Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Application Utility Analysis of Series-cascaded Ring Resonators Based on SOI Slot Optical Waveguides in Integrated Optical Biochemical Sensor

SOI 슬롯 광도파로 기반 캐스케이드 링 공진기 바이오·케미컬 집적광학 센서의 효용성 해석

  • Jang, Jaesik (Department of Electronic & Computer Engineering, Graduate School, Hongik University) ;
  • Jung, Hongsik (Department of Electronic & Computer Engineering, Graduate School, Hongik University)
  • 장재식 (홍익대학교 대학원 전자전산공학과) ;
  • 정홍식 (홍익대학교 대학원 전자전산공학과)
  • Received : 2022.09.19
  • Accepted : 2022.09.26
  • Published : 2022.09.30
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Abstract

This study investigated via computational analysis the application utility of series-cascaded ring resonators based on silicon-on-insulator (SOI) slot optical waveguides in integrated optical biochemical sensors. The radii of the two rings in the series-cascaded ring resonators were 59.4 ㎛ and 77.6 ㎛ respectively, and the coupling distance was 0.5 ㎛. The series-cascaded ring resonators were computationally analyzed using FIMMProp and PICWave numerical software. The free spectral range (FSR), full width at half maximum (FWHM), sensitivity, and quality-factor (Q-factor) of the series-cascaded ring resonators were 12.2 nm, 0.134 nm, 4100 nm/RIU, and 11580, respectively, and the measurement range was calculated to be slightly smaller than 3×10-3 RIU. Although the measurement range was smaller than that of the single ring resonator, upon considering other characteristic parameters, the series-cascaded ring resonators are found to be more effective as integrated sensors than single ring resonators.

Keywords

Acknowledgement

이 논문은 한국연구재단 이공학개인기초연구(2018-R1D1A1B07049908) 연구비 지원으로 수행되었습니다.

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