었으며, 이와 같은 현상을 MILC mechanism으로 설명하였다. 이는 Ni-MILC를 이용하여 다결정 실리콘 TFT 제작 시 결정화 속도로 인하여 문제가 되었던 N-type에서의 적용이 가능함과 동시에 contact MILC 등의 방법에도 이용가능성을 의미한다.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.163-167
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• 2005

대부분의 사람들은 자신이 높은 창의성을 갖기를 원한다. 그러나 현실은 창의성을 설명한 실용적인 책이나 교육시설이 거의 없다. 최근 창의성을 높이는 새로운 방법으로 "창의적 문제해결 이론"인 트리즈가 많이 소개되고 있다. 많은 시간과 돈을 투자하여 트리즈 교육을 받는 기관과 사람들이 늘고 있다. 그들은 트리즈적 창의성 교육에 많은 기대를 하고 있다. 하지만 현재의 트리즈는 공부하기에 너무 복잡하고 실용적이지 못하다. 때문에 트리즈를 공부하는 많은 사람들은 쉽게 배우고 활용할 수 있는 실용적인 트리즈를 원한다. 본고에서는 연구 개발자 또는 학생들에게 트리즈의 창의성을 짧은 시간에 교육시키고 활용하게 할 수 있는 실용 트리즈 교육을 위한 요소-상호작용 모델의 개요와 적용 사례를 설명하고자 한다.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.72-74
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• 2002

A submicron contact scheme using $WN_x$ diffusion barrier has been suggested for multilevel interconnect structure. The contact resistance of $0.4\times0.48\mu\textrm{m}^2$ size Al/WN/Ti/$n^+$-Si is 120-140 $\Omega$ and the leakage current density is below than $10^{-16}$$-10^{-15}A/\mu\textrm{m}^2$. The effect of F atoms on the submicron contact has been investigated with the nuclear resonance analysis method.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.75-78
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• 2002

CNTs have been grown by the thermal CVD process in which $C_{2}H_{2}$ gas was deposited on the Fe - $Al(OH)_3$ mixture pretreated by mechanochemical treatment with a high energy mixer mill. As the duration time of grinding fer $Fe-(Al(OH)_3$ mixture by the mixer mill increased, amorphous $Al(OH)_3$ and more smaller Fe particles agglomerated into spheres. With unground and ground mixtures of $Fe-Al(OH)_3$, CNTs were grown at $700^{\circ}C$. As a result, CNTs grown on ground mixtures have more uniform diameter and morphology than those of unground mixture. The characterization of $Fe-Al(OH)_3$ mixture and as-grown CNTs were done by XRD, SEM and TEM.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.12-17
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• 2003

We develop Mueller-matrix spectroscopic ellipsometry based on dual compensator configuration. This technique is very powerful for measuring surface anisotropy in nano-scale, especially when materials show depolarization. Dual-rotating compensator configuration is adopted with the rotational ratio of 5:3 originally developed by Collins et al [1]. The instrument can provide 250-point spectra over the wavelength range from 230 nm to 820 nm in one irradiance waveform with minimum acquisition time of $Tc{\approx}10 s$. In this work, the results obtained in transmission modes are presented for the initial attempt. We present calibration procedures to diagnose the system from the utilize data collected in transmission mode without sample. We expect that the instrument will have important applications in thin films and surfaces that have anisotropy and inhomogeneity.