• 센서학회지
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• 제31권2호
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• pp.107-114
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• 2022

The effects of ring radius and coupling spacing on the free spectral range (FSR), full width at half maximum (FWHM), quality factor, and sensitivity of single-channel and add-drop channel slot ring resonators were systematically investigated using FIMMPROP and PICWAVE numerical software. The single-channel ring resonator exhibited better characteristics, namely, a wider FSR and narrower FWHM compared with the add-drop structure; thus, it was evaluated to be more suitable for biochemical sensors. The FSR, FWHM, quality factor, and sensitivity for a single channel ring resonator with a radius of 59.4 ㎛ and coupling gap of 0.5 ㎛ were 2.4 nm, 0.087 nm, 17677, and 550 [nm/RIU], respectively.

• 센서학회지
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• 제30권3호
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• pp.131-138
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• 2021

The optimization of the specifications of vertical silicon on insulator (SOI) slot optical waveguides suitable for integrated-optical biochemical sensors was performed through computational analysis of the confinement factor of the guided mode distributed in the slot in addition to analytical examination of the TE mode. The optimized specifications were confirmed based on sensitivity in terms of the change in the refractive index of the biochemical analyte. When the slot width, rail width, and height were set to 120 nm, 200 nm, and 320 nm, respectively, the confinement factor was evaluated to be about 56% and the sensitivity was at least 0.9 [RIU/nm].

• 센서학회지
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• 제31권5호
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• pp.353-359
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• 2022

This study investigated via computational analysis the application utility of series-cascaded ring resonators based on silicon-on-insulator (SOI) slot optical waveguides in integrated optical biochemical sensors. The radii of the two rings in the series-cascaded ring resonators were 59.4 ㎛ and 77.6 ㎛ respectively, and the coupling distance was 0.5 ㎛. The series-cascaded ring resonators were computationally analyzed using FIMMProp and PICWave numerical software. The free spectral range (FSR), full width at half maximum (FWHM), sensitivity, and quality-factor (Q-factor) of the series-cascaded ring resonators were 12.2 nm, 0.134 nm, 4100 nm/RIU, and 11580, respectively, and the measurement range was calculated to be slightly smaller than 3×10^-3 RIU. Although the measurement range was smaller than that of the single ring resonator, upon considering other characteristic parameters, the series-cascaded ring resonators are found to be more effective as integrated sensors than single ring resonators.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1767-1772
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• 2008

A microcantilever is a well-known MEMS structure for sensing bio-chemical molecules. When bio-chemical molecules are adsorbed on the microcantilever's surface, resonance frequency shift is generated. There are two issues in this phenomena. The first one is which one between mass change and surface stress change effects is more dominant on the resonance frequency shift. The second one is what will be the performance change when the boundary condition is changed from cantilevers to double clamped beams. We have studied the effect of surface stress change and compared it with that of mass change by using FEM analysis. Furthermore, for microstructures having different boundary conditions, we have studied Q-factor, which determines the detection limit of micro/nano mechanical sensors.

• 센서학회지
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• 제30권3호
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• pp.139-147
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• 2021

Numerical analysis was performed using FIMMWAVE to optimize the specifications of Si₃N₄/SiO₂ slot and ridge-slot optical waveguides based on confinement factor and effective mode area. The optimized specifications were confirmed based on sensitivity in terms of the refractive index of the analyte. The specifications of the slot optical waveguide, i.e., the width of the slot and the width and height of the rails, were optimized to 0.2 ㎛, 0.46 ㎛, and 0.5 ㎛ respectively. When the wavelength was 1.55 ㎛ and the refractive index of the slot was 1.3, the confinement factor and effective mode area of 0.2024 and 2.04 ㎛², respectively, were obtained based on the optimized specifications. The thickness of the ridge and the refractive index of the slot were set to 0.04 ㎛ and 1.1, respectively, to optimize the ridge-slot optical waveguide, and the confinement factor and effective mode area were calculated as 0.1393 and 2.90 ㎛², respectively. When the confinement coefficient and detection degree of the two structures were compared in the range of 1 to 1.3 of the analyte index, it was observed that the confinement coefficient and sensitivity were higher in the ridge-slot optical waveguide in the region with a refractive index less than 1.133, but the reverse situation occurred in the other region. Therefore, in the implementation of the integrated optical biochemical sensor, it is possible to propose a selection criterion for the two parameters depending on the value of the refractive index of the analyte.

• 센서학회지
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• 제32권4호
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• pp.223-231
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• 2023

An integrated-optical biochemical sensor structure that can perform homogeneous and surface sensing using a 2×2 balanced-bridge Mach-Zehnder interference structure based on the optimized SOI slot optical waveguide was described, and its performance and characteristics were evaluated. Equations for the two output optical powers were derived and examined using the transfer matrices of a 3-dB coupler and phase shifter (channel waveguide). The length of the 3-dB coupler was determined such that the two output optical powers were same using these formulas. In homogeneous sensing, the effect of the refractive index of an analyte in the range of 1.33-1.36 on the two output optical power distributions was numerically derived, and the sensitivity was calculated based on each output and the difference between the two outputs, the former and the latter being 7.5796-19.0305 [au/RIU] and 15.2601-38.1351 [au/RIU], respectively. In the case of surface sensing, the sensitivity range of the refractive index of 1.337 based on each of the two outputs was calculated as -2.2490--3.5854 [au/RIU] and 1.2194-3.8012 [au/RIU], and the sensitivity range of 4.8048-7.0694 [au/RIU] was confirmed based on the difference between the two outputs.