• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.9
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• pp.943-951
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• 2014

The tip geometries of the pyramidal and conical indenters used for micro/nano-indentation tests are not sharp. They are inevitably rounded because of their manufacturability and wear. In many indentation studies, the tip geometries of the pyramidal indenters are simply assumed to be spherical, and the theoretical solution for spherical indentation is simply applied to the geometry at a shallow indentation depth. This assumption, however, has two problems. First, the accuracy of the theoretical solution depends on the material properties and indenter shape. Second, the actual shapes of pyramidal indenter tips are not perfectly spherical. Hence, we consider the effects of these two problems on indentation tests via finite element analysis. We first show the relationship between the Poisson's ratio and load-displacement curve for spherical indentation, and suggest improved solutions. Then, using a possible geometry for a Berkovich indenter tip, we analyze the characteristics of the load-displacement curve with respect to the indentation depth.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.4
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• pp.95-100
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• 2019

Nanoindentation has been widely used for evaluating mechanical properties of nano-devices, from MEMS to packaging modules. Residual stress is also estimated from indentation tests, especially the Knoop indenter which is used for the determination of residual stress directionality. According to previous researches, the ratio of the two stress conversion factors of Knoop indentation is a constant at approximately 0.34. However, the ratio is supported by insufficient quantitative analyses, and only a few experimental results with indentation depth variation. Hence, a barrier for in-field application exists. In this research, the ratio of two conversion factors with variation in indentation depth using finite elements method has been attempted at. The magnitudes of each conversion factors were computed at uniaxial stress state from the modelled theoretical Knoop indenter and specimen. A model to estimate two stress conversion factor of the long and short axis of Knoop indenter at various indentation depths is proposed and analyzed.

• Journal of the Korean Society for Nondestructive Testing
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• v.33 no.2
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• pp.129-137
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• 2013

A force calibration of a nanoindenter and a 3D morphology observation of indenters were carried out in this study. A microbalance calibrated with standard weights was used for measuring the loads generated by a nanoindenter. The indentation load could be calibrated from the ratio of measured and generated loads and the first contact load also could be detected from the microbalance data. By analyzing atomic force microscopy images of two indenters, curvature radii of apexes were determined by $19.71{\pm}3.03$ and $1043.94{\pm}50.91$ nm, respectively, for the nearly new indenter A and the severly worn indenter B. Corresponding bluntness depths were estimated by 1.22 and 64.56 nm for the both indenters by overlapping their profiles on the perfect pyramidal shape. In addition, nanoindentation curves obtained from a fused silica reference material with the both indenters showed a depth difference corresponding to the bluntness depth difference along the indentation depth axis. By shifting amounts of the bluntness depths along the horizontal axis, whole nanoindentation curves overlapped on themselves and resulted in nanohardness values consistent within 1.11 % without considering the complex indenter area function of each indenter.

• The Journal of the Convergence on Culture Technology
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• v.10 no.6
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• pp.697-702
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• 2024

The instrumented indentation test(IIT) is a useful analytical technique for measuring the mechanical properties of micro or nanoscale thin films processed via coating or plating on substrates. This study aims to measure the mechanical properties of a polymer film coated on a wafer using a nanoindenter, the most representative instrument for the instrumented indentation test. We will discuss how to derive tensile strength and elongation from the obtained measurements. Typically, mechanical properties measurable by a nanoindenter include composite hardness, plastic hardness, elastic modulus, and elasticity, whereas measuring tensile strength or elongation, achievable with traditional tensile testing machines, is not possible. Therefore, this study will analyze the correlation between hardness and elongation, and based on the results, we will explore a method to derive elongation from the mechanical property data measured by the nanoindenter.

• Tribology and Lubricants
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• v.25 no.3
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• pp.163-170
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• 2009

We developed a compact micro indentation testing device (designated SNUT) which is capable to measure Young's modulus of a sample using depth and applied load data during indentation. Performance of this device was evaluated using pure Ti, pure Ni, and die steel (SKD11). As a result of analysing the indentation test data, the frame compliance $C_f$ was found to influence mainly the modulus by 80% among several factors affecting accuracy of Young's modulus. Project area, which was determined by indirect indentation method, was modified using direct SEM observation. Finally, Young's modulus error was reduced to 5% after taking into consideration the frame compliance and modified projected area from 80% error without any these two correction factors. The performance of SNUT and MTS instruments was compared using same specimen (pure Ti).

• Transactions of the Korean Society of Pressure Vessels and Piping
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• v.20 no.2
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• pp.85-96
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• 2024

In this paper, a method to quantitatively predict the reduction in fracture resistance with thermal embrittlement using micro indentation test. The change in hardness of δ-ferrite with thermal embrittlement is characterized using a concept of hardening constant. Then, thermal embrittlement constant to predict the reduction in fracture resistance with thermal embrittlement is derived from the relation between hardening constant and thermal embrittlement constant. Finally, the reduction in fracture resistance with thermal embrittlement is predicted by multiplying thermal embrittlement constant obtained from micro indentation test by J-R curve of unaged material. The validity of the hardening constant concept is confirmed by comparing the prediction and experimental results.

• Journal of the Microelectronics and Packaging Society
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• v.27 no.3
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• pp.83-88
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• 2020

The evolution of smartphones has led to numerous researches in the mechanical behavior of flexible devices. Due to the nano-size of the thin flexible film, nanoindentation is widely used to evaluate its mechanical behaviors, such as elastic modulus, and hardness. However, the commonly used Oliver-Pharr method is not suited for analyzing the indentation force-depth curves of hard films on soft substrates, as the effects of soft substrate is not considered theoretically. In this study, the elastic modulus of the thin film was evaluated with references to other reported models which include the substrate effect, and with calibration of the indentation depth for the pile-ups between the indenter and test surface. We fabricated test samples by deposition of amorphous metal film on polyimide and silicon wafers for verification of modified models.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.10
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• pp.805-816
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• 2008

The present work reviews the methods to evaluate elastic-plastic material characteristics by indentation tests. Especially the representative stress and strain values used in some papers are critically analyzed. The values should not only represent the load-depth curve, but also represent the whole of deformed material around the impression. We briefly introduce other indentation techniques to evaluate residual stresses, creep properties, and fracture toughness. We also review some technical problems that are related to the accuracy issues in indentation tests.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1744-1748
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• 2007

In this study, the Johnson-Kendall-Roberts (JKR) theory was combined with the instrumented indentation technique (IIT) to evaluate work of adhesion and modulus of elastomeric polymer. Indentation test was used to obtain the load-displacement data for contacts between Tungsten Carbide indenter and elastomeric polymer. And the JKR contact model, contrived to take viscoelastic effects of polymer into account, was applied to compensate the contact area and the elastic modulus which Hertzian contact model would underestimate and overestimate, respectively. Besides, we could obtain the thermodynamic work of adhesion by considering the surface energy in this contact model. In order to define the relation between JKR contact area and applied load without optical measuring of contact area, we used the relation between applied load and contact stiffness by examining the correlation between JKR contact area and stiffness through dimensional analysis with 14 kinds of elastomeric polymer. From this work, it could be demonstrated that the interfacial work of adhesion and elastic modulus of compliant polymer can be obtained from a simple instrumented indentation testing without area measurement, and provided as the main algorithm of compliant polymer characterization.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.9
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• pp.951-959
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• 2007

In this study, the Johnson-Kendall-Roberts(JKR) theory was combined with the instrumented indentation technique (IIT) to evaluate work of adhesion and modulus of elastomeric polymer. Indentation test was used to obtain the load-displacement data for contacts between Tungsten Carbide indenter and elastomeric polymer. And the JKR contact model, contrived to take viscoelastic effects of polymer into account, was applied to compensate the contact area and the elastic modulus which Hertzian contact model would underestimate and overestimate, respectively. Besides, we could obtain the thermodynamic work of adhesion by considering the surface energy in this contact model. In order to define the relation between JKR contact area and applied load without optical measuring of contact area, we used the relation between applied load and contact stiffness by examining the correlation between JKR contact area and stiffness through dimensional analysis with 14 kinds of elastomeric polymer. From this work, it could be demonstrated that the interfacial work of adhesion and elastic modulus of compliant polymer can be obtained from a simple instrumented indentation testing without area measurement, and provided as the main algorithm of compliant polymer characterization.