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Micro EDM with Ultrasonic Work Fluid Vibration for Deep Hole Machining  

Je Sung Uk (LG전자 생산기술연구원)
Lee Hae Sung (서울대학교 대학원 정밀기계설계공동연구소)
Chu Chong Nam (서울대학교 기계항공공학부)
Kim Duck Whan (서울대학교 기계항공공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.7, 2005 , pp. 47-53 More about this Journal
Abstract
Microholes with high aspect ratio are required in microstructures. Among various methods for producing the microhole, micro electrical discharge machining (MEDM) is very effective and useful process. But, it is difficult to machine the high aspect ratio holes below $100\;{\mu}m$ in diameter because machining condition becomes unstable due to bad removal of debris at deep hole. In this paper, ultrasonic vibration is applied to MEDM work fluid to make a high aspect ratio micro hole. It is shown that the vibration is effective in circulating the debris and increasing the machining rate. As a result, produced was a micro hole with $92\;{\mu}m$ entrance diameter, $81\;{\mu}m$ exit diameter and aspect ratio 23.
Keywords
Micro electrical discharge machining; Ultrasonic vibration; Aspect ratio;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 Yeo, S. H., Tan, L. K., 'Effects of ultrasonic vibrations in micro electro-discharge machining of microholes,' Journal of Micromechanics and Microengineering, Vol. 9., pp. 345-352, 1999   DOI   ScienceOn
2 Masuzawa, T., Fujino, M. and Kobayashi, K., 'Wire electro-discharge grinding for micro machining,' Annals of the CIRP, Vol. 34, pp. 431-424, 1985   DOI
3 Kinsler, L.E., Frey, A.R., Coppens, A.B. and Sanders, J. V., 'Fundamental of acoustics,' John Wiley & Sons, Fourth ed., 1980
4 Cho, P. J., Yi, S. M., Choi, D. K. and Chu, C.N., 'Characteristics of RC circuit with transistor in Micro-EDM,' Journal of the Korean Society of Precision Engineering, Vol. 21, No. 12, pp. 44-51, 2004   과학기술학회마을
5 Masuzawa, T., Tsukamoto, J. and Fujino, M., 'Drilling of deep micro holes by EDM,' Annals of the CIRP, Vol. 38, pp. 195-198, 1989   DOI
6 Masuzawa, T., Kuo, C. L. and Fujino, M., 'Drilling of deep microholes by EDM using additional capacity,' Japan Society of Precision Engineering, Vol. 24, pp. 275-276, 1990
7 Allen, D. M., Huang, S. X., 'The reduction of tool ear and machining time for the micro-electrodischarge machining of micro-holes by using copper vapor laser machining as a roughing process, ' International Journal of Electrical Machining, Vol. 2, pp. 9-11, 1997
8 Kubota, S., Uno, Y., Kuribayashi, H. and Yokomizo, S., 'Fine deep boring of carbide by EDM with YAG laser,' Journal of the Japan Society of Electrical Machining Engineers, Vol. 35., pp. 19-25, 2001   DOI
9 Zhao, W., Wang, Z., Di, S., Chi, G. and Wei, H., 'Ultrasonic and electric discharge machining to deep and small hole on titanium alloy,' Journal of Materials Processing Technology, Vol. 120, pp. 101-106, 2002   DOI   ScienceOn