• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.1
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• pp.73-76
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• 2010

The issue of inspection and characterization of microstructures has emerged as a major consideration in design, fabrication, and detection of MEMS devices. However, the conventional measurement techniques, including scanning electron microscopy (SEM) imaging, atomic force microscopy (AFM) scanning, and mechanical surface profiler, require often destructive process or may be difficult to measure with a wafer scale. In this paper, we characterize the surface profiles of microstructures using an optical scanner based on a DVD pick-up module. Scanning images of the microstructures are successfully generated using the intensity of reflected light from different depths of the surface profiles, based on the focus error signal (FES) from photodiodes. It is shown that the proposed optical scanner can be used as an alternative measurement system with high performance and low cost, compared to conventional measurement techniques.

• Journal of the KSME
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• v.44 no.12
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• pp.51-55
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• 2004

이 글에서는 AFM을 이용한 미소 구조물의 기계적 물성 측정 방법 중 기계적 물성 측정을 위한 대칭형 AFM 캔틸레버의 고안, 제작, 보정 및 측정 방법을 중심을 기술한다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.5
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• pp.1363-1371
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• 1996

This paper presents the design, fabrication, and testing of polysilicon electrostatic microactuators that resonate in the direction parallel to the silicon susbstrates. A set of six different designs has been developed using a theoretical model and design formulae developed for the mocroactuators. Microactuator prototypes are fabricated from a 2.1 $\mu{m}$-thick LPCVD polysilicon film, using a 4-mask surface-micromachining process. The prototypes are tested under a d.c. bias voltage of 45V with an a.c. drive voltage amplitude of 20 v.Measured resorant frequencies are in the ranges of 40-60 kHz, showing a good agreement to their theoretical estimates within error bounds of .$\pm$.5%. Important issues inthe design and microfabrication of the microactuators are discussed, together with potential applicaitons of the key technology involved.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.14-14
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• 2004

전자 공학 분야의 발전으로 인해 작은 구조물을 제작할 수 있는 리소그라피 (lithography) 기술이 급속하게 발전하고 있으며, 보다 작은 구조물에 대한 수요도 빠르게 증가하고 있다. 지난 수십 년간 반도체 분야에 적용 되어온 Moore's law에 의하면, 수년 내에 수십 나노 미터 크기의 특성 길이 (Critical Dimension)를 지닌 구조물을 이용하여 소자가 제작될 것 이 예견되고 있다. 반도체 공정을 응용하여 작은 구조물을 제작하는 기술은, 전자 공학 분야뿐만 아니라 광전자공학(optoelectronics) 분야, 양자 계산(quantum computing) 분야, 양자 계산(quantum computing) 분야, MEMS/NEMS, 바이오 센서(biosensor)분야 등에 다양한 응용성을 가질 것으로 예상된다.(중략)

• The Journal of the Acoustical Society of Korea
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• v.27 no.4
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• pp.183-190
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• 2008

In this paper, radiation characteristics of the beating sound are analytically investigated on a slightly asymmetric cylindrical shell. The cylindrical shell isan efficient model to consider the beat characteristics of Korean bells. Slight asymmetry in Korean bells makes mode pair which has close frequency components and the interaction of each mode pair produces beating sound. Based on the analytical model, the radiated sound field is determined. Using the sound beat map, the beating sound vs. direction and distance is investigated. Finally, results of the theoretical method are compared with those of the boundary element method to verify the validity.

• Journal of the Korean Society for Nondestructive Testing
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• v.21 no.2
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• pp.213-226
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• 2001

최근 가속화되어 가는 산업발전으로 인하여 산업구조물 및 기계 부품의 안정성 및 비파괴 검사에 대한 요구가 크게 대두되고 있다. 이는 곧 산업구조물 및 제품의 품질 향상을 위한 기존의 검사방법으로는 제품의 완성도를 높이기 어렵다는 것을 의미하며, 제품의 질을 향상시키기 위해서는 새로운 비파괴 평가방법이 필요하다는 것을 의미한다. 또한 모든 구조물의 보수 유지 및 안전성 진단의 차원에서 모든 산업적 구조물의 변형과 응력, 진동모드, 미소3차원 형상에 대한 평가 및 해석은 구조물의 수명과 관계되어 그 중요성이 크다 할 수 있다. 이에 본고에서는 기존의 비파괴검사 방법들이 많은 장점이 있음에도 불구하고, 단점을 극복할 수 있는 평가 기술로서, 고체재료 및 산업구조물 - 기계구조물, 전자 부품, 배관, 토목건축 구조물 등 - 의 변형, 결함, 균열, 응력 등을 검사 및 평가할 수 있는 광학적인 비파괴 평가 방법에 대해 소개하고자 한다.

• Journal of the Korea institute for structural maintenance and inspection
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• v.9 no.1
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• pp.135-145
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• 2005

Geotechnical design routinely requires that in-situ strength, stiffness of the ground be determined. In the working stress conditions, the strain level in a ground experienced by existing structures and during construction is less than about 0.1%~1%. In order to analyze the deformational behavior accurately, the in-situ testing technique which provides the reliable deformational characteristics at small strains, needs to be developed. Cone pressuremeter tests were performed on the western off-shore region of korea, and analyzed using cavity expansion theory and curve fitting technique to obtain the shear modulus at small strain level of $10^{-1}%$. The value of $E_u/S_u$ ratio for the marine clay shows about 589 at the small strain. However the value of $E_u/S_u$ estimated by lab tests are much smaller values ranged from 81 to 91. It is indicated that the curve fitting technique from CPM tests results can be used to obtain the shear modulus at small strain.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.8
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• pp.1259-1265
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• 2003

We present a new post-fabrication frequency tuning method for laterally driven electrostatic microresonators using a DC-biased electrostatic comb array of linearly varied finger-length. The electrostatic tuning force and the equivalent stiffness, adjusted by the DC-biased tuning-comb array, have been formulated as functions of geometry and DC tuning voltage. A set of frequency-turnable microresonators has been designed and fabricated by 4-mask surface-micromachining process. The resonant frequency of the microfabricated microresonator has been measured for a varying tuning voltage at the reduced pressure of 1 torr. The maximum 3.3% reduction of the resonant frequency is achieved at the tuning voltage increase of 20V.

• Journal of the Society of Naval Architects of Korea
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• v.29 no.2
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• pp.140-149
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• 1992

The new method, termed the substructural eigensensitivity synthesis method, utilizes the computational merits of the component mode synthesis technique and of sensitivity analysis for the design sensitivities of the dynamic characteristics of substructurally combined structures. It is shown that the eigensensitivities of the entire structure can be obtained by synthesizing the substructural eigensolution and the sensitivities of the eigensolution for the design variables of the modifiable substructure. The sensitivities of the eigenvalues and eigenvectors obtained by the new method are compared to exact eigensolutions in terms of accuracy and computational efficiency. The small errors in eigensensitivity due to the truncation of higher modes remain within a manageable and permissible range for further analysis. The advantage of the newly proposed method as compared to the direct application of sensitivity analysis of the whole structure is demonstrated through examples.

• Journal of the KSME
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• v.28 no.4
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• pp.387-393
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• 1988

본 SP시험법은 사용되는 시편이 미소하다는 장점 때문에 재질의 평가나 더불어 비파괴검사의 일환으로서 이용할 수 있음을 서명해 왔다. 현존하고 있는 거대구조물들의 잔존수명평가가 요 구되는 있는 지금, 정량적인 경년변화측정방법으로서 SP시험법은 높은 가능성을 내포하고 있는 시험법으로 여겨지며, 이 방법을 현장에 정착시키기 위해선 산. 학. 연의 공동연구체제가 필요 하다고 할 수 있다.