Browse > Article

Characteristics of SU-8 Mask for Abrasive Jet Machining  

Ko, Tae-Jo (영남대학교 기계공학부)
Park, Dong-Jin (영남대학교 대학원 기계공학과)
Kim, Hee-Sool (영남대학교 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.24, no.1, 2007 , pp. 71-78 More about this Journal
Abstract
Abrasive jet machining (AJM) has been traditionally used for removing rusts or paints. Nowadays, this is promising technology for micro bulk machining where brittle substrate materials are used. In order to get accurate details, masks such as metal, polymer or elastomer is inevitable. Among them, photo polymer which is sensitive to the light has been attractive for it's high accuracy using photolithography. In this research, SU-8 as a photo polymer is used since it is adequate for making thick mask. So, this paper describes how to make AJM masks using SU-8 with a photolithography process, and investigates the characteristics of SU-8 masks during AJM process. Also, an example of fabrication using AJM was shown.
Keywords
Abrasive jet machining; Photolithography; Mask; Micro machining; Selectivity;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Pawlowski, A., Belloy, E., Sayah, A. and Gijs, M. A. M., 'Powder blasting patterning technology for micro fabrication of complex suspended structures in glass,' Microelectronic Engineering, Vol. 67-68, pp. 557-565, 2003
2 Park, D., Cho, M., Lee, H. and Cho, W., 'Micro-grooving of glass using micro-abrasive jet machining,' J. of Materials Processing Technology, Vol. 146, pp. 234.240, 2004
3 Slikkerveer, P. J., Bouten, P. C. P., in't Veld, F. H. and Scholten, H., 'Erosion and damage by sharp particles,' Wear, Vol. 217, pp. 237-250, 1998   DOI   ScienceOn
4 Nazmov, V., Shabel'nikov, L., Pantenburg, F. J., Mohr, J., Reznikova, E., Snigirev, A., Snigireva, I., Kouznetsov, S. and DiMichiel, M., 'Kinoform X-ray lens creation in polymer materials by deep X-ray lithography,' Nuclear Instruments and Methods in Physics Research, Vol. 217, pp. 409-416, 2004   DOI   ScienceOn
5 Bogdanov, A. L. and Peredkov, S. S., 'Use of SU-8 photoresist for very high aspect ratio x-ray lithography,' Microelectronic Engineering, Vol. 53, pp. 493-496, 2000   DOI   ScienceOn
6 Achtsnick, M., Drabbe, J., Hoogstrate, A. M. and Karpuschewski, B., 'Erosion behavior and pattern transfer accuracy of protecting masks for micro-abrasive blasting,' J. of Materials Processing Technology, Vol. 149, pp. 43-49, 2004   DOI   ScienceOn
7 Sayah, A., Parashar, V. K., Pawlowski, A. G. and Gijs, M. A. M., 'Elastomer mask for powder blasting microfabrication,' Sensors and Actuator A, Vol. 125, pp. 84-90, 2005   DOI   ScienceOn
8 Park, D. S. and Seo, T. I., 'Machinability in oblique powder blasting of glass,' J. of the KSPE, Vol. 21, No.6, pp. 28-34, 2004
9 Wakuda, M., Yamauchi, Y. and Kanzaki, S., 'Effect of workpiece properties on machinability in abrasive jet machining of ceramic materials,' Precision Engineering, Vol. 26, pp. 193-198, 2002   DOI   ScienceOn
10 Wensink, H., Jansen, H. V., Berenschot, J. W. and Elwenspoek, M. C., 'Mask materials for powder blasting,' J. Micromech. Microeng, Vol. 10, pp. 175-180, 2000   DOI   ScienceOn
11 Slikkerveer, P. J., Bouten, P. C. P. and Haas, F. C. M., 'High quality mechanical etching of brittle materials by powder blasting,' Sensors and Actuators, Vol. 85, pp. 296-303, 2000   DOI   ScienceOn