Browse > Article
http://dx.doi.org/10.46670/JSST.2021.30.3.139

Specification optimization and sensitivity analysis of Si3N4/SiO2 slot and ridge-slot optical waveguides for integrated-optical biochemical sensors  

Jang, Jaesik (Dept. of Electronics and Computer Engineering, Graduate School, Hongik Unversity)
Jung, Hongsik (Dept. of Electronics and Computer Engineering, Graduate School, Hongik Unversity)
Publication Information
Journal of Sensor Science and Technology / v.30, no.3, 2021 , pp. 139-147 More about this Journal
Abstract
Numerical analysis was performed using FIMMWAVE to optimize the specifications of Si3N4/SiO2 slot and ridge-slot optical waveguides based on confinement factor and effective mode area. The optimized specifications were confirmed based on sensitivity in terms of the refractive index of the analyte. The specifications of the slot optical waveguide, i.e., the width of the slot and the width and height of the rails, were optimized to 0.2 ㎛, 0.46 ㎛, and 0.5 ㎛ respectively. When the wavelength was 1.55 ㎛ and the refractive index of the slot was 1.3, the confinement factor and effective mode area of 0.2024 and 2.04 ㎛2, respectively, were obtained based on the optimized specifications. The thickness of the ridge and the refractive index of the slot were set to 0.04 ㎛ and 1.1, respectively, to optimize the ridge-slot optical waveguide, and the confinement factor and effective mode area were calculated as 0.1393 and 2.90 ㎛2, respectively. When the confinement coefficient and detection degree of the two structures were compared in the range of 1 to 1.3 of the analyte index, it was observed that the confinement coefficient and sensitivity were higher in the ridge-slot optical waveguide in the region with a refractive index less than 1.133, but the reverse situation occurred in the other region. Therefore, in the implementation of the integrated optical biochemical sensor, it is possible to propose a selection criterion for the two parameters depending on the value of the refractive index of the analyte.
Keywords
Slot waveguide; Ridge-slot waveguide; Integrated-optical sensor; Confinement factor; Effective mode area; Sensitivity;
Citations & Related Records
연도 인용수 순위
  • Reference
1 M. Kong, Y. Liu, Y. Jiang, C. Liu, and Y. Wang, "Transverse magnetic modes in planar slot waveguides", J. Opt. Soc. Am. B, Vol. 32, No. 10, pp. 2052-2060, 2015.   DOI
2 M. Kong, Y. Liu, and Y. Jiang, "Transverse electric modes in planar slot waveguides", J. Mod. Opt., Vol. 65, No. 1, pp. 111-118, 2017.   DOI
3 https://www.rp-photonics.com/effective_mode_area (retrived on Mar. 6, 2006)
4 H. Zengzhi, Y. Zhang, C. Zeng, D. Li, M. S. Nisar, J. Yu, and J. Xia, "High confinement Factor ridge slot waveguide for optical sensing", IEEE Photonics Tech nol. Lett., Vol. 27, No. 22, pp. 2395-2398, 2015.   DOI
5 C. A. Barrios, "Analysis and modeling of a silicon nitride slot-waveguide microring resonator biochemical sensor", Proc. SPIE., Vol. 7356, Prague, Czech Republic, 2009.
6 X. Wang, S. Grist, J. Flueckiger, N. A. G. Jaerger, and L. Chrostowski, "Silicon photonis slot waveguide bragg gratings and resonators", Opt. Express, Vol. 21, pp. 19029-19039, 2013.   DOI
7 T. Dar, J. Homola, B. M. A. Rahman, and M. Rajarajan, "Label-free slot-waveguide biosensor for the detection of DNA hybridization", Appl. Opt., Vol. 51, No. 34, pp. 8195-8202, 2012   DOI
8 V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, "Guiding and confining light in void nanostructure", Opt. Lett., Vol. 29, No. 11, pp. 1209-1211, 2004.   DOI
9 Q. Xu, V. R. Almeida, R. R. Panepucci, and M. Lipson, "Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material," Opt. Lett., Vol. 29, No. 14, pp. 1626-1628, 2004.   DOI
10 C. A. Barrios, B. Sanchez, K. B. Gylfason, A. Griol, H. Sohlstrom, M. Holgado, and R. Casquel, "Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform", Opt. Express, Vol. 15, No. 11, pp. 6846-6856, 2007.   DOI
11 P. Lambeck, "Integrated optical sensors for the chemical domain", Meas. Sci. Technol., Vol. 17, No. 8, pp. 93-116, 2006.   DOI
12 A. kargar and C. Y. Chao, "Design and optimization of waveguide sensitivity in slot microring sensor", J. Opt. Soc. Am. A. Op.t Image. Sci. Vis., Vol. 28, No. 4, pp. 596-603, 2011.   DOI
13 A. P. Timbo, P. V. F. Pinto, H. A. Pinho, L. P. de Moura, J. B. Chretien, F. W. Viana, and G. de Freitas Guimaraes, "pH optical sensor based on thin films of sol-gel with bromocresol purple", Sens. Actuators B Chem., Vol. 223, No. C, pp. 406-410, 2016.   DOI
14 Y. Fang, C. Bao, Z. Wang, Y. Liu, L. Zhang, H. Huang, Y. Ren, Z. Pan, and Y. Yue, "Polarization beam splitter based on Si3N4/SiO2 horizontal slot waveguides for On-chip highpower applications", Sensors, Vol. 20, No. 10, pp. 1-13, 2020.   DOI
15 C. A. Barrios, K. B. Gylfason, B. Sanchez, A. Griol, H. Sohlstrom, M. Holgado, and R. Casquel, "Slot-waveguide biochemical sensor", Opt. Lett., Vol. 32, No. 21, pp. 3080-3082, 2007.   DOI
16 T. Fujisawa and M. Koshiba, "Polarization-independent optical directional coupler based on slot waveguides," Opt. Lett., Vol. 31, No. 1, pp. 56-58, 2006.   DOI
17 P. Damborsky, J. Svitel, and J. Katrlik, "Optical biosensor", Essays Biochem., Vol. 60, No. 1, pp. 91-100, 2016.   DOI
18 J. Hodgkinson and R. P. Tatam, "Optical gas sensing : a review", Meas. Sci. Technol., Vol. 24, No. 1, pp. 1-59, 2013.