• 한국정밀공학회지
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• 제24권1호
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• pp.71-78
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• 2007

Abrasive jet machining (AJM) has been traditionally used for removing rusts or paints. Nowadays, this is promising technology for micro bulk machining where brittle substrate materials are used. In order to get accurate details, masks such as metal, polymer or elastomer is inevitable. Among them, photo polymer which is sensitive to the light has been attractive for it's high accuracy using photolithography. In this research, SU-8 as a photo polymer is used since it is adequate for making thick mask. So, this paper describes how to make AJM masks using SU-8 with a photolithography process, and investigates the characteristics of SU-8 masks during AJM process. Also, an example of fabrication using AJM was shown.

• 한국기계가공학회지
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• 제16권2호
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• pp.135-141
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• 2017

An experimental study of micro blasting for a rotating aluminum rod was conducted through the statistical analysis of ANOVA to obtain the effect of blasting conditions. The rotating equipment was designed and constructed with forward and backward moving for helical blasting, but rotation was used in this study. The blasting condition factors were the type of abrasive particle, nozzle diameter, pressure, standoff distance, injection time, etc. The width of the surface, the maximum depth of the sprayed surface, and ANOVA were analyzed by statistical analysis. The results showed that the contributions of the main factors were pressure, nozzle diameter, and injection particle.

• 한국기계가공학회지
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• 제20권10호
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• pp.19-26
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• 2021

In fine-particle injection processing, hard fine particles, such as silicon carbide or aluminum oxide, are injected - using high-pressure air, and a small amount of material is removed by applying an impact to the workpiece by spraying at high speeds. In this study, a two-axis stage device capable of sequence control was developed to spray various shapes, such as circles and squares, on the surface during the micro-particle jetting process to understand the surface-shape micro-particle-processing characteristics. In the experimental device, two stepper motors were used for the linear movement of the two degree-of-freedom mechanism. The signal output from the microcontroller is - converted into a signal with a current sufficient to drive the stepper motor. The stepper motor rotates precisely in synchronization with the pulse-signal input from the outside, eliminating the need for a separate rotation-angle sensor. The major factors of the processing conditions are fine particles (silicon carbide, aluminum oxide), injection pressure, nozzle diameter, feed rate, and number of injection cycles. They were identified using the ANOVA technique on the design of the experimental method. Based on this, the surface roughness of the spraying surface, surface depth of the spraying surface, and radius of the corner of the spraying surface were measured, and depending on the characteristics, the required spraying conditions were studied.

• 한국기계가공학회지
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• 제19권8호
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• pp.88-93
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• 2020

The goal of this study is to determine the influence of major factors on the spiral surface microparticle injection machining of cylindrical specimens by the statistical method ANOVA. Before the experiment, rod-shaped test specimens and jigs for helical surface spraying were prepared, and the surface roughness was measured with a surface roughness meter. The injection particle, nozzle diameter, and injection pressure were the primary parameters of the experiment. Other factors that were considered were injection height, injection time, revolutions, and feed distance. The surface roughness after machining was measured, and the effects of the surface roughness data on the primary factors were determined with ANOVA.

• 한국기계가공학회지
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• 제14권5호
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• pp.126-133
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• 2015

Recently, there has been demand for polymeric porous membranes in various fields, such as environmental engineering, pharmaceutics, tissue engineering, drug delivery, biology, and fuel cells. In this study, it is proposed that a polymer particle-based porous membrane can be fabricated using electrospraying and sintering processes. Electrospraying can fabricate polymeric particles with diameters ranging from several micrometers to tens of nanometers without the cumbersome particle aggregation problem. Additionally, the particles can be sintered through thermo-compression under the glass transition temperature. In this study, a polymethyl methacrylate particle-based porous membrane with an average pore size of less than 500 nm is fabricated using the proposed method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.488-491
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• 2005

Abrasive Jet Micromachining (AJM) is a process that uses high pressure air with micron-sized particles to erode a substrate. It has been considered as the most economic and appropriate technique to pattern glass surfaces for the flat panel applications. To accelerate the industrialization of AJM, it is necessary to understand the erosion mechanisms thoroughly. Thus, this paper introduces a new method to model the erosion mechanism in AJM. The model is developed by using the concept of the accumulation of the microdeformation caused by each particle. And this paper proposes the model added the effects of second impact. The developed model is used to simulate the erosion profile, and is compared with the model considered only first impact. It can be concluded that the proposed model predicts the erosion profile more accurately.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.647-648
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• 2007

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1175-1178
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• 2005

Brittle materials, especially single-crystal silicon wafer, are widely used for sensors, IC industry, and MEMS applications. e general machining process of crack easy materials is by chemical agents, but it is hazardous and time consuming. Also, it is difficult to get high aspect ratio micro structure. As an alternative tool, an AJM(Abrasive jet machining) is promising method in terms of high aspect ratio and production cost. In this study, to get more precise detail compared to general AJM, photo polymer mask, SU-8, used in photolithography was applied in AJM. Process parameters such as abrasive diameter, air pressure, nozzle diameter, flow rate of abrasive in AJM and a variety of conditions in spin coating were decided. Finally, micro channel and mixer was fabricated to see the efficiency of the AJM with photo polymer mask.

• 한국기계가공학회지
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• 제19권8호
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• pp.81-87
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• 2020

A stable rotational-to-linear motion transformation structure using a driving mechanism with 2 degrees of freedom was developed for an orthogonal mechanism to prevent the interference of each axis in 2D motion. In this mechanism, a step motor was used for precise position control. This structure was developed to maneuver workparts in micro particle blast machining experiments. To determine the real-time performance of micro particle blast machining, the control, input, and output were operated simultaneously and precise position control was implemented, using a timer interrupt with multiple execution codes. The two step motors obtained precise position control by removing backlash with a ball-screw mechanism. The device has menu-type control codes for user-friendliness, and real-time sequence control was simultaneously adopted for user control input.

• 소성∙가공
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• 제14권7호
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• pp.587-594
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• 2005

분무성형공정은 급냉응고 및 결정입자 제어에 따른 고품위 소재 개발의 장점과 함께 고밀도 near-net-shape 제품의 제조가 가능한 합금제조기술이다 분무성형체의 미세조직은 적층표면에 도달하는 액적들의 평균 열용량, 즉 고상분율에 의하여 결정되며, 이는 액적의 비행과정에서의 분사가스-액적간의 열전달과 적층표면에서의 열유입과 열유출 속도에 영향을 받는다. 실제 다양한 공정변수들이 복합적으로 미세조직 형성과정에 영향을 미치지만, 균일한 미세조직을 얻기 위하여서는 적층표면에서의 온도와 고상분율을 항상 일정하게 제어하여야만 한다 즉, 적층표면 온도를 분무 성형공정중에 지속적으로 측정하여 이를 공정 제어 시스템에 feedback하여 원하는 적층표면온도를 유지하도록 공정변수를 제어하는 것이 필수적이다. 분무성형에 제조된 성형체는 합금원소의 편석이 없고 미세한 등방성의 결정립으로 이루어진 특징적인 미세조직을 나타낸다 이와 같은 미세조직으로 인하여 분무성형체는 우수한 성형성과 기계가공성을 나타내며, 또한 분무성형-후속가공된 최종 제품은 잉곳주조에 의하여 제조된 것과 비교하여 크게 향상된 기계적 성질을 가진다.