• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.10
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• pp.1039-1045
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• 2007

Ultrasonic machining (USM) is suitable for machining hard, brittle and non-conductive materials such as silicon, glass and ceramics. Usually, when micro holes are machined on glass by USM, roundness of hole entrance is poor and cracks appear around the hole exit. In this paper the machining characteristics were studied for roundness improvement and exit crack prevention. From experiments, the tool bending and the shape of tool tip affect hole roundness. When the tool tip is hemispherical, good roundness of holes was obtained. The feedrate and the rotational speed of the tool affect the exit crack. With the machining conditions of 150 rpm in spindle speed and $0.5\;{\mu}m/s$ in feedrate, micro holes with less than $100\;{\mu}m$ in diameter were machined without an exit crack.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.231-234
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• 2002

Ultrasonic machining technology has been developed over recent years for the manufacture of cost-effective and quality-assured precision parts for several industrial application such as optics, semiconductors, aerospace, and automobile. Ultrasonic machining process is an efficient and economical means of precision machining of ceramic materials. The process is non-thermal, non-chemical and non-electric and hardly creates changes to the mechanical properties of the brittle materials machined. This paper describes the characteristics of the micro-hole of $\textrm{Al}_2\textrm{O}_3$ by ultrasonic machining with tungsten carbide tool. The effects of various parameters of ultrasonic machining, including abrasives, machining force and pressure, on the material removal rate, hole quality, and tool wear presented and discussed. The ultrasonic Machining of micro-holes in ceramics has been under taken and the machining mechanism in the ultrasonic machining of ceramics based on the fracture-mechanics concept has been analyzed.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.6
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• pp.581-589
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• 2004

In this study, the capacitive micromachined ultrasonic transducer(cMUT) was developed based on the previous research results. The cross sectional image of the developed cMUT was characterized. To measure the membrane displacement of the cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was in good agreement with the result of the finite element analysis. To estimate the ultrasonic wave generated by the cMUT, an ultrasonic system including a pulser, receiver and charge amplifier was used. The cMUT developed in this study shows a good performance and hence will be widely used in the non-contact ultrasonic applications.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.12
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• pp.42-49
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• 2007

When micro holes are machined by EDM, machining characteristics of machined holes are changed according to the machining conditions. Typical machining conditions are the kind of dielectric fluids, capacitance and ultrasonic vibrations. They influence electrode wear, machining time, radial clearance and taper angle. In this paper, machined holes whose depths are 300, 500, $1000\;{\mu}m$ are observed for each machining conditions. Using deionized water as a dielectric fluid makes electrode wear small, machining time short, radial clearance large and taper angle small. High capacitance makes electrode wear high. Ultrasonic vibrations make electrode wear large, machining time short, radial clearance small and taper angle small. From the results of experiments, the optimal machining conditions were obtained to machine highly qualified micro holes.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.7 s.172
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• pp.47-53
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• 2005

Microholes with high aspect ratio are required in microstructures. Among various methods for producing the microhole, micro electrical discharge machining (MEDM) is very effective and useful process. But, it is difficult to machine the high aspect ratio holes below $100\;{\mu}m$ in diameter because machining condition becomes unstable due to bad removal of debris at deep hole. In this paper, ultrasonic vibration is applied to MEDM work fluid to make a high aspect ratio micro hole. It is shown that the vibration is effective in circulating the debris and increasing the machining rate. As a result, produced was a micro hole with $92\;{\mu}m$ entrance diameter, $81\;{\mu}m$ exit diameter and aspect ratio 23.

• The Korean Journal of Rheology
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• v.9 no.4
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• pp.190-199
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• 1997

단열용도의 폴리우레탄 미세포 포움의 가공에 대한 연구를 수행하였다. 미세포 구조 를 얻기 위해서는 핵생성율을 증진시키고 균일한 분포의 기포를 생성시켜야 한다. 이를 위 해 이산화탄소 기체를 풀리올과 이소시아네이트에 각각 과포화시키고 충돌혼합하여 초음파 가진을 적용하였다. 이산화탄소 기체가 수지 내부에서 기포 내부로 확산함에 따라 기포의 성장이 조절된다고 가정하고 금형이 충전되는 동안에 금형 내부에서의 기포성장기구를 이해 하기 위하여 수치적인 방법으로 이론적 연구를 수행하였다. 경화 시간과 확산 경계를 고려 하여 최종적인 기포의 크기를 계산하였으며 반응속도론을 고려하여 중합반응동안의 폴리우 레탄의 점도의 변화를 예측하고 경화 시간을 결정하였다. 실험적으로 결정된 기체 분자수를 기준으로 하여 이론적으로 확산경계를 예측하였다. 화학적 발포제인 물과 함께 물리적 발포 제인 이산화탄소를 각각 1,2,3기압의 포화압력으로 변화시키면서 폴리올과 이소시아네이트에 포화시켜 폴리우레탄 포움을 제작하고 제작된 포움의 밀도, 열전도도, 및 기포의 수와 지름 을 측정하였다. 측정된 결과로부터 이산화탄소의 포화압력과 초음파 가진이 포움의 기포핵 생성에 미치는 영향을 살펴보았다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.37 no.2
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• pp.213-218
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• 2013

Ultrasonic machining (USM) is a new method used in metal cutting. This process does not involve heating or any electrochemical effects, causes low surface damage, has small residual stress, and does not rely on the conductivity of the workpiece. These characteristics are suitable for the machining of brittle materials such as glass or ceramics. However, the use of USM for brittle materials generates cracks on the workpiece. Therefore, in this study, Taguchi's method was used to optimize the processing conditions of micro holes drilled in glass and ceramics. This method was used to successfully reduce the number of cracks at the entrance and the exit of the micro holes.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.988-992
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• 2002

Ultrasonic machining technology has been developed over recent years for the manufacture of and quality-assured precision parts for several industrial application such as optics, semiconductors, aerospace, and automobile application. The past decade has seen a tremendous in the use of ceramics in structural application. The excellent thermal, chemical and wear resistance of these material can be realized because of recent improvements in the overall strength and uniformity of advanced ceramics. Ultrasonic machining, in which abrasive particles in slurry with water are presented to the work surface in the presence of an ultrasonic-vibrating tool, is process which should be of considerable interest, as its potential is not limited by the electrical or chemical characteristics of the work material, making it suitable for application to ceramics. This paper intends to further the understanding of the basic mechanism of ultrasonic machining for brittle material and ultrasonic machining of ceramics based in the fracture-mechanic concept has been analyzed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.12-12
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• 1997

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 1996.05a
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• pp.187-193
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• 1996

항공 우주 재료 중에서 알루미늄 합금 재료가 차지하는 비중은 매우 크다. 사용 조건에 적합한 특성을 갖도록 하기 위한 연구 노력 중의 한 가지가 단조품 조직의 미세화이다. 일반적으로 조직을 미세화 하는 방법으로는 I.T.M.T 공법을 적용하고 있으나, 러시아에서는 미세 균일한 조직의 알루미늄 열간 단조품을 제조하기 위하여 billet의 주조 공정에서 초음파 처리(U.S.T)를 적용하고 열간 단조 공정에서는 조직 상태도를 활용하여 성형 단계별 소성 가공량의 조절과 작업 온도를 관리함으로서 미세 균일 조직의 대형 알루미늄 단조품을 생산하고 있다.